DE3031759A1 - Festkoerper-bildaufnahmevorrichtung - Google Patents
Festkoerper-bildaufnahmevorrichtungInfo
- Publication number
- DE3031759A1 DE3031759A1 DE19803031759 DE3031759A DE3031759A1 DE 3031759 A1 DE3031759 A1 DE 3031759A1 DE 19803031759 DE19803031759 DE 19803031759 DE 3031759 A DE3031759 A DE 3031759A DE 3031759 A1 DE3031759 A1 DE 3031759A1
- Authority
- DE
- Germany
- Prior art keywords
- light
- area
- absorbing
- color filter
- semiconductor body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 title description 3
- 239000007787 solid Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 claims description 33
- 239000002952 polymeric resin Substances 0.000 claims description 10
- 229920003002 synthetic resin Polymers 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 2
- 239000011358 absorbing material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 44
- 239000010408 film Substances 0.000 description 28
- 239000000758 substrate Substances 0.000 description 27
- 108010010803 Gelatin Proteins 0.000 description 14
- 229920000159 gelatin Polymers 0.000 description 14
- 239000008273 gelatin Substances 0.000 description 14
- 235000019322 gelatine Nutrition 0.000 description 14
- 235000011852 gelatine desserts Nutrition 0.000 description 14
- 239000003086 colorant Substances 0.000 description 10
- 230000001681 protective effect Effects 0.000 description 10
- 239000010409 thin film Substances 0.000 description 9
- 238000002156 mixing Methods 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 239000000975 dye Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 108010025899 gelatin film Proteins 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229920002454 poly(glycidyl methacrylate) polymer Polymers 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000001045 blue dye Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229920002189 poly(glycerol 1-O-monomethacrylate) polymer Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000001044 red dye Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001960 triggered effect Effects 0.000 description 2
- SRUQARLMFOLRDN-UHFFFAOYSA-N 1-(2,4,5-Trihydroxyphenyl)-1-butanone Chemical compound CCCC(=O)C1=CC(O)=C(O)C=C1O SRUQARLMFOLRDN-UHFFFAOYSA-N 0.000 description 1
- 102100039386 Ketimine reductase mu-crystallin Human genes 0.000 description 1
- 101000772180 Lithobates catesbeianus Transthyretin Proteins 0.000 description 1
- 101100323513 Mus musculus Apof gene Proteins 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052798 chalcogen Inorganic materials 0.000 description 1
- 150000001787 chalcogens Chemical class 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- MCPLVIGCWWTHFH-UHFFFAOYSA-L methyl blue Chemical compound [Na+].[Na+].C1=CC(S(=O)(=O)[O-])=CC=C1NC1=CC=C(C(=C2C=CC(C=C2)=[NH+]C=2C=CC(=CC=2)S([O-])(=O)=O)C=2C=CC(NC=3C=CC(=CC=3)S([O-])(=O)=O)=CC=2)C=C1 MCPLVIGCWWTHFH-UHFFFAOYSA-L 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- AJDUTMFFZHIJEM-UHFFFAOYSA-N n-(9,10-dioxoanthracen-1-yl)-4-[4-[[4-[4-[(9,10-dioxoanthracen-1-yl)carbamoyl]phenyl]phenyl]diazenyl]phenyl]benzamide Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2NC(=O)C(C=C1)=CC=C1C(C=C1)=CC=C1N=NC(C=C1)=CC=C1C(C=C1)=CC=C1C(=O)NC1=CC=CC2=C1C(=O)C1=CC=CC=C1C2=O AJDUTMFFZHIJEM-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 230000035755 proliferation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000001043 yellow dye Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14645—Colour imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
- H01L27/14667—Colour imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10726279A JPS5631287A (en) | 1979-08-24 | 1979-08-24 | Color solid image pickup element and its production |
| JP12684479A JPS5651183A (en) | 1979-10-03 | 1979-10-03 | Color solid image pickup element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3031759A1 true DE3031759A1 (de) | 1981-03-26 |
| DE3031759C2 DE3031759C2 (e) | 1989-06-29 |
Family
ID=26447304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19803031759 Granted DE3031759A1 (de) | 1979-08-24 | 1980-08-22 | Festkoerper-bildaufnahmevorrichtung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4412236A (e) |
| DE (1) | DE3031759A1 (e) |
| NL (1) | NL8004768A (e) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0108480A2 (en) * | 1982-11-01 | 1984-05-16 | Kabushiki Kaisha Toshiba | Photoelectric conversion element |
| EP0134697A1 (en) * | 1983-08-04 | 1985-03-20 | Seiko Instruments Inc. | Method of manufacturing a colour filter on a solid state colour imaging device and a solid state colour imaging device |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5772370A (en) * | 1980-10-23 | 1982-05-06 | Canon Inc | Photoelectric converter |
| NL8105071A (nl) * | 1981-11-10 | 1983-06-01 | Philips Nv | Kleurenbeeldopneeminrichting. |
| JPS58105672A (ja) * | 1981-12-17 | 1983-06-23 | Fuji Photo Film Co Ltd | 半導体撮像装置 |
| JPS58168017A (ja) * | 1982-03-29 | 1983-10-04 | Mitsubishi Electric Corp | 固体撮像素子 |
| US4533940A (en) * | 1983-06-13 | 1985-08-06 | Chappell Barbara A | High spatial resolution energy discriminator |
| US4581625A (en) * | 1983-12-19 | 1986-04-08 | Atlantic Richfield Company | Vertically integrated solid state color imager |
| US5020118A (en) * | 1984-06-13 | 1991-05-28 | Canon Kabushiki Kaisha | Image reading apparatus |
| JPS6157181A (ja) * | 1984-08-28 | 1986-03-24 | Sharp Corp | 固体撮像装置 |
| US4941029A (en) * | 1985-02-27 | 1990-07-10 | Westinghouse Electric Corp. | High resistance optical shield for visible sensors |
| JPS61292960A (ja) * | 1985-06-21 | 1986-12-23 | Toshiba Corp | 固体撮像装置 |
| DE3617229C2 (de) * | 1986-05-22 | 1997-04-30 | Aeg Infrarot Module Gmbh | Strahlungsdetektor |
| US4718557A (en) * | 1987-04-03 | 1988-01-12 | Ivy Hill Corporation | Easy opening, reclosable carton |
| JPH05183141A (ja) * | 1991-07-12 | 1993-07-23 | Fuji Xerox Co Ltd | カラーイメージセンサ |
| US5798542A (en) * | 1996-10-08 | 1998-08-25 | Eastman Kodak Company | Image sensor having ITO electrodes with overlapping color filters for increased sensitivity |
| US6376868B1 (en) | 1999-06-15 | 2002-04-23 | Micron Technology, Inc. | Multi-layered gate for a CMOS imager |
| DE10025363A1 (de) * | 2000-05-23 | 2001-12-20 | Fraunhofer Ges Forschung | Bildsensorelement und Bildsensor |
| EP2290952A3 (en) * | 2000-07-27 | 2011-08-17 | Canon Kabushiki Kaisha | Image sensing apparatus |
| JP4505982B2 (ja) * | 2000-11-30 | 2010-07-21 | 三菱電機株式会社 | 光ヘッド装置、記録及び／又は再生装置並びに記録及び／又は再生方法 |
| KR100485892B1 (ko) * | 2002-11-14 | 2005-04-29 | 매그나칩 반도체 유한회사 | 시모스 이미지센서 및 그 제조방법 |
| US8299510B2 (en) * | 2007-02-02 | 2012-10-30 | Rohm Co., Ltd. | Solid state imaging device and fabrication method for the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2647274A1 (de) * | 1975-12-12 | 1977-06-16 | Ibm | Phototransistorbildabtaster |
| DE2802987A1 (de) * | 1977-01-24 | 1978-07-27 | Hitachi Ltd | Festkoerper-abbildungsvorrichtung |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3969751A (en) * | 1974-12-18 | 1976-07-13 | Rca Corporation | Light shield for a semiconductor device comprising blackened photoresist |
| US4001878A (en) * | 1975-11-19 | 1977-01-04 | Rca Corporation | Charge transfer color imagers |
| JPS5839386B2 (ja) * | 1978-02-22 | 1983-08-30 | 株式会社東芝 | 電荷転送形イメ−ジセンサ |
| FR2433868A1 (fr) * | 1978-08-17 | 1980-03-14 | Hitachi Ltd | Dispositif de formation d'image a semi-conducteur |
| FR2433871A1 (fr) * | 1978-08-18 | 1980-03-14 | Hitachi Ltd | Dispositif de formation d'image a semi-conducteur |
| US4354104A (en) * | 1980-05-06 | 1982-10-12 | Matsushita Electric Industrial Co., Ltd. | Solid-state image pickup device |
-
1980
- 1980-08-21 US US06/180,042 patent/US4412236A/en not_active Expired - Lifetime
- 1980-08-22 NL NL8004768A patent/NL8004768A/nl not_active Application Discontinuation
- 1980-08-22 DE DE19803031759 patent/DE3031759A1/de active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2647274A1 (de) * | 1975-12-12 | 1977-06-16 | Ibm | Phototransistorbildabtaster |
| DE2802987A1 (de) * | 1977-01-24 | 1978-07-27 | Hitachi Ltd | Festkoerper-abbildungsvorrichtung |
Non-Patent Citations (1)
| Title |
|---|
| Elektro-Anzeiger, 23. Jg., Nr. 27, 9.12.1970, S. 517-521 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0108480A2 (en) * | 1982-11-01 | 1984-05-16 | Kabushiki Kaisha Toshiba | Photoelectric conversion element |
| EP0108480A3 (en) * | 1982-11-01 | 1986-07-16 | Kabushiki Kaisha Toshiba | Photoelectric conversion element |
| US4672221A (en) * | 1982-11-01 | 1987-06-09 | Tokyo Shibaura Denki Kabushiki Kaisha | Photoelectric conversion element with light shielding conductive layer |
| EP0134697A1 (en) * | 1983-08-04 | 1985-03-20 | Seiko Instruments Inc. | Method of manufacturing a colour filter on a solid state colour imaging device and a solid state colour imaging device |
Also Published As
| Publication number | Publication date |
|---|---|
| US4412236A (en) | 1983-10-25 |
| DE3031759C2 (e) | 1989-06-29 |
| NL8004768A (nl) | 1981-02-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8128 | New person/name/address of the agent |
Representative=s name: STREHL, P., DIPL.-ING. DIPL.-WIRTSCH.-ING. SCHUEBE |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |