DE3019869A1 - Vorrichtung zum erzeugen eines bildes einer aetz- bzw. druckvorlage fuer eine gedruckte schaltung - Google Patents

Vorrichtung zum erzeugen eines bildes einer aetz- bzw. druckvorlage fuer eine gedruckte schaltung

Info

Publication number
DE3019869A1
DE3019869A1 DE19803019869 DE3019869A DE3019869A1 DE 3019869 A1 DE3019869 A1 DE 3019869A1 DE 19803019869 DE19803019869 DE 19803019869 DE 3019869 A DE3019869 A DE 3019869A DE 3019869 A1 DE3019869 A1 DE 3019869A1
Authority
DE
Germany
Prior art keywords
carriage
output medium
signal
scanning
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19803019869
Other languages
German (de)
English (en)
Other versions
DE3019869C2 (US06724976-20040420-M00002.png
Inventor
Don Barker Neumann
Lili K Norton
Eric Verne Olson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gerber Systems Corp
Original Assignee
Eocom Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eocom Corp filed Critical Eocom Corp
Priority to DE3050985A priority Critical patent/DE3050985C3/de
Publication of DE3019869A1 publication Critical patent/DE3019869A1/de
Application granted granted Critical
Publication of DE3019869C2 publication Critical patent/DE3019869C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K15/00—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
    • G06K15/02—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers
    • G06K15/12—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers
    • G06K15/1204—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers involving the fast moving of an optical beam in the main scanning direction
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K15/00—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
    • G06K15/02—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers
    • G06K15/12—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers
    • G06K15/1204—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers involving the fast moving of an optical beam in the main scanning direction
    • G06K15/1219—Detection, control or error compensation of scanning velocity or position, e.g. synchronisation
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047—Detection, control or error compensation of scanning velocity or position
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047—Detection, control or error compensation of scanning velocity or position
    • H04N1/053—Detection, control or error compensation of scanning velocity or position in main scanning direction, e.g. synchronisation of line start or picture elements in a line
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/10—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using flat picture-bearing surfaces
    • H04N1/1008—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using flat picture-bearing surfaces with sub-scanning by translatory movement of the picture-bearing surface
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/32—Circuits or arrangements for control or supervision between transmitter and receiver or between image input and image output device, e.g. between a still-image camera and its memory or between a still-image camera and a printer device
    • H04N1/36—Circuits or arrangements for control or supervision between transmitter and receiver or between image input and image output device, e.g. between a still-image camera and its memory or between a still-image camera and a printer device for synchronising or phasing transmitter and receiver
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/40—Picture signal circuits
    • H04N1/401—Compensating positionally unequal response of the pick-up or reproducing head
    • H04N1/4015—Compensating positionally unequal response of the pick-up or reproducing head of the reproducing head
    • H—ELECTRICITY
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    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
    • H04N1/1135—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors for the main-scan only
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/02406—Arrangements for positioning elements within a head
    • H04N2201/02416—Rotational positioning, i.e. with respect to an axis
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
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    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/02406—Arrangements for positioning elements within a head
    • H04N2201/02439—Positioning method
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/02406—Arrangements for positioning elements within a head
    • H04N2201/02439—Positioning method
    • H04N2201/02443—Positioning method using adhesive
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/028—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted for picture information pick-up
    • H04N2201/03—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted for picture information pick-up deleted
    • H04N2201/031—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted for picture information pick-up deleted deleted
    • H04N2201/03104—Integral pick-up heads, i.e. self-contained heads whose basic elements are a light source, a lens and a photodetector supported by a single-piece frame
    • H04N2201/03108—Components of integral heads
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/0471—Detection of scanning velocity or position using dedicated detectors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04715—Detection of scanning velocity or position by detecting marks or the like, e.g. slits
    • H04N2201/04724—Detection of scanning velocity or position by detecting marks or the like, e.g. slits on a separate encoder wheel
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04715—Detection of scanning velocity or position by detecting marks or the like, e.g. slits
    • H04N2201/04724—Detection of scanning velocity or position by detecting marks or the like, e.g. slits on a separate encoder wheel
    • H04N2201/04725—Detection of scanning velocity or position by detecting marks or the like, e.g. slits on a separate encoder wheel connected to the sub-scanning drive means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04729—Detection of scanning velocity or position in the main-scan direction
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
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    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04731—Detection of scanning velocity or position in the sub-scan direction
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    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
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    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
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    • H04N2201/04734—Detecting at frequent intervals, e.g. once per line for sub-scan control
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    • H04—ELECTRIC COMMUNICATION TECHNIQUE
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    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04734—Detecting at frequent intervals, e.g. once per line for sub-scan control
    • H04N2201/04736—Detecting at frequent intervals, e.g. once per line for sub-scan control with varying intervals between consecutive detections
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    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04744—Detection of scanning velocity or position by detecting the scanned beam or a reference beam
    • H04N2201/04746—Detection of scanning velocity or position by detecting the scanned beam or a reference beam after modulation by a grating, mask or the like
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    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04755—Control or error compensation of scanning position or velocity by controlling the position or movement of a scanning element or carriage, e.g. of a polygonal mirror, of a drive motor
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    • H04—ELECTRIC COMMUNICATION TECHNIQUE
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    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04756—Control or error compensation of scanning position or velocity by controlling the position or movement of the sheet, the sheet support or the photoconductive surface
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
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    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04758—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area
    • H04N2201/04767—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area by controlling the timing of the signals, e.g. by controlling the frequency o phase of the pixel clock
    • H04N2201/04768—Controlling the frequency of the signals
    • H04N2201/04772—Controlling the frequency of the signals using a phase-locked loop
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04789—Control or error compensation of scanning position or velocity in the main-scan direction
    • H—ELECTRICITY
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    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04791—Control or error compensation of scanning position or velocity in the sub-scan direction
    • H—ELECTRICITY
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    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
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    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04794—Varying the control or compensation during the scan, e.g. using continuous feedback or from line to line
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04794—Varying the control or compensation during the scan, e.g. using continuous feedback or from line to line
    • H04N2201/04798—Varying the main-scan control during the main-scan, e.g. facet tracking
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/056—Using an artwork, i.e. a photomask for exposing photosensitive layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/107—Using laser light
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/107—Using laser light
    • H05K2203/108—Using a plurality of lasers or laser light with a plurality of wavelengths

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Plasma & Fusion (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Laser Beam Processing (AREA)
DE19803019869 1979-05-24 1980-05-23 Vorrichtung zum erzeugen eines bildes einer aetz- bzw. druckvorlage fuer eine gedruckte schaltung Granted DE3019869A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3050985A DE3050985C3 (de) 1979-05-24 1980-05-23 Bilderzeugungsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/042,133 US4419675A (en) 1979-05-24 1979-05-24 Imaging system and method for printed circuit artwork and the like

Publications (2)

Publication Number Publication Date
DE3019869A1 true DE3019869A1 (de) 1980-12-04
DE3019869C2 DE3019869C2 (US06724976-20040420-M00002.png) 1988-09-29

Family

ID=21920218

Family Applications (3)

Application Number Title Priority Date Filing Date
DE3050984A Expired - Lifetime DE3050984C2 (US06724976-20040420-M00002.png) 1979-05-24 1980-05-23
DE19803019869 Granted DE3019869A1 (de) 1979-05-24 1980-05-23 Vorrichtung zum erzeugen eines bildes einer aetz- bzw. druckvorlage fuer eine gedruckte schaltung
DE3050986A Expired DE3050986C2 (US06724976-20040420-M00002.png) 1979-05-24 1980-05-23

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3050984A Expired - Lifetime DE3050984C2 (US06724976-20040420-M00002.png) 1979-05-24 1980-05-23

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE3050986A Expired DE3050986C2 (US06724976-20040420-M00002.png) 1979-05-24 1980-05-23

Country Status (10)

Country Link
US (1) US4419675A (US06724976-20040420-M00002.png)
JP (5) JPS55166643A (US06724976-20040420-M00002.png)
AU (2) AU540855B2 (US06724976-20040420-M00002.png)
CA (1) CA1149080A (US06724976-20040420-M00002.png)
DE (3) DE3050984C2 (US06724976-20040420-M00002.png)
FR (1) FR2457620A1 (US06724976-20040420-M00002.png)
GB (5) GB2050750B (US06724976-20040420-M00002.png)
IT (1) IT1130659B (US06724976-20040420-M00002.png)
NL (1) NL8003018A (US06724976-20040420-M00002.png)
SE (1) SE8003860L (US06724976-20040420-M00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3603544A1 (de) * 1986-02-05 1987-08-06 Sick Optik Elektronik Erwin Optische abtastvorrichtung
DE19829986C1 (de) * 1998-07-04 2000-03-30 Lis Laser Imaging Systems Gmbh Verfahren zur Direktbelichtung von Leiterplattensubstraten

Families Citing this family (20)

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DE3050986C2 (US06724976-20040420-M00002.png) 1988-03-17
US4419675A (en) 1983-12-06
GB8325707D0 (en) 1983-10-26
AU551136B2 (en) 1986-04-17
JPS6323123A (ja) 1988-01-30
NL8003018A (nl) 1980-11-26
GB2126834A (en) 1984-03-28
JPS55166643A (en) 1980-12-25
CA1149080A (en) 1983-06-28
FR2457620B1 (US06724976-20040420-M00002.png) 1985-03-29
GB8325704D0 (en) 1983-10-26
GB2126833B (en) 1984-09-05
GB8325706D0 (en) 1983-10-26
GB2126835A (en) 1984-03-28
FR2457620A1 (fr) 1980-12-19
IT8022260A0 (it) 1980-05-22
JPS6345086B2 (US06724976-20040420-M00002.png) 1988-09-08
GB2126833A (en) 1984-03-28
DE3050986A1 (US06724976-20040420-M00002.png) 1985-06-13
GB2127253B (en) 1984-09-19
GB2126835B (en) 1984-09-12
JPS6323463A (ja) 1988-01-30
AU540855B2 (en) 1984-12-06
JPS6323122A (ja) 1988-01-30
GB2127253A (en) 1984-04-04
GB2050750A (en) 1981-01-07
JPH0414326B2 (US06724976-20040420-M00002.png) 1992-03-12
GB2126834B (en) 1984-09-05
DE3019869C2 (US06724976-20040420-M00002.png) 1988-09-29
GB2050750B (en) 1984-05-02
GB8325705D0 (en) 1983-10-26
JPS6323462A (ja) 1988-01-30
JPH0261023B2 (US06724976-20040420-M00002.png) 1990-12-18
AU5851880A (en) 1980-11-27
DE3050984C2 (US06724976-20040420-M00002.png) 1992-07-02
IT1130659B (it) 1986-06-18
SE8003860L (sv) 1980-11-25
AU2747684A (en) 1984-08-16

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