JPS5631287A - Color solid image pickup element and its production - Google Patents

Color solid image pickup element and its production

Info

Publication number
JPS5631287A
JPS5631287A JP10726279A JP10726279A JPS5631287A JP S5631287 A JPS5631287 A JP S5631287A JP 10726279 A JP10726279 A JP 10726279A JP 10726279 A JP10726279 A JP 10726279A JP S5631287 A JPS5631287 A JP S5631287A
Authority
JP
Japan
Prior art keywords
protection film
production
image pickup
pickup element
solid image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10726279A
Other languages
Japanese (ja)
Inventor
Akira Sasano
Toshio Nakano
Ken Tsutsui
Michiaki Hashimoto
Tadao Kaneko
Norio Koike
Akiya Izumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10726279A priority Critical patent/JPS5631287A/en
Priority to US06/180,042 priority patent/US4412236A/en
Priority to NL8004768A priority patent/NL8004768A/en
Priority to DE19803031759 priority patent/DE3031759A1/en
Publication of JPS5631287A publication Critical patent/JPS5631287A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14609Pixel-elements with integrated switching, control, storage or amplification elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/10Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming different wavelengths into image signals
    • H04N25/11Arrangement of colour filter arrays [CFA]; Filter mosaics
    • H04N25/13Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements
    • H04N25/134Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements based on three different wavelength filter elements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Color Television Image Signal Generators (AREA)

Abstract

PURPOSE:To facilitate forming a color filter and improve optical and electric characteristics, by providing a black filter on the semiconductor substrate surface. CONSTITUTION:Insulating protection film 107 is formed on semiconductor substrate 101 having photodetecting region 102. Next, black filter 108 is formed on insulating protection film 107. Next, color mixing preventing protection film 112 is formed on black filter 108 and insulating protection film 107, and a prescribed color filter is formed on this color mixing preventing protection film 112.
JP10726279A 1979-08-24 1979-08-24 Color solid image pickup element and its production Pending JPS5631287A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10726279A JPS5631287A (en) 1979-08-24 1979-08-24 Color solid image pickup element and its production
US06/180,042 US4412236A (en) 1979-08-24 1980-08-21 Color solid-state imager
NL8004768A NL8004768A (en) 1979-08-24 1980-08-22 SEMICONDUCTOR COLOR IMAGE RECORDER.
DE19803031759 DE3031759A1 (en) 1979-08-24 1980-08-22 SOLID BODY IMAGING DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10726279A JPS5631287A (en) 1979-08-24 1979-08-24 Color solid image pickup element and its production

Publications (1)

Publication Number Publication Date
JPS5631287A true JPS5631287A (en) 1981-03-30

Family

ID=14454582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10726279A Pending JPS5631287A (en) 1979-08-24 1979-08-24 Color solid image pickup element and its production

Country Status (1)

Country Link
JP (1) JPS5631287A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156668A (en) * 1988-12-09 1990-06-15 Matsushita Electron Corp Color solid-state image sensing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156668A (en) * 1988-12-09 1990-06-15 Matsushita Electron Corp Color solid-state image sensing device

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