DE3038415C2 - Zweistufige Kryopumpe - Google Patents
Zweistufige KryopumpeInfo
- Publication number
- DE3038415C2 DE3038415C2 DE3038415A DE3038415A DE3038415C2 DE 3038415 C2 DE3038415 C2 DE 3038415C2 DE 3038415 A DE3038415 A DE 3038415A DE 3038415 A DE3038415 A DE 3038415A DE 3038415 C2 DE3038415 C2 DE 3038415C2
- Authority
- DE
- Germany
- Prior art keywords
- stage
- pump
- plates
- pumping
- cryopump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005086 pumping Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 10
- 239000007789 gas Substances 0.000 description 9
- 230000005855 radiation Effects 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- 229910052754 neon Inorganic materials 0.000 description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/086,107 US4295338A (en) | 1979-10-18 | 1979-10-18 | Cryogenic pumping apparatus with replaceable pumping surface elements |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3038415A1 DE3038415A1 (de) | 1981-04-30 |
DE3038415C2 true DE3038415C2 (de) | 1987-02-12 |
Family
ID=22196315
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3038415A Expired DE3038415C2 (de) | 1979-10-18 | 1980-10-10 | Zweistufige Kryopumpe |
Country Status (6)
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103742389A (zh) * | 2013-10-18 | 2014-04-23 | 昆山珍实复合材料有限公司 | 一种真空低温泵中的组合冷板 |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3046458A1 (de) * | 1980-12-10 | 1982-07-15 | Leybold-Heraeus GmbH, 5000 Köln | Refrigerator-kryostat |
JPS58160552A (ja) * | 1982-03-18 | 1983-09-24 | Toyota Motor Corp | 内燃機関の点火時期制御方法 |
DE3216591A1 (de) * | 1982-05-04 | 1983-11-10 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe mit jalousieartigem baffle |
DE3232324C2 (de) * | 1982-08-31 | 1986-08-28 | Leybold-Heraeus GmbH, 5000 Köln | Refrigerator-betriebene Kryopumpe |
US4479361A (en) * | 1983-03-02 | 1984-10-30 | The United States Of America As Represented By The United States Department Of Energy | Gas pump with movable gas pumping panels |
IL71403A (en) * | 1983-04-04 | 1991-01-31 | Helix Tech Corp | Cryopump with rapid cooldown and increased pressure stability |
US4494381A (en) * | 1983-05-13 | 1985-01-22 | Helix Technology Corporation | Cryopump with improved adsorption capacity |
US4530213A (en) * | 1983-06-28 | 1985-07-23 | Air Products And Chemicals, Inc. | Economical and thermally efficient cryopump panel and panel array |
US4555907A (en) * | 1984-05-18 | 1985-12-03 | Helix Technology Corporation | Cryopump with improved second stage array |
US4559787A (en) * | 1984-12-04 | 1985-12-24 | The United States Of America As Represented By The United States Department Of Energy | Vacuum pump apparatus |
IT1201263B (it) * | 1985-03-26 | 1989-01-27 | Galileo Spa Off | Pompa criogenica a refrigeratore con geometria degli scherma atta a raggiungere elevata efficienza e durata prolungata |
DE3512614A1 (de) * | 1985-04-06 | 1986-10-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe |
US4718241A (en) * | 1985-10-31 | 1988-01-12 | Helix Technology Corporation | Cryopump with quicker adsorption |
US4791791A (en) * | 1988-01-20 | 1988-12-20 | Varian Associates, Inc. | Cryosorption surface for a cryopump |
ATE91531T1 (de) * | 1989-02-28 | 1993-07-15 | Leybold Ag | Mit einem zweistufigen refrigerator betriebene kryopumpe. |
DE9111236U1 (de) * | 1991-09-10 | 1992-07-09 | Leybold AG, 6450 Hanau | Kryopumpe |
WO1994000212A1 (en) * | 1992-06-24 | 1994-01-06 | Extek Cryogenics Inc. | Cryopump |
IT1302694B1 (it) * | 1998-10-19 | 2000-09-29 | Getters Spa | Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea. |
US6330801B1 (en) | 1999-06-11 | 2001-12-18 | Francis J. Whelan | Method and system for increasing cryopump capacity |
US7850432B2 (en) * | 2006-09-14 | 2010-12-14 | Gamma Vacuum, Llc | Ion pump having emission containment |
JP4980180B2 (ja) * | 2007-09-06 | 2012-07-18 | 住友重機械工業株式会社 | クライオパネル |
JP4686572B2 (ja) * | 2008-05-14 | 2011-05-25 | 住友重機械工業株式会社 | クライオポンプ、真空排気システム、及びその診断方法 |
JP6031451B2 (ja) | 2011-02-09 | 2016-11-24 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
JP5679913B2 (ja) * | 2011-06-14 | 2015-03-04 | 住友重機械工業株式会社 | クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプ監視方法 |
JP6057782B2 (ja) * | 2013-03-05 | 2017-01-11 | 住友重機械工業株式会社 | クライオポンプ |
JP6659930B2 (ja) | 2014-03-21 | 2020-03-04 | エドワーズ バキューム リミテッド ライアビリティ カンパニー | クライオポンプ・ハイブリッド前面アレイ |
CN105464930B (zh) * | 2015-12-29 | 2018-01-30 | 安徽万瑞冷电科技有限公司 | 用于低温泵的吸附盒 |
CN108105066B (zh) * | 2017-12-26 | 2019-04-12 | 安徽万瑞冷电科技有限公司 | 一种可变抽速的低温泵 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2703673A (en) * | 1950-04-08 | 1955-03-08 | Alois Vogt | Vacuum pump |
DE2455712A1 (de) * | 1974-11-25 | 1976-08-12 | Eckhard Kellner | Cryo-sorptionspumpe |
DE2620880C2 (de) * | 1976-05-11 | 1984-07-12 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe |
US4150549A (en) * | 1977-05-16 | 1979-04-24 | Air Products And Chemicals, Inc. | Cryopumping method and apparatus |
CH628959A5 (en) * | 1978-04-18 | 1982-03-31 | Balzers Hochvakuum | Cryopump with a fitted refrigerating machine |
-
1979
- 1979-10-18 US US06/086,107 patent/US4295338A/en not_active Expired - Lifetime
-
1980
- 1980-10-10 DE DE3038415A patent/DE3038415C2/de not_active Expired
- 1980-10-13 GB GB8033035A patent/GB2061391B/en not_active Expired
- 1980-10-14 JP JP14251580A patent/JPS5664175A/ja active Pending
- 1980-10-15 FR FR8022009A patent/FR2468008A1/fr not_active Withdrawn
- 1980-10-17 CH CH7782/80A patent/CH650560A5/de not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103742389A (zh) * | 2013-10-18 | 2014-04-23 | 昆山珍实复合材料有限公司 | 一种真空低温泵中的组合冷板 |
CN103742389B (zh) * | 2013-10-18 | 2015-12-23 | 石狮市台瑞精密机械有限公司 | 一种真空低温泵中的组合冷板 |
Also Published As
Publication number | Publication date |
---|---|
DE3038415A1 (de) | 1981-04-30 |
JPS5664175A (en) | 1981-06-01 |
FR2468008A1 (fr) | 1981-04-30 |
CH650560A5 (de) | 1985-07-31 |
US4295338A (en) | 1981-10-20 |
GB2061391B (en) | 1983-09-14 |
GB2061391A (en) | 1981-05-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
8128 | New person/name/address of the agent |
Representative=s name: BERNHARDT, K., DIPL.-ING., PAT.-ANW., 8000 MUENCHE |
|
D2 | Grant after examination | ||
8363 | Opposition against the patent | ||
8331 | Complete revocation |