DE69015616T2 - Verfahren und gerät bezüglich ionenimplantierung. - Google Patents

Verfahren und gerät bezüglich ionenimplantierung.

Info

Publication number
DE69015616T2
DE69015616T2 DE69015616T DE69015616T DE69015616T2 DE 69015616 T2 DE69015616 T2 DE 69015616T2 DE 69015616 T DE69015616 T DE 69015616T DE 69015616 T DE69015616 T DE 69015616T DE 69015616 T2 DE69015616 T2 DE 69015616T2
Authority
DE
Germany
Prior art keywords
ion implantation
device regarding
regarding ion
implantation
regarding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69015616T
Other languages
English (en)
Other versions
DE69015616D1 (de
Inventor
Derek Aitken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Superion Ltd
Original Assignee
Superion Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Superion Ltd filed Critical Superion Ltd
Publication of DE69015616D1 publication Critical patent/DE69015616D1/de
Application granted granted Critical
Publication of DE69015616T2 publication Critical patent/DE69015616T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20221—Translation
    • H01J2237/20228—Mechanical X-Y scanning
DE69015616T 1989-10-27 1990-10-26 Verfahren und gerät bezüglich ionenimplantierung. Expired - Fee Related DE69015616T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB898924223A GB8924223D0 (en) 1989-10-27 1989-10-27 Method and apparatus relating to ion implantation
PCT/GB1990/001653 WO1991006972A1 (en) 1989-10-27 1990-10-26 Method and apparatus relating to ion implantation

Publications (2)

Publication Number Publication Date
DE69015616D1 DE69015616D1 (de) 1995-02-09
DE69015616T2 true DE69015616T2 (de) 1995-08-24

Family

ID=10665275

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69015616T Expired - Fee Related DE69015616T2 (de) 1989-10-27 1990-10-26 Verfahren und gerät bezüglich ionenimplantierung.

Country Status (6)

Country Link
US (1) US5194748A (de)
EP (1) EP0451247B1 (de)
JP (1) JPH04502534A (de)
DE (1) DE69015616T2 (de)
GB (1) GB8924223D0 (de)
WO (1) WO1991006972A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5486702A (en) * 1993-09-21 1996-01-23 Genus, Inc. Scan technique to reduce transient wafer temperatures during ion implantation
JPH10134761A (ja) * 1996-10-30 1998-05-22 Ebara Corp イオン注入装置及びイオン注入方法
US6268609B1 (en) * 1999-04-19 2001-07-31 Applied Materials, Inc. Apparatus and method for reducing heating of a workpiece in ion implantation
GB2389958B (en) * 2002-06-21 2005-09-07 Applied Materials Inc Multi directional mechanical scanning in an ion implanter
US7282427B1 (en) 2006-05-04 2007-10-16 Applied Materials, Inc. Method of implanting a substrate and an ion implanter for performing the method
US7994486B2 (en) * 2006-10-30 2011-08-09 Applied Materials, Inc. Substrate scanner apparatus
US8044374B2 (en) * 2009-06-30 2011-10-25 Twin Creeks Technologies, Inc. Ion implantation apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5953659B2 (ja) * 1980-04-11 1984-12-26 株式会社日立製作所 真空室中回転体の往復動機構
FR2529383A1 (fr) * 1982-06-24 1983-12-30 Commissariat Energie Atomique Porte-cible a balayage mecanique utilisable notamment pour l'implantation d'ioris
US4578859A (en) * 1984-08-22 1986-04-01 Harris Corporation Implant mask reversal process
JPS61267248A (ja) * 1985-05-20 1986-11-26 Fuji Electric Co Ltd イオン注入装置
JPS625548A (ja) * 1985-07-01 1987-01-12 Hitachi Ltd イオンビ−ム加工装置
JP2582552B2 (ja) * 1986-05-29 1997-02-19 三菱電機株式会社 イオン注入装置

Also Published As

Publication number Publication date
DE69015616D1 (de) 1995-02-09
US5194748A (en) 1993-03-16
EP0451247B1 (de) 1994-12-28
WO1991006972A1 (en) 1991-05-16
JPH04502534A (ja) 1992-05-07
EP0451247A1 (de) 1991-10-16
GB8924223D0 (en) 1989-12-13

Similar Documents

Publication Publication Date Title
DE3881473T2 (de) Verfahren und sterilisationsvorrichtung.
DE69017259T2 (de) Ionenimplantationsgerät und sein Steuerungsverfahren.
DE3781313T2 (de) Verfahren und vorrichtung.
DE69021435D1 (de) Ionen-Implantationsgerät.
DE69122728D1 (de) Verfahren und Gerät zur Ionenimplantierung
DE294214T1 (de) Coexstrusions-vorrichtung und -verfahren.
DE69017563T2 (de) Ionenimplantationsvorrichtung.
DE3484334D1 (de) Vorrichtung und verfahren zur ionenimplantation.
DE69030329T2 (de) Ionimplantationsgerät
DE69007779T2 (de) Trocknungsverfahren und vorrichtung dazu.
DE69017075D1 (de) Ionen-Implantationsgerät.
DE69020937D1 (de) Abbildungsverfahren und -vorrichtung.
DE69028264T2 (de) Regelungsverfahren und -vorrichtung
DE3881795T2 (de) Testvorrichtung und Verfahren.
DE69414659D1 (de) Gerät und Verfahren zur Ionenimplantierung
DE69015616D1 (de) Verfahren und gerät bezüglich ionenimplantierung.
DE3853296D1 (de) Blätterverteilungsverfahren und vorrichtung.
DE3774804D1 (de) Elektrophotographisches verfahren und geraet.
DE3879192D1 (de) Verfahren und vorrichtung zur elektrodesionisation.
DE69001135D1 (de) Loetverfahren und loetgeraet.
DE68917794D1 (de) Elektrofotographisches Gerät und Verfahren.
IT1234175B (it) Metodo e dispositivo survoltore.
DE69121374D1 (de) Gerät und Verfahren zur Ionenimplantierung
DE69019772T2 (de) Ionenimplantationsvorrichtung.
DE68921005D1 (de) Fixiervorrichtung und verfahren.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee