GB2065782B - Cryopump - Google Patents

Cryopump

Info

Publication number
GB2065782B
GB2065782B GB8037104A GB8037104A GB2065782B GB 2065782 B GB2065782 B GB 2065782B GB 8037104 A GB8037104 A GB 8037104A GB 8037104 A GB8037104 A GB 8037104A GB 2065782 B GB2065782 B GB 2065782B
Authority
GB
United Kingdom
Prior art keywords
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8037104A
Other versions
GB2065782A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of GB2065782A publication Critical patent/GB2065782A/en
Application granted granted Critical
Publication of GB2065782B publication Critical patent/GB2065782B/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB8037104A 1979-12-06 1980-11-19 Cryopump Expired GB2065782B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792949092 DE2949092A1 (en) 1979-12-06 1979-12-06 Cryopump

Publications (2)

Publication Number Publication Date
GB2065782A GB2065782A (en) 1981-07-01
GB2065782B true GB2065782B (en) 1984-04-18

Family

ID=6087753

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8037104A Expired GB2065782B (en) 1979-12-06 1980-11-19 Cryopump

Country Status (4)

Country Link
DE (1) DE2949092A1 (en)
FR (1) FR2471498A1 (en)
GB (1) GB2065782B (en)
NL (1) NL8005101A (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4446702A (en) * 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump
JPS6065287A (en) * 1983-09-20 1985-04-15 Toshiba Corp Cryosorption pump
US4910965A (en) * 1984-06-29 1990-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
FR2572794B1 (en) * 1984-11-06 1987-06-12 Commissariat Energie Atomique METHOD FOR INCREASING THE ABSORPTION CAPACITY OF A CRYOPOMPAGE PUMP AND ASSOCIATED CRYOPOMPAGE PUMP
DE3512614A1 (en) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR COMMISSIONING AND / OR REGENERATING A CRYOPUM PUMP AND CYRUM PUMP SUITABLE FOR THIS METHOD
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
FR2599789B1 (en) * 1986-06-04 1990-03-23 Air Liquide PROCESS FOR REGENERATING A STAGE OF CRYOPUMP OR CRYCONDENSOR AND CRYOPUMP FOR ITS IMPLEMENTATION
JP2503267B2 (en) * 1988-03-07 1996-06-05 株式会社東芝 Turbo molecular pump and its operating method
DE8804218U1 (en) * 1988-03-29 1988-05-11 Leybold AG, 6450 Hanau Device for evacuating a vacuum chamber
US6022195A (en) * 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
USRE36610E (en) * 1989-05-09 2000-03-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
DE4006755A1 (en) * 1990-03-03 1991-09-05 Leybold Ag Two-stage cryopump
GB2309750B (en) * 1993-02-26 1997-09-24 Helix Tech Corp Cryogenic vacuum pump with electronically controlled regeneration
US6902378B2 (en) 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
DE4336035A1 (en) * 1993-10-22 1995-04-27 Leybold Ag Process for operating a cryopump and vacuum pump system with cryopump and backing pump
GB2325707B (en) * 1996-03-20 2000-06-21 Helix Tech Corp Purge and rough cryopump regeneration process, cryopump and controller
DE102004046908A1 (en) * 2004-09-28 2006-04-13 Leybold Vacuum Gmbh vacuum device
JP5632241B2 (en) * 2010-09-13 2014-11-26 住友重機械工業株式会社 Cryo pump and cryogenic refrigerator

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2114039A5 (en) * 1970-11-13 1972-06-30 Air Liquide
DE2512243A1 (en) * 1975-03-20 1976-09-23 Bosch Gmbh Robert Moisture absorber for vacuum systems - is made from metal tube forming part of electric circuit for defrosting
DE2830943C2 (en) * 1978-07-14 1986-06-12 Leybold-Heraeus GmbH, 5000 Köln Cryopump assembly

Also Published As

Publication number Publication date
FR2471498A1 (en) 1981-06-19
GB2065782A (en) 1981-07-01
NL8005101A (en) 1981-07-01
FR2471498B3 (en) 1982-10-08
DE2949092A1 (en) 1981-06-11

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee