DE3143059A1 - Vakuumventil - Google Patents

Vakuumventil

Info

Publication number
DE3143059A1
DE3143059A1 DE19813143059 DE3143059A DE3143059A1 DE 3143059 A1 DE3143059 A1 DE 3143059A1 DE 19813143059 DE19813143059 DE 19813143059 DE 3143059 A DE3143059 A DE 3143059A DE 3143059 A1 DE3143059 A1 DE 3143059A1
Authority
DE
Germany
Prior art keywords
piston
conductance
vacuum valve
valve according
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19813143059
Other languages
German (de)
English (en)
Inventor
Karl 6333 Braunfels Abbel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PFEIFFER VAKUUMTECHNIK
Pfeiffer Vacuum Technology AG
Original Assignee
PFEIFFER VAKUUMTECHNIK
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PFEIFFER VAKUUMTECHNIK, Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH filed Critical PFEIFFER VAKUUMTECHNIK
Priority to DE19813143059 priority Critical patent/DE3143059A1/de
Priority to CH14682A priority patent/CH654893A5/de
Priority to GB08203197A priority patent/GB2108633B/en
Priority to JP5522282A priority patent/JPS5881288A/ja
Priority to FR8205771A priority patent/FR2515775A1/fr
Publication of DE3143059A1 publication Critical patent/DE3143059A1/de
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K47/00—Means in valves for absorbing fluid energy
    • F16K47/04—Means in valves for absorbing fluid energy for decreasing pressure or noise level, the throttle being incorporated in the closure member

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Lift Valve (AREA)
DE19813143059 1981-10-30 1981-10-30 Vakuumventil Ceased DE3143059A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19813143059 DE3143059A1 (de) 1981-10-30 1981-10-30 Vakuumventil
CH14682A CH654893A5 (de) 1981-10-30 1982-01-12 Vakuumventil.
GB08203197A GB2108633B (en) 1981-10-30 1982-02-04 Vacuum valve
JP5522282A JPS5881288A (ja) 1981-10-30 1982-04-02 真空バルブ
FR8205771A FR2515775A1 (fr) 1981-10-30 1982-04-02 Soupape a vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813143059 DE3143059A1 (de) 1981-10-30 1981-10-30 Vakuumventil

Publications (1)

Publication Number Publication Date
DE3143059A1 true DE3143059A1 (de) 1983-05-19

Family

ID=6145188

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813143059 Ceased DE3143059A1 (de) 1981-10-30 1981-10-30 Vakuumventil

Country Status (5)

Country Link
JP (1) JPS5881288A (https=)
CH (1) CH654893A5 (https=)
DE (1) DE3143059A1 (https=)
FR (1) FR2515775A1 (https=)
GB (1) GB2108633B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19735351A1 (de) * 1997-08-14 1999-02-18 Ardenne Anlagentech Gmbh Belüftungseinrichtung für Vakuumkammern
US8105430B2 (en) 2009-06-30 2012-01-31 Alberta Research Council Inc. Aircraft anti-icing fluids formulated with nanocrystalline cellulose

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE653469C (de) * 1933-05-04 1937-11-24 Meyer Fa Rud Otto Einrichtung an Absperrvorrichtungen zur Regelung der Durchflussmenge
DE741363C (de) * 1940-01-13 1944-10-16 Rota App Und Maschb Dr Hennig Mengenregler fuer Fluessigkeiten
DE851135C (de) * 1950-09-15 1952-10-02 Hoechst Ag Vorrichtung zur Erzeugung gleichmaessiger Fluessigkeitsstroeme
CH456277A (de) * 1967-11-09 1968-05-15 Jecklin Rudolf Absperrorgan, insbesondere für Flüssigkeitsleitungen
US3521853A (en) * 1966-12-12 1970-07-28 Thomas S Gillis Jr Throttle and shutoff valve
DE2639909A1 (de) * 1975-09-17 1977-03-24 Balzers Hochvakuum Vakuumdosierventil

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE375587B (https=) * 1972-10-03 1975-04-21 Bygg Och Transportekonomie Ab

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE653469C (de) * 1933-05-04 1937-11-24 Meyer Fa Rud Otto Einrichtung an Absperrvorrichtungen zur Regelung der Durchflussmenge
DE741363C (de) * 1940-01-13 1944-10-16 Rota App Und Maschb Dr Hennig Mengenregler fuer Fluessigkeiten
DE851135C (de) * 1950-09-15 1952-10-02 Hoechst Ag Vorrichtung zur Erzeugung gleichmaessiger Fluessigkeitsstroeme
US3521853A (en) * 1966-12-12 1970-07-28 Thomas S Gillis Jr Throttle and shutoff valve
CH456277A (de) * 1967-11-09 1968-05-15 Jecklin Rudolf Absperrorgan, insbesondere für Flüssigkeitsleitungen
DE2639909A1 (de) * 1975-09-17 1977-03-24 Balzers Hochvakuum Vakuumdosierventil

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19735351A1 (de) * 1997-08-14 1999-02-18 Ardenne Anlagentech Gmbh Belüftungseinrichtung für Vakuumkammern
DE19735351C2 (de) * 1997-08-14 1999-10-21 Ardenne Anlagentech Gmbh Belüftungseinrichtung für Vakuumkammern
US8105430B2 (en) 2009-06-30 2012-01-31 Alberta Research Council Inc. Aircraft anti-icing fluids formulated with nanocrystalline cellulose

Also Published As

Publication number Publication date
CH654893A5 (de) 1986-03-14
GB2108633B (en) 1985-08-21
FR2515775B1 (https=) 1985-03-15
GB2108633A (en) 1983-05-18
JPS5881288A (ja) 1983-05-16
FR2515775A1 (fr) 1983-05-06

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
OP8 Request for examination as to paragraph 44 patent law
8131 Rejection