DE3214635C2 - - Google Patents
Info
- Publication number
- DE3214635C2 DE3214635C2 DE3214635A DE3214635A DE3214635C2 DE 3214635 C2 DE3214635 C2 DE 3214635C2 DE 3214635 A DE3214635 A DE 3214635A DE 3214635 A DE3214635 A DE 3214635A DE 3214635 C2 DE3214635 C2 DE 3214635C2
- Authority
- DE
- Germany
- Prior art keywords
- solution
- space
- sample
- electroless
- metallization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007872 degassing Methods 0.000 claims description 34
- 239000007788 liquid Substances 0.000 claims description 31
- 238000001465 metallisation Methods 0.000 claims description 30
- 238000005192 partition Methods 0.000 claims description 25
- 238000004458 analytical method Methods 0.000 claims description 19
- 239000011148 porous material Substances 0.000 claims description 12
- 230000000704 physical effect Effects 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 15
- 238000007747 plating Methods 0.000 description 14
- 238000007772 electroless plating Methods 0.000 description 10
- 229910052759 nickel Inorganic materials 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 208000002352 blister Diseases 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- JBANFLSTOJPTFW-UHFFFAOYSA-N azane;boron Chemical class [B].N JBANFLSTOJPTFW-UHFFFAOYSA-N 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 150000001639 boron compounds Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 230000009089 cytolysis Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910001453 nickel ion Inorganic materials 0.000 description 1
- 238000001139 pH measurement Methods 0.000 description 1
- OJMIONKXNSYLSR-UHFFFAOYSA-N phosphorous acid Chemical class OP(O)O OJMIONKXNSYLSR-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- -1 with play Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
- B01D19/0031—Degasification of liquids by filtration
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemically Coating (AREA)
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981056533U JPS6344083Y2 (en, 2012) | 1981-04-21 | 1981-04-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3214635A1 DE3214635A1 (de) | 1982-11-11 |
| DE3214635C2 true DE3214635C2 (en, 2012) | 1988-11-24 |
Family
ID=13029726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19823214635 Granted DE3214635A1 (de) | 1981-04-21 | 1982-04-20 | Entgasungsvorrichtung |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4484936A (en, 2012) |
| JP (1) | JPS6344083Y2 (en, 2012) |
| DE (1) | DE3214635A1 (en, 2012) |
| FR (1) | FR2504023B1 (en, 2012) |
| GB (1) | GB2096916B (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4041433A1 (de) * | 1990-12-21 | 1992-06-25 | Siemens Ag | Einrichtung zur aufbereitung von mehrphasengemischen fuer die analyse |
| DE10345379B3 (de) * | 2003-09-30 | 2005-06-02 | Advanced Micro Devices, Inc., Sunnyvale | Vorratstank für Prozessflüssigkeiten mit einer reduzierten Menge an Blasen und Verfahren zum Betreiben desselben |
| DE102005004361A1 (de) * | 2005-01-31 | 2006-08-03 | Advanced Micro Devices, Inc., Sunnyvale | Vorrichtung und Verfahren zum Entfernen von Blasen aus einer Prozessflüssigkeit |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2162542A (en) * | 1984-06-05 | 1986-02-05 | Carrs Paints Limited | Electro painting apparatus; degassifying electropainting bath |
| JPH06105376B2 (ja) * | 1986-01-10 | 1994-12-21 | 富士写真フイルム株式会社 | 管路構造 |
| FR2604371B1 (fr) * | 1986-09-30 | 1990-07-06 | Toulouse Inst Nal Sciences App | Procede et dispositif d'echange entre un gaz et un liquide |
| JP2893530B2 (ja) * | 1988-12-08 | 1999-05-24 | ジャパンゴアテックス株式会社 | 脱気膜 |
| EP0598424A3 (en) * | 1992-11-16 | 1996-05-15 | Novellus Systems Inc | Apparatus for removing dissolved gases from a liquid. |
| IT1260685B (it) * | 1993-09-29 | 1996-04-22 | Sorin Biomedica Spa | Dispositivo per il contenimento di sangue |
| US6342092B1 (en) | 1999-10-07 | 2002-01-29 | General Dynamics Ots (Aerospace), Inc. | Apparatus to separate gas from a liquid flow |
| TWI259215B (en) * | 2000-05-22 | 2006-08-01 | Uyemura C & Co Ltd | Automatic analyser and controller of electroless composite plating liquid |
| US6526805B1 (en) * | 2000-08-11 | 2003-03-04 | General Electric Co. | Apparatus for continuously determining volatile substances dissolved in insulating fluid |
| JP2002191905A (ja) * | 2000-12-28 | 2002-07-10 | Nipro Corp | 液循環回路用エアートラップ |
| US6596058B2 (en) * | 2001-07-16 | 2003-07-22 | Systec, Inc. | Film degassing system |
| US6746514B2 (en) * | 2002-08-08 | 2004-06-08 | Baxter International Inc. | Gas venting device and a system and method for venting a gas from a liquid delivery system |
| US6892710B2 (en) * | 2003-02-21 | 2005-05-17 | Charles Bradley Ekstam | Fuel/air separation system |
| JP2005048209A (ja) * | 2003-07-30 | 2005-02-24 | Hitachi Ltd | 無電解メッキ方法、無電解メッキ装置、半導体装置の製造方法及びその製造装置 |
| US7842176B2 (en) * | 2006-07-17 | 2010-11-30 | Yen-Chen Liao | Method for horizontally electroplating, electro deposition and electroless-plating thin film on substrate |
| US8192534B2 (en) * | 2007-10-13 | 2012-06-05 | Neema Hekmat | Open lumen air filtration for liquid lines |
| US8328938B2 (en) * | 2008-08-21 | 2012-12-11 | United Microelectronics Corp. | Buffer apparatus and thin film deposition system |
| SG160262A1 (en) * | 2008-10-02 | 2010-04-29 | United Microelectronics Corp | Buffer apparatus and thin film deposition system |
| CN101502727B (zh) * | 2009-01-20 | 2010-12-08 | 中国科学院武汉岩土力学研究所 | 基于多孔介质板的气液分离装置 |
| JP5173941B2 (ja) * | 2009-06-04 | 2013-04-03 | 三菱重工業株式会社 | Ｃｏ２回収装置 |
| MX2012002398A (es) * | 2009-08-26 | 2012-04-11 | Xcellerex Inc | Bolsa de recoleccion de recuperacion continua. |
| CN203225320U (zh) * | 2011-11-04 | 2013-10-02 | 流体公司 | 电化学电池系统 |
| WO2018018036A1 (en) | 2016-07-22 | 2018-01-25 | Fluidic, Inc. | Moisture and carbon dioxide management system in electrochemical cells |
| CA3019358A1 (en) | 2016-07-22 | 2018-01-25 | Nantenergy, Inc. | Mist elimination system for electrochemical cells |
| DE102017218209A1 (de) | 2017-10-12 | 2019-04-18 | Vivonic Gmbh | Vorrichtung und Verfahren zur Entgasung von Dialysekonzentraten für die automatische Dichtemessung in Mischanlagen |
| CN119481486A (zh) | 2018-06-29 | 2025-02-18 | 福恩能源公司 | 滚动膜片密封件 |
| CN112805868A (zh) | 2018-06-29 | 2021-05-14 | 福恩能源公司 | 金属空气电化学电池构架 |
| CN114207915A (zh) | 2019-06-28 | 2022-03-18 | 福恩能源公司 | 金属-空气电池组的设备架构 |
| WO2021226399A1 (en) | 2020-05-06 | 2021-11-11 | Form Energy, Inc. | Decoupled electrode electrochemical energy storage system |
| US20230103973A1 (en) * | 2021-09-24 | 2023-04-06 | Hamilton Sundstrand Corporation | Passive phase separator with liquid removal chamber |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT71995B (de) * | 1912-07-01 | 1916-06-26 | Paul Schou | Absorber für Vakuumeismaschinen. |
| US2981680A (en) * | 1957-03-28 | 1961-04-25 | Standard Oil Co | Separation of mixtures |
| FR1317331A (fr) * | 1961-12-29 | 1963-02-08 | Commissariat Energie Atomique | Procédé de séparation de gaz par diffusion à travers une paroi poreuse et dispositif de mise en oeuvre dudit procédé |
| US3238703A (en) * | 1963-03-07 | 1966-03-08 | Engelhard Ind Inc | Diffusion purification of gases |
| DE1260067B (de) * | 1963-04-27 | 1968-02-01 | Appbau Eugen Schrag K G | Zentrale OElversorgungsanlage |
| US3371468A (en) * | 1966-07-08 | 1968-03-05 | Exxon Research Engineering Co | Barrier separator |
| US3523408A (en) * | 1968-04-02 | 1970-08-11 | Pall Corp | Gas separator |
| CH503985A (de) * | 1968-09-19 | 1971-02-28 | Ceskoslovenska Akademie Ved | Verfahren und Einrichtung zur Trennung eines Hauptmediums von einem Strom, der durch einzelne Abschnitte des Hauptmediums und eines Trennmediums gebildet wird |
| US3631654A (en) * | 1968-10-03 | 1972-01-04 | Pall Corp | Gas purge device |
| US3657113A (en) * | 1970-02-03 | 1972-04-18 | Mobil Oil Corp | Separating fluids with selective membranes |
| FR2106918A5 (en, 2012) * | 1970-09-29 | 1972-05-05 | Rhone Poulenc Sa | |
| JPS4935467U (en, 2012) * | 1972-06-30 | 1974-03-28 | ||
| US3999963A (en) * | 1972-10-05 | 1976-12-28 | Phillips Petroleum Company | Fluid sample preparation |
| US4004587A (en) * | 1975-06-13 | 1977-01-25 | Baxter Travenol Laboratories, Inc. | Parenteral liquid administration set with non-air blocking filter |
| DE2604003C3 (de) * | 1976-02-03 | 1980-04-30 | Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen | Vorrichtung zum Entgasen von Flüssigkeiten an einer porösen, hydrophoben Folie |
| US4325715A (en) * | 1976-03-24 | 1982-04-20 | Bowman Donald B | Apparatus for degassing hemodialysis liquid |
| US4039305A (en) * | 1976-11-17 | 1977-08-02 | Caterpillar Tractor Co. | Apparatus for removing gas from a liquid system |
| US4190426A (en) * | 1977-11-30 | 1980-02-26 | Baxter Travenol Laboratories, Inc. | Gas separating and venting filter |
| DE2754810C3 (de) * | 1977-12-09 | 1980-12-11 | Dr. Eduard Fresenius Chemisch-Pharmazeutische Industrie Kg Apparatebau Kg, 6380 Bad Homburg | Hämofiltrationsgerät |
| US4225440A (en) * | 1979-02-23 | 1980-09-30 | Isadore Pitesky | Filter holding assembly |
| JPS55167401U (en, 2012) * | 1979-05-16 | 1980-12-02 | ||
| US4386944A (en) * | 1980-07-24 | 1983-06-07 | General Electric Company | System and process for increasing the combustible component content of a gaseous mixture |
-
1981
- 1981-04-21 JP JP1981056533U patent/JPS6344083Y2/ja not_active Expired
-
1982
- 1982-04-15 US US06/368,745 patent/US4484936A/en not_active Expired - Fee Related
- 1982-04-20 DE DE19823214635 patent/DE3214635A1/de active Granted
- 1982-04-20 FR FR8206782A patent/FR2504023B1/fr not_active Expired
- 1982-04-20 GB GB8211421A patent/GB2096916B/en not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4041433A1 (de) * | 1990-12-21 | 1992-06-25 | Siemens Ag | Einrichtung zur aufbereitung von mehrphasengemischen fuer die analyse |
| DE10345379B3 (de) * | 2003-09-30 | 2005-06-02 | Advanced Micro Devices, Inc., Sunnyvale | Vorratstank für Prozessflüssigkeiten mit einer reduzierten Menge an Blasen und Verfahren zum Betreiben desselben |
| DE102005004361A1 (de) * | 2005-01-31 | 2006-08-03 | Advanced Micro Devices, Inc., Sunnyvale | Vorrichtung und Verfahren zum Entfernen von Blasen aus einer Prozessflüssigkeit |
| DE102005004361B4 (de) * | 2005-01-31 | 2006-12-07 | Advanced Micro Devices, Inc., Sunnyvale | Vorrichtung und Verfahren zum Entfernen von Blasen aus einer Prozessflüssigkeit |
| US7615103B2 (en) | 2005-01-31 | 2009-11-10 | Advanced Micro Devices, Inc. | Apparatus and method for removing bubbles from a process liquid |
| US7947158B2 (en) | 2005-01-31 | 2011-05-24 | Globalfoundries Inc. | Apparatus and method for removing bubbles from a process liquid |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2504023B1 (fr) | 1986-03-21 |
| US4484936A (en) | 1984-11-27 |
| GB2096916B (en) | 1984-08-15 |
| FR2504023A1 (fr) | 1982-10-22 |
| JPS6344083Y2 (en, 2012) | 1988-11-16 |
| DE3214635A1 (de) | 1982-11-11 |
| GB2096916A (en) | 1982-10-27 |
| JPS57169403U (en, 2012) | 1982-10-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |