FR2471498A1 - Cryopompe - Google Patents
Cryopompe Download PDFInfo
- Publication number
- FR2471498A1 FR2471498A1 FR8025927A FR8025927A FR2471498A1 FR 2471498 A1 FR2471498 A1 FR 2471498A1 FR 8025927 A FR8025927 A FR 8025927A FR 8025927 A FR8025927 A FR 8025927A FR 2471498 A1 FR2471498 A1 FR 2471498A1
- Authority
- FR
- France
- Prior art keywords
- pumping
- cryopump
- refrigerator
- cooling
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 abstract description 26
- 238000010438 heat treatment Methods 0.000 abstract description 16
- 230000008929 regeneration Effects 0.000 abstract description 14
- 238000011069 regeneration method Methods 0.000 abstract description 14
- 230000002745 absorbent Effects 0.000 abstract 1
- 239000002250 absorbent Substances 0.000 abstract 1
- 238000001816 cooling Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 8
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 230000001172 regenerating effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19792949092 DE2949092A1 (de) | 1979-12-06 | 1979-12-06 | Kryopumpe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2471498A1 true FR2471498A1 (fr) | 1981-06-19 |
| FR2471498B3 FR2471498B3 (enExample) | 1982-10-08 |
Family
ID=6087753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8025927A Granted FR2471498A1 (fr) | 1979-12-06 | 1980-12-05 | Cryopompe |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE2949092A1 (enExample) |
| FR (1) | FR2471498A1 (enExample) |
| GB (1) | GB2065782B (enExample) |
| NL (1) | NL8005101A (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4438632A (en) * | 1982-07-06 | 1984-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
| US4446702A (en) * | 1983-02-14 | 1984-05-08 | Helix Technology Corporation | Multiport cryopump |
| JPS6065287A (ja) * | 1983-09-20 | 1985-04-15 | Toshiba Corp | クライオソープシヨンポンプ |
| US4910965A (en) * | 1984-06-29 | 1990-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
| FR2572794B1 (fr) * | 1984-11-06 | 1987-06-12 | Commissariat Energie Atomique | Procede pour augmenter la capacite d'absorption d'une pompe de cryopompage et pompe de cryopompage associee |
| DE3512614A1 (de) * | 1985-04-06 | 1986-10-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe |
| US4679401A (en) * | 1985-07-03 | 1987-07-14 | Helix Technology Corporation | Temperature control of cryogenic systems |
| FR2599789B1 (fr) * | 1986-06-04 | 1990-03-23 | Air Liquide | Procede de regeneration d'un etage de cryopompe ou de cryocondenseur et cryopompe pour sa mise en oeuvre |
| JP2503267B2 (ja) * | 1988-03-07 | 1996-06-05 | 株式会社東芝 | タ―ボ分子ポンプおよびその運転方法 |
| DE8804218U1 (de) * | 1988-03-29 | 1988-05-11 | Leybold AG, 6450 Hanau | Einrichtung zur Evakuierung einer Vakuumkammer |
| US6022195A (en) | 1988-09-13 | 2000-02-08 | Helix Technology Corporation | Electronically controlled vacuum pump with control module |
| US4918930A (en) * | 1988-09-13 | 1990-04-24 | Helix Technology Corporation | Electronically controlled cryopump |
| US6318093B2 (en) | 1988-09-13 | 2001-11-20 | Helix Technology Corporation | Electronically controlled cryopump |
| USRE36610E (en) * | 1989-05-09 | 2000-03-14 | Kabushiki Kaisha Toshiba | Evacuation apparatus and evacuation method |
| DE4006755A1 (de) * | 1990-03-03 | 1991-09-05 | Leybold Ag | Zweistufige kryopumpe |
| GB2309750B (en) * | 1993-02-26 | 1997-09-24 | Helix Tech Corp | Cryogenic vacuum pump with electronically controlled regeneration |
| US6902378B2 (en) | 1993-07-16 | 2005-06-07 | Helix Technology Corporation | Electronically controlled vacuum pump |
| DE4336035A1 (de) * | 1993-10-22 | 1995-04-27 | Leybold Ag | Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe |
| GB2340187B (en) * | 1996-03-20 | 2000-06-21 | Helix Tech Corp | Purge and rough cryopump regeneration process, cryopump and controller |
| DE102004046908A1 (de) * | 2004-09-28 | 2006-04-13 | Leybold Vacuum Gmbh | Vakuumvorrichtung |
| JP5632241B2 (ja) * | 2010-09-13 | 2014-11-26 | 住友重機械工業株式会社 | クライオポンプ及び極低温冷凍機 |
| GB2638985A (en) * | 2024-03-05 | 2025-09-10 | Edwards Vacuum Llc | Cryopump |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2114039A5 (enExample) * | 1970-11-13 | 1972-06-30 | Air Liquide | |
| DE2512243A1 (de) * | 1975-03-20 | 1976-09-23 | Bosch Gmbh Robert | Kuehlfalle fuer vakuumanlagen |
| DE2830943C2 (de) * | 1978-07-14 | 1986-06-12 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpenanordnung |
-
1979
- 1979-12-06 DE DE19792949092 patent/DE2949092A1/de not_active Ceased
-
1980
- 1980-09-10 NL NL8005101A patent/NL8005101A/nl not_active Application Discontinuation
- 1980-11-19 GB GB8037104A patent/GB2065782B/en not_active Expired
- 1980-12-05 FR FR8025927A patent/FR2471498A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB2065782A (en) | 1981-07-01 |
| GB2065782B (en) | 1984-04-18 |
| FR2471498B3 (enExample) | 1982-10-08 |
| DE2949092A1 (de) | 1981-06-11 |
| NL8005101A (nl) | 1981-07-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |