NL8005101A - Kryopomp. - Google Patents

Kryopomp. Download PDF

Info

Publication number
NL8005101A
NL8005101A NL8005101A NL8005101A NL8005101A NL 8005101 A NL8005101 A NL 8005101A NL 8005101 A NL8005101 A NL 8005101A NL 8005101 A NL8005101 A NL 8005101A NL 8005101 A NL8005101 A NL 8005101A
Authority
NL
Netherlands
Prior art keywords
cooling
pump
stage
pump surfaces
cryopump
Prior art date
Application number
NL8005101A
Other languages
English (en)
Dutch (nl)
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of NL8005101A publication Critical patent/NL8005101A/nl

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
NL8005101A 1979-12-06 1980-09-10 Kryopomp. NL8005101A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19792949092 DE2949092A1 (de) 1979-12-06 1979-12-06 Kryopumpe
DE2949092 1979-12-06

Publications (1)

Publication Number Publication Date
NL8005101A true NL8005101A (nl) 1981-07-01

Family

ID=6087753

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8005101A NL8005101A (nl) 1979-12-06 1980-09-10 Kryopomp.

Country Status (4)

Country Link
DE (1) DE2949092A1 (enExample)
FR (1) FR2471498A1 (enExample)
GB (1) GB2065782B (enExample)
NL (1) NL8005101A (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4446702A (en) * 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump
JPS6065287A (ja) * 1983-09-20 1985-04-15 Toshiba Corp クライオソープシヨンポンプ
US4910965A (en) * 1984-06-29 1990-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
FR2572794B1 (fr) * 1984-11-06 1987-06-12 Commissariat Energie Atomique Procede pour augmenter la capacite d'absorption d'une pompe de cryopompage et pompe de cryopompage associee
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
FR2599789B1 (fr) * 1986-06-04 1990-03-23 Air Liquide Procede de regeneration d'un etage de cryopompe ou de cryocondenseur et cryopompe pour sa mise en oeuvre
JP2503267B2 (ja) * 1988-03-07 1996-06-05 株式会社東芝 タ―ボ分子ポンプおよびその運転方法
DE8804218U1 (de) * 1988-03-29 1988-05-11 Leybold AG, 6450 Hanau Einrichtung zur Evakuierung einer Vakuumkammer
US6022195A (en) 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
USRE36610E (en) * 1989-05-09 2000-03-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
DE4006755A1 (de) * 1990-03-03 1991-09-05 Leybold Ag Zweistufige kryopumpe
GB2309750B (en) * 1993-02-26 1997-09-24 Helix Tech Corp Cryogenic vacuum pump with electronically controlled regeneration
US6902378B2 (en) 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe
GB2340187B (en) * 1996-03-20 2000-06-21 Helix Tech Corp Purge and rough cryopump regeneration process, cryopump and controller
DE102004046908A1 (de) * 2004-09-28 2006-04-13 Leybold Vacuum Gmbh Vakuumvorrichtung
JP5632241B2 (ja) * 2010-09-13 2014-11-26 住友重機械工業株式会社 クライオポンプ及び極低温冷凍機
GB2638985A (en) * 2024-03-05 2025-09-10 Edwards Vacuum Llc Cryopump

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2114039A5 (enExample) * 1970-11-13 1972-06-30 Air Liquide
DE2512243A1 (de) * 1975-03-20 1976-09-23 Bosch Gmbh Robert Kuehlfalle fuer vakuumanlagen
DE2830943C2 (de) * 1978-07-14 1986-06-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpenanordnung

Also Published As

Publication number Publication date
GB2065782A (en) 1981-07-01
GB2065782B (en) 1984-04-18
FR2471498B3 (enExample) 1982-10-08
DE2949092A1 (de) 1981-06-11
FR2471498A1 (fr) 1981-06-19

Similar Documents

Publication Publication Date Title
NL8005101A (nl) Kryopomp.
US8534448B1 (en) Permanent magnet air heater
US10273949B2 (en) Cryopump and method of operating the cryopump
JP6357545B2 (ja) マルチエフェクトソーラー蒸留システムおよび関連する方法
RU94044494A (ru) Способ регенерации хладагента и устройство для его осуществления
FR2533270A1 (fr) Procede et dispositif pour la regeneration rapide de pompes cryogeniques autonomes
JP3305717B2 (ja) 極低温ウォーターポンプ
JPH11500521A (ja) 間欠的に動作する冷却ユニットを備えた冷凍装置
US5875649A (en) Absorption liquid spreading structure for interior of absorption chamber in air conditioner
JP2014515468A (ja) 標準的防爆形除湿システム用マイクロ波再活性化システム
RU2005135985A (ru) Холодильный аппарат с испарителем конденсата
EP2326892B1 (fr) Dispositif de climatisation par absorption perfectionne pour vehicule automobile
US4615768A (en) Vapor generating and recovery apparatus including continuous conveying means through a vapor zone
WO2008109937A1 (en) Apparatus and method for transferring heat
WO2008088182A1 (en) Irradiation facility of radiant heat
JP4182905B2 (ja) コールドトラップおよび真空排気装置
JPS5818071A (ja) 冷却サイクル用モータ駆動圧縮機・凝縮器組立体
CN222557052U (zh) 一种内部水汽去除效果更好的真空镀膜机
US2139740A (en) Production of high vacuum and high vacuum pumps
CN110352301A (zh) 低温泵
JP3645305B2 (ja) コールドトラップ
US1367266A (en) Refrigerating apparatus
RU99124524A (ru) Способ сушки
SU989134A1 (ru) Способ работы криосорбционного насоса
KR19980020172U (ko) 정수기 냉각 시스템의 압축기 구조

Legal Events

Date Code Title Description
A85 Still pending on 85-01-01
BV The patent application has lapsed