DE3037622C2 - - Google Patents

Info

Publication number
DE3037622C2
DE3037622C2 DE3037622A DE3037622A DE3037622C2 DE 3037622 C2 DE3037622 C2 DE 3037622C2 DE 3037622 A DE3037622 A DE 3037622A DE 3037622 A DE3037622 A DE 3037622A DE 3037622 C2 DE3037622 C2 DE 3037622C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3037622A
Other versions
DE3037622A1 (de
Inventor
Gerhard Dipl.-Ing. Thurn
Theodor Prof. Dr.-Ing. 1000 Berlin De Gast
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE19803037622 priority Critical patent/DE3037622A1/de
Priority to JP56157390A priority patent/JPS5791403A/ja
Priority to FR8118617A priority patent/FR2491615A1/fr
Priority to GB8130045A priority patent/GB2088552B/en
Priority to CH6385/81A priority patent/CH654914A5/de
Publication of DE3037622A1 publication Critical patent/DE3037622A1/de
Priority to US06/932,234 priority patent/US4859062A/en
Application granted granted Critical
Publication of DE3037622C2 publication Critical patent/DE3037622C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE19803037622 1980-10-04 1980-10-04 Optoelektronisches messverfahren und einrichtungen zum bestimmen der oberflaechenguete streuend reflektierender oberflaechen Granted DE3037622A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE19803037622 DE3037622A1 (de) 1980-10-04 1980-10-04 Optoelektronisches messverfahren und einrichtungen zum bestimmen der oberflaechenguete streuend reflektierender oberflaechen
JP56157390A JPS5791403A (en) 1980-10-04 1981-10-01 Optoelectronic measuring method of and apparatus for roughness of surface
FR8118617A FR2491615A1 (fr) 1980-10-04 1981-10-02 Procede de mesure optoelectronique et dispositifs pour la determination de la qualite de surfaces a reflexion diffuse
GB8130045A GB2088552B (en) 1980-10-04 1981-10-05 Measurement of surface quality of dispersively refelcting surfaces
CH6385/81A CH654914A5 (de) 1980-10-04 1981-10-05 Optoelektronisches messverfahren und einrichtung zum bestimmen der oberflaechenguete streuend reflektierender oder transparenter oberflaechen.
US06/932,234 US4859062A (en) 1980-10-04 1985-01-22 Optoelectrical measuring system and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803037622 DE3037622A1 (de) 1980-10-04 1980-10-04 Optoelektronisches messverfahren und einrichtungen zum bestimmen der oberflaechenguete streuend reflektierender oberflaechen

Publications (2)

Publication Number Publication Date
DE3037622A1 DE3037622A1 (de) 1982-04-22
DE3037622C2 true DE3037622C2 (de) 1987-02-26

Family

ID=6113657

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19803037622 Granted DE3037622A1 (de) 1980-10-04 1980-10-04 Optoelektronisches messverfahren und einrichtungen zum bestimmen der oberflaechenguete streuend reflektierender oberflaechen

Country Status (6)

Country Link
US (1) US4859062A (de)
JP (1) JPS5791403A (de)
CH (1) CH654914A5 (de)
DE (1) DE3037622A1 (de)
FR (1) FR2491615A1 (de)
GB (1) GB2088552B (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3732934A1 (de) * 1987-09-30 1989-04-20 Heidelberger Druckmasch Ag Sensoreinrichtung
DE3814606A1 (de) * 1988-04-29 1989-11-09 Interpane Entw & Beratungsges Verfahren und vorrichtung zur erfassung von strukturen einer oberflaeche eines flaechigen guts
WO1990005279A1 (en) * 1987-05-15 1990-05-17 Rathjen, Dirk Measurement method for determining a surface profile
DE19632763A1 (de) * 1996-08-14 1998-02-26 Holger Moritz Meßkopf für die Beobachtung der Photolackentwicklung
US7295299B2 (en) 2001-10-22 2007-11-13 Jenoptik Surface Inspection Gmbh Device for optically measuring surface properties
DE102015114065A1 (de) * 2015-08-25 2017-03-02 Brodmann Technologies GmbH Verfahren und Einrichtung zur berührungslosen Beurteilung der Oberflächenbeschaffenheit eines Wafers

Families Citing this family (74)

* Cited by examiner, † Cited by third party
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DD208670A1 (de) * 1982-06-29 1984-04-04 Pentacon Dresden Veb Vorrichtung zur schnellen messung des glanzes beliebiger oberflaechen
DE3232904A1 (de) * 1982-09-04 1984-03-08 Robert Bosch Gmbh, 7000 Stuttgart Sonde zum automatischen pruefen von oberflaechen
DE8303856U1 (de) * 1983-02-11 1985-11-14 Optische Werke G. Rodenstock, 8000 Muenchen Vorrichtung zur Ermittlung einer Oberflächenstruktur, insbesondere der Rauheit
DE3337468A1 (de) * 1983-10-14 1985-04-25 Optische Werke G. Rodenstock, 8000 München Verfahren und vorrichtung zur pruefung der oberflaeche von bauteilen
DE3503231A1 (de) * 1985-01-31 1986-08-07 Helmut A. 6720 Speyer Kappner Verfahren und einrichtung zur 3-d-erfassung von szenen mittels optischem 2-d-sensor
FR2581753B1 (fr) * 1985-05-07 1993-09-03 Roulements Soc Nouvelle Appareil de controle de rugosite par voie optique
DE3621567A1 (de) * 1985-06-28 1987-01-02 Ando Electric Mit reflektiertem licht arbeitender oberflaechenrauheitsanalysator
CH669663A5 (de) * 1985-12-17 1989-03-31 Schweiz Eidgenossenschaft Sin
JP2661913B2 (ja) * 1986-05-02 1997-10-08 パ−テイクル、メジユアリング、システムズ インコ−ポレ−テツド 表面分析方法および表面分析装置
FR2601128A1 (fr) * 1986-07-03 1988-01-08 Etu Rech Machine Outil Centre Rugosimetre a source laser pour l'analyse et le controle de qualite des surfaces mecaniques
EP0358818B1 (de) * 1988-09-12 1992-04-22 Moshe Golberstein Vorrichtung zur Reflektionsphotometrie
FR2620823B1 (fr) * 1987-09-17 1990-08-17 Centre Tech Ind Papier Dispositif pour determiner en continu un indice d'etat de surface d'un materiau en feuille en mouvement
US5133019A (en) * 1987-12-03 1992-07-21 Identigrade Systems and methods for illuminating and evaluating surfaces
US4991971A (en) * 1989-02-13 1991-02-12 United Technologies Corporation Fiber optic scatterometer for measuring optical surface roughness
JPH0660813B2 (ja) * 1990-01-16 1994-08-10 政則 栗田 表面粗さ測定装置および表面粗さ測定方法
US5153844A (en) * 1990-01-23 1992-10-06 E. I. Du Pont De Nemours And Company Method and apparatus for measuring surface flatness
US5196906A (en) * 1990-06-29 1993-03-23 Tma Technologies, Inc. Modular scatterometer with interchangeable scanning heads
JPH04203956A (ja) * 1990-11-29 1992-07-24 Bando Chem Ind Ltd 外観検査方法および装置
US5218417A (en) * 1990-12-17 1993-06-08 Siemens Corporation System and methods for measuring the haze of a thin film
FI88828C (fi) * 1991-02-06 1993-07-12 Valmet Paper Machinery Inc Foerfarande och anordning vid fotoelektrisk identifiering av en materialbana
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JP3323537B2 (ja) * 1991-07-09 2002-09-09 キヤノン株式会社 微細構造評価装置及び微細構造評価法
DE4134747C2 (de) * 1991-10-22 1997-09-25 Fraunhofer Ges Forschung Lichtmeßanordnung zur Detektion von Oberflächendefekten
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DE4408226C2 (de) * 1994-03-11 1997-08-28 Peter Dr Ing Lehmann Meßeinrichtung zur prozeßgekoppelten Bestimmung der Rauheit technischer Oberflächen durch Auswertung di- oder polychromatischer Specklemuster
DE4434473A1 (de) * 1994-09-27 1996-03-28 Basler Gmbh Verfahren und Vorrichtung zur Qualitätskontrolle von Gegenständen mit polarisiertem Licht
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US5708506A (en) * 1995-07-03 1998-01-13 Applied Materials, Inc. Apparatus and method for detecting surface roughness in a chemical polishing pad conditioning process
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DE19817664A1 (de) * 1998-04-21 1999-11-04 Peter Lehmann Verfahren und Vorrichtung zur Rauheitsmessung an technischen Oberflächen bei Beleuchtung mit einem Specklemuster
US6184528B1 (en) 1998-08-27 2001-02-06 Vought Aircraft Industries, Inc. Method of spectral nondestructive evaluation
AU1212000A (en) 1998-10-16 2000-05-08 Ade Optical Systems Corporation Method and apparatus for mapping surface topography of a substrate
US6444971B1 (en) * 1999-12-31 2002-09-03 Leica Microsystems Heidelberg Gmbh Method and system for compensating intensity fluctuations of an illumination system in a confocal microscope
WO2002056262A1 (fr) * 2001-01-16 2002-07-18 Rossisky Federalny Jaderny Tsentr-Vserossisky Nauchno-Issledovatelsky Institut Tekhnicheskoi Fiziki (Rfyats-Vniitf) Procede de verification de l'authenticite d'un objet
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DE102004021600A1 (de) 2004-05-03 2005-12-08 Gretag-Macbeth Ag Vorrichtung zur Inline-Überwachung der Druckqualität bei Bogenoffsetdruckmaschinen
DE102005007780A1 (de) 2005-02-19 2006-08-31 Man Roland Druckmaschinen Ag Vorrichtung und Verfahren zur Messung der zonalen Farbgebung
DE602006009202D1 (de) * 2005-11-08 2009-10-29 Mitutoyo Corp Formmessgerät
DE102006015627B4 (de) * 2006-03-31 2008-03-27 Innovent E.V. Verfahren und Vorrichtung zur Bestimmung und Vermessung von Formabweichungen und Welligkeiten an rotationssymmetrischen Teilen
JP4967125B2 (ja) * 2006-12-12 2012-07-04 国立大学法人広島大学 部材表面検査装置及び部材表面検査方法
ES2648217T3 (es) * 2007-04-26 2017-12-29 Sick Ivp Ab Método y aparato para determinar la cantidad de luz dispersada en un sistema de visión artificial
ES2374686T3 (es) 2007-05-14 2012-02-21 Historx, Inc. Separación en compartimentos por caracterización de píxel usando agrupamiento de datos de imágenes.
CA2690633C (en) 2007-06-15 2015-08-04 Historx, Inc. Method and system for standardizing microscope instruments
CA2604317C (en) 2007-08-06 2017-02-28 Historx, Inc. Methods and system for validating sample images for quantitative immunoassays
CA2596204C (en) 2007-08-07 2019-02-26 Historx, Inc. Method and system for determining an optimal dilution of a reagent
WO2009029810A1 (en) * 2007-08-31 2009-03-05 Historx, Inc. Automatic exposure time selection for imaging tissue
US20090157212A1 (en) * 2007-12-12 2009-06-18 Basf Corporation System and method of determining paint formula having a effect pigment
JP5058838B2 (ja) * 2008-02-01 2012-10-24 キヤノン株式会社 情報処理装置および方法
JP5036644B2 (ja) * 2008-07-03 2012-09-26 住友重機械工業株式会社 表面検査方法、及びびびりマーク検査装置
CA2737116C (en) 2008-09-16 2019-01-15 Historx, Inc. Reproducible quantification of biomarker expression
JP2014163690A (ja) * 2013-02-21 2014-09-08 Mitsutoyo Corp 形状測定装置
US9151671B2 (en) * 2013-08-26 2015-10-06 Thermo Electron Scientific Instruments Llc Motorized variable path length cell for spectroscopy
JP6465345B2 (ja) * 2014-12-26 2019-02-06 株式会社荏原製作所 研磨パッドの表面性状測定方法および装置
US9909860B2 (en) 2015-04-15 2018-03-06 General Electric Company Systems and methods for monitoring component deformation
US10697760B2 (en) 2015-04-15 2020-06-30 General Electric Company Data acquisition devices, systems and method for analyzing strain sensors and monitoring component strain
US9557164B2 (en) 2015-04-15 2017-01-31 General Electric Company Data acquisition devices, systems and method for analyzing strain sensors and monitoring turbine component strain
US9932853B2 (en) 2015-04-28 2018-04-03 General Electric Company Assemblies and methods for monitoring turbine component strain
DE102015106737A1 (de) * 2015-04-30 2016-11-03 Brodmann Technologies GmbH Verfahren und Einrichtung zur Beurteilung der Oberflächenbeschaffenheit nach der winkelaufgelösten Streulichtmessmethode mit automatischer Lageerkennung des Werkstücks
US9846933B2 (en) 2015-11-16 2017-12-19 General Electric Company Systems and methods for monitoring components
US9953408B2 (en) 2015-11-16 2018-04-24 General Electric Company Methods for monitoring components
US9733062B2 (en) 2015-11-20 2017-08-15 General Electric Company Systems and methods for monitoring component strain
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US9879981B1 (en) 2016-12-02 2018-01-30 General Electric Company Systems and methods for evaluating component strain
US10132615B2 (en) 2016-12-20 2018-11-20 General Electric Company Data acquisition devices, systems and method for analyzing passive strain indicators and monitoring turbine component strain
US10126119B2 (en) 2017-01-17 2018-11-13 General Electric Company Methods of forming a passive strain indicator on a preexisting component
US10872176B2 (en) 2017-01-23 2020-12-22 General Electric Company Methods of making and monitoring a component with an integral strain indicator
US11313673B2 (en) 2017-01-24 2022-04-26 General Electric Company Methods of making a component with an integral strain indicator
US10345179B2 (en) 2017-02-14 2019-07-09 General Electric Company Passive strain indicator
US10502551B2 (en) 2017-03-06 2019-12-10 General Electric Company Methods for monitoring components using micro and macro three-dimensional analysis
US10451499B2 (en) 2017-04-06 2019-10-22 General Electric Company Methods for applying passive strain indicators to components

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990005279A1 (en) * 1987-05-15 1990-05-17 Rathjen, Dirk Measurement method for determining a surface profile
DE3732934A1 (de) * 1987-09-30 1989-04-20 Heidelberger Druckmasch Ag Sensoreinrichtung
DE3814606A1 (de) * 1988-04-29 1989-11-09 Interpane Entw & Beratungsges Verfahren und vorrichtung zur erfassung von strukturen einer oberflaeche eines flaechigen guts
DE19632763A1 (de) * 1996-08-14 1998-02-26 Holger Moritz Meßkopf für die Beobachtung der Photolackentwicklung
DE19632763C2 (de) * 1996-08-14 1998-09-10 Holger Moritz Meßkopf für die Beobachtung der Photolackentwicklung
US7295299B2 (en) 2001-10-22 2007-11-13 Jenoptik Surface Inspection Gmbh Device for optically measuring surface properties
DE10151332B4 (de) * 2001-10-22 2007-12-06 Jenoptik Surface Inspection Gmbh Vorrichtung zur optischen Messung von Oberflächeneigenschaften
DE102015114065A1 (de) * 2015-08-25 2017-03-02 Brodmann Technologies GmbH Verfahren und Einrichtung zur berührungslosen Beurteilung der Oberflächenbeschaffenheit eines Wafers
US10180316B2 (en) 2015-08-25 2019-01-15 Brodmann Technologies GmbH Method and device for the contactless assessment of the surface quality of a wafer

Also Published As

Publication number Publication date
DE3037622A1 (de) 1982-04-22
FR2491615B1 (de) 1985-05-17
FR2491615A1 (fr) 1982-04-09
JPH0153401B2 (de) 1989-11-14
GB2088552B (en) 1985-02-06
JPS5791403A (en) 1982-06-07
US4859062A (en) 1989-08-22
CH654914A5 (de) 1986-03-14
GB2088552A (en) 1982-06-09

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