DE69414659D1 - Gerät und Verfahren zur Ionenimplantierung - Google Patents

Gerät und Verfahren zur Ionenimplantierung

Info

Publication number
DE69414659D1
DE69414659D1 DE69414659T DE69414659T DE69414659D1 DE 69414659 D1 DE69414659 D1 DE 69414659D1 DE 69414659 T DE69414659 T DE 69414659T DE 69414659 T DE69414659 T DE 69414659T DE 69414659 D1 DE69414659 D1 DE 69414659D1
Authority
DE
Germany
Prior art keywords
ion implantation
implantation
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69414659T
Other languages
English (en)
Other versions
DE69414659T2 (de
Inventor
Hiroyuki Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69414659D1 publication Critical patent/DE69414659D1/de
Application granted granted Critical
Publication of DE69414659T2 publication Critical patent/DE69414659T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/004—Charge control of objects or beams
    • H01J2237/0041—Neutralising arrangements
    • H01J2237/0044—Neutralising arrangements of objects being observed or treated
    • H01J2237/0045—Neutralising arrangements of objects being observed or treated using secondary electrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE69414659T 1993-08-05 1994-08-04 Gerät und Verfahren zur Ionenimplantierung Expired - Fee Related DE69414659T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19493193 1993-08-05
JP16708594A JP3599373B2 (ja) 1993-08-05 1994-07-19 イオン注入装置及びイオン注入方法

Publications (2)

Publication Number Publication Date
DE69414659D1 true DE69414659D1 (de) 1998-12-24
DE69414659T2 DE69414659T2 (de) 1999-06-17

Family

ID=26491233

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69414659T Expired - Fee Related DE69414659T2 (de) 1993-08-05 1994-08-04 Gerät und Verfahren zur Ionenimplantierung

Country Status (5)

Country Link
US (1) US5587587A (de)
EP (1) EP0637834B1 (de)
JP (1) JP3599373B2 (de)
CA (1) CA2129403C (de)
DE (1) DE69414659T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2331179B (en) * 1997-11-07 2002-03-20 Applied Materials Inc Method of preventing negative charge build up on a substrate being implanted w ith positive ions and ion implantation apparatus for performing such a method
DE19801295B4 (de) * 1998-01-16 2007-06-06 Siemens Ag Einrichtung zur Regelung eines Lichtbogenofens
US6741445B1 (en) * 2002-01-16 2004-05-25 Advanced Micro Devices, Inc. Method and system to monitor and control electro-static discharge
US7342240B2 (en) * 2006-02-24 2008-03-11 Varian Semiconductor Equipment Associates, Inc. Ion beam current monitoring
WO2008094297A2 (en) * 2006-07-14 2008-08-07 Fei Company A multi-source plasma focused ion beam system
US7667208B2 (en) * 2006-10-17 2010-02-23 Varian Semiconductor Equipment Associates, Inc. Technique for confining secondary electrons in plasma-based ion implantation
WO2010120805A2 (en) * 2009-04-13 2010-10-21 Applied Materials, Inc. Modification of magnetic properties of films using ion and neutral beam implantation
CN103413746A (zh) * 2013-06-25 2013-11-27 上海华力微电子有限公司 提高离子注入机使用周期的锗注入方法
US9956932B2 (en) * 2016-08-30 2018-05-01 The United States Of America As Represented By The Secretary Of The Navy Induction charge transfer system and method for neutralizing electrostatic charge generation
EP3389078A1 (de) * 2017-04-13 2018-10-17 The Swatch Group Research and Development Ltd Implantationsverfahren von mehrfach geladenen ionen in eine oberfläche eines zu behandelnden objekts, und anlage für die umsetzung dieses verfahrens

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4135097A (en) * 1977-05-05 1979-01-16 International Business Machines Corporation Ion implantation apparatus for controlling the surface potential of a target surface
US4463255A (en) * 1980-09-24 1984-07-31 Varian Associates, Inc. Apparatus for enhanced neutralization of positively charged ion beam
US4675530A (en) * 1985-07-11 1987-06-23 Eaton Corporation Charge density detector for beam implantation
US5072125A (en) * 1989-10-05 1991-12-10 Mitsubishi Denki Kabushiki Kaisha Ion implanter
JPH0433246A (ja) * 1990-05-26 1992-02-04 Ricoh Co Ltd イオン注入装置のエンドステーション
JPH05135731A (ja) * 1991-07-08 1993-06-01 Sony Corp イオン注入装置
JPH05136078A (ja) * 1991-11-12 1993-06-01 Mitsubishi Electric Corp イオン注入装置
JPH0661166A (ja) * 1992-08-10 1994-03-04 Nissin Electric Co Ltd イオン注入の中性化方法と中性化装置

Also Published As

Publication number Publication date
CA2129403C (en) 1999-06-01
US5587587A (en) 1996-12-24
JP3599373B2 (ja) 2004-12-08
EP0637834B1 (de) 1998-11-18
DE69414659T2 (de) 1999-06-17
JPH0799035A (ja) 1995-04-11
CA2129403A1 (en) 1995-02-06
EP0637834A1 (de) 1995-02-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee