DE2949092A1 - Kryopumpe - Google Patents

Kryopumpe

Info

Publication number
DE2949092A1
DE2949092A1 DE19792949092 DE2949092A DE2949092A1 DE 2949092 A1 DE2949092 A1 DE 2949092A1 DE 19792949092 DE19792949092 DE 19792949092 DE 2949092 A DE2949092 A DE 2949092A DE 2949092 A1 DE2949092 A1 DE 2949092A1
Authority
DE
Germany
Prior art keywords
cryopump
pumping
stage
pump
refrigerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19792949092
Other languages
German (de)
English (en)
Inventor
Dipl.-Phys. Werner 5064 Rösrath Bächler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19792949092 priority Critical patent/DE2949092A1/de
Priority to NL8005101A priority patent/NL8005101A/nl
Priority to GB8037104A priority patent/GB2065782B/en
Priority to FR8025927A priority patent/FR2471498A1/fr
Publication of DE2949092A1 publication Critical patent/DE2949092A1/de
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE19792949092 1979-12-06 1979-12-06 Kryopumpe Ceased DE2949092A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19792949092 DE2949092A1 (de) 1979-12-06 1979-12-06 Kryopumpe
NL8005101A NL8005101A (nl) 1979-12-06 1980-09-10 Kryopomp.
GB8037104A GB2065782B (en) 1979-12-06 1980-11-19 Cryopump
FR8025927A FR2471498A1 (fr) 1979-12-06 1980-12-05 Cryopompe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792949092 DE2949092A1 (de) 1979-12-06 1979-12-06 Kryopumpe

Publications (1)

Publication Number Publication Date
DE2949092A1 true DE2949092A1 (de) 1981-06-11

Family

ID=6087753

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792949092 Ceased DE2949092A1 (de) 1979-12-06 1979-12-06 Kryopumpe

Country Status (4)

Country Link
DE (1) DE2949092A1 (enExample)
FR (1) FR2471498A1 (enExample)
GB (1) GB2065782B (enExample)
NL (1) NL8005101A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0119451A1 (en) * 1983-02-14 1984-09-26 Helix Technology Corporation Multiport cryopump
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
DE8804218U1 (de) * 1988-03-29 1988-05-11 Leybold AG, 6450 Hanau Einrichtung zur Evakuierung einer Vakuumkammer
DE4006755A1 (de) * 1990-03-03 1991-09-05 Leybold Ag Zweistufige kryopumpe
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
JPS6065287A (ja) * 1983-09-20 1985-04-15 Toshiba Corp クライオソープシヨンポンプ
US4910965A (en) * 1984-06-29 1990-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
FR2572794B1 (fr) * 1984-11-06 1987-06-12 Commissariat Energie Atomique Procede pour augmenter la capacite d'absorption d'une pompe de cryopompage et pompe de cryopompage associee
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
FR2599789B1 (fr) * 1986-06-04 1990-03-23 Air Liquide Procede de regeneration d'un etage de cryopompe ou de cryocondenseur et cryopompe pour sa mise en oeuvre
JP2503267B2 (ja) * 1988-03-07 1996-06-05 株式会社東芝 タ―ボ分子ポンプおよびその運転方法
US6022195A (en) 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
USRE36610E (en) * 1989-05-09 2000-03-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
GB2309750B (en) * 1993-02-26 1997-09-24 Helix Tech Corp Cryogenic vacuum pump with electronically controlled regeneration
US6902378B2 (en) 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
GB2340187B (en) * 1996-03-20 2000-06-21 Helix Tech Corp Purge and rough cryopump regeneration process, cryopump and controller
DE102004046908A1 (de) * 2004-09-28 2006-04-13 Leybold Vacuum Gmbh Vakuumvorrichtung
JP5632241B2 (ja) * 2010-09-13 2014-11-26 住友重機械工業株式会社 クライオポンプ及び極低温冷凍機
GB2638985A (en) * 2024-03-05 2025-09-10 Edwards Vacuum Llc Cryopump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2155994A1 (de) * 1970-11-13 1972-05-18 Air Liquide Verfahren und Vorrichtung zum Pumpen von Gas
DE2512243A1 (de) * 1975-03-20 1976-09-23 Bosch Gmbh Robert Kuehlfalle fuer vakuumanlagen
DE2830943A1 (de) * 1978-07-14 1980-01-24 Leybold Heraeus Gmbh & Co Kg Sorptionsvakuumpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2155994A1 (de) * 1970-11-13 1972-05-18 Air Liquide Verfahren und Vorrichtung zum Pumpen von Gas
DE2512243A1 (de) * 1975-03-20 1976-09-23 Bosch Gmbh Robert Kuehlfalle fuer vakuumanlagen
DE2830943A1 (de) * 1978-07-14 1980-01-24 Leybold Heraeus Gmbh & Co Kg Sorptionsvakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Wutz: Theorie und Praxis der Vakuum- technik, 1965, S. 315 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0119451A1 (en) * 1983-02-14 1984-09-26 Helix Technology Corporation Multiport cryopump
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
DE8804218U1 (de) * 1988-03-29 1988-05-11 Leybold AG, 6450 Hanau Einrichtung zur Evakuierung einer Vakuumkammer
DE4006755A1 (de) * 1990-03-03 1991-09-05 Leybold Ag Zweistufige kryopumpe
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe

Also Published As

Publication number Publication date
GB2065782A (en) 1981-07-01
GB2065782B (en) 1984-04-18
FR2471498B3 (enExample) 1982-10-08
FR2471498A1 (fr) 1981-06-19
NL8005101A (nl) 1981-07-01

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
8131 Rejection