DE3034339C2 - Fördervorrichtung für Gegenstände - Google Patents
Fördervorrichtung für GegenständeInfo
- Publication number
- DE3034339C2 DE3034339C2 DE3034339T DE3034339T DE3034339C2 DE 3034339 C2 DE3034339 C2 DE 3034339C2 DE 3034339 T DE3034339 T DE 3034339T DE 3034339 T DE3034339 T DE 3034339T DE 3034339 C2 DE3034339 C2 DE 3034339C2
- Authority
- DE
- Germany
- Prior art keywords
- elements
- carrier
- group
- rail
- rails
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G25/00—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement
- B65G25/02—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement the carrier or impeller having different forward and return paths of movement, e.g. walking beam conveyors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Reciprocating Conveyors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/012,354 US4275978A (en) | 1979-02-15 | 1979-02-15 | Transport apparatus |
PCT/US1980/000139 WO1980001677A1 (en) | 1979-02-15 | 1980-02-12 | Workpiece conveying apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3034339T1 DE3034339T1 (de) | 1982-08-26 |
DE3034339C2 true DE3034339C2 (de) | 1986-09-25 |
Family
ID=21754574
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3034339T Expired DE3034339C2 (de) | 1979-02-15 | 1980-02-12 | Fördervorrichtung für Gegenstände |
Country Status (5)
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4692695A (en) * | 1982-05-18 | 1987-09-08 | Ade Corporation | Conductivity-type sensor |
US4646009A (en) * | 1982-05-18 | 1987-02-24 | Ade Corporation | Contacts for conductivity-type sensors |
US4498832A (en) * | 1982-05-21 | 1985-02-12 | The Boc Group, Inc. | Workpiece accumulating and transporting apparatus |
EP0137819B1 (en) * | 1983-02-14 | 1987-08-12 | Aeronca Electronics, Inc. | Articulated arm transfer device |
US4666366A (en) * | 1983-02-14 | 1987-05-19 | Canon Kabushiki Kaisha | Articulated arm transfer device |
US4909695A (en) * | 1986-04-04 | 1990-03-20 | Materials Research Corporation | Method and apparatus for handling and processing wafer-like materials |
US4794863A (en) * | 1988-03-21 | 1989-01-03 | International Business Machines Corporation | Motive structure for transporting workpieces |
US5197812A (en) * | 1989-11-09 | 1993-03-30 | Dataproducts Corporation | High accuracy vacuum belt and pinch roller media transport mechanism |
US5664664A (en) * | 1994-12-28 | 1997-09-09 | U.S. Vibra, Inc. | Magnetic vibrator sub-assembly for vibratory feed devices |
KR100430885B1 (ko) * | 1995-12-15 | 2004-06-16 | 브룩스 오토메이션 인코퍼레이티드 | 관절아암을 구비한 물체이송장치 |
US5765983A (en) * | 1996-05-30 | 1998-06-16 | Brooks Automation, Inc. | Robot handling apparatus |
US6123502A (en) * | 1997-07-08 | 2000-09-26 | Brooks Automation, Inc. | Substrate holder having vacuum holding and gravity holding |
US6105753A (en) * | 1997-08-14 | 2000-08-22 | Graham; S. Neal | Linear vibratory parts feeder |
US20040091344A1 (en) * | 2002-11-12 | 2004-05-13 | Innovative Steel Products, Inc. | Lifting and moving apparatus for a vehicle bed |
US7004306B2 (en) * | 2002-12-19 | 2006-02-28 | Fmc Technologies, Inc. | Conveying apparatus with piezoelectric driver |
US7458763B2 (en) | 2003-11-10 | 2008-12-02 | Blueshift Technologies, Inc. | Mid-entry load lock for semiconductor handling system |
US10086511B2 (en) | 2003-11-10 | 2018-10-02 | Brooks Automation, Inc. | Semiconductor manufacturing systems |
KR20070008533A (ko) * | 2003-11-10 | 2007-01-17 | 블루쉬프트 테크놀로지스, 인코포레이티드. | 진공-사용 반도체 핸들링 시스템에서 작업 편을 핸들링하기위한 방법 및 시스템 |
US20070269297A1 (en) | 2003-11-10 | 2007-11-22 | Meulen Peter V D | Semiconductor wafer handling and transport |
US10923374B1 (en) * | 2019-07-23 | 2021-02-16 | Applied Materials, Inc. | Walking beam chamber |
DE102020106350B4 (de) * | 2020-03-09 | 2021-09-16 | IMA-TEC GmbH | Fördergerät |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1176773B (de) * | 1954-03-29 | 1964-08-27 | Deutsche Edelstahlwerke Ag | Vorrichtung zum Hindurchfoerdern von Werk-stuecken durch einen Induktor |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE7716749U1 (US20020128544A1-20020912-P00008.png) * | 1900-01-01 | Valentin, Otto, 7987 Weingarten | ||
US2705070A (en) * | 1950-03-17 | 1955-03-29 | Carrier Conveyor Corp | Balanced conveyor |
US2951581A (en) * | 1959-06-09 | 1960-09-06 | Gen Mills Inc | Vibratory conveyors |
US3973665A (en) * | 1975-03-07 | 1976-08-10 | Gca Corporation | Article delivery and transport apparatus for evacuated processing equipment |
-
1979
- 1979-02-15 US US06/012,354 patent/US4275978A/en not_active Expired - Lifetime
-
1980
- 1980-02-12 DE DE3034339T patent/DE3034339C2/de not_active Expired
- 1980-02-12 WO PCT/US1980/000139 patent/WO1980001677A1/en active Application Filing
- 1980-02-15 FR FR8003407A patent/FR2449051A1/fr active Granted
- 1980-02-15 CA CA000345764A patent/CA1137914A/en not_active Expired
-
1982
- 1982-10-20 CA CA000413864A patent/CA1155079A/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1176773B (de) * | 1954-03-29 | 1964-08-27 | Deutsche Edelstahlwerke Ag | Vorrichtung zum Hindurchfoerdern von Werk-stuecken durch einen Induktor |
Also Published As
Publication number | Publication date |
---|---|
FR2449051B1 (US20020128544A1-20020912-P00008.png) | 1984-04-20 |
US4275978A (en) | 1981-06-30 |
CA1155079A (en) | 1983-10-11 |
CA1137914A (en) | 1982-12-21 |
DE3034339T1 (de) | 1982-08-26 |
FR2449051A1 (fr) | 1980-09-12 |
WO1980001677A1 (en) | 1980-08-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8128 | New person/name/address of the agent |
Representative=s name: MITSCHERLICH, H., DIPL.-ING. GUNSCHMANN, K., DIPL. |
|
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |