DE2858777C2 - - Google Patents

Info

Publication number
DE2858777C2
DE2858777C2 DE2858777A DE2858777A DE2858777C2 DE 2858777 C2 DE2858777 C2 DE 2858777C2 DE 2858777 A DE2858777 A DE 2858777A DE 2858777 A DE2858777 A DE 2858777A DE 2858777 C2 DE2858777 C2 DE 2858777C2
Authority
DE
Germany
Prior art keywords
solar cell
layer
amorphous silicon
cell according
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE2858777A
Other languages
German (de)
English (en)
Inventor
Joseph John Lawrenceville N.J. Us Hanak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Application granted granted Critical
Publication of DE2858777C2 publication Critical patent/DE2858777C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/47Schottky barrier electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/04Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/07Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the Schottky type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/075Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/548Amorphous silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/061Gettering-armorphous layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/153Solar cells-implantations-laser beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
DE2858777A 1978-04-24 1978-12-18 Expired - Fee Related DE2858777C2 (US07655688-20100202-C00086.png)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/899,242 US4167015A (en) 1978-04-24 1978-04-24 Cermet layer for amorphous silicon solar cells

Publications (1)

Publication Number Publication Date
DE2858777C2 true DE2858777C2 (US07655688-20100202-C00086.png) 1991-01-24

Family

ID=25410655

Family Applications (2)

Application Number Title Priority Date Filing Date
DE2858777A Expired - Fee Related DE2858777C2 (US07655688-20100202-C00086.png) 1978-04-24 1978-12-18
DE19782854653 Granted DE2854653A1 (de) 1978-04-24 1978-12-18 Solarzelle

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19782854653 Granted DE2854653A1 (de) 1978-04-24 1978-12-18 Solarzelle

Country Status (13)

Country Link
US (1) US4167015A (US07655688-20100202-C00086.png)
JP (1) JPS54141593A (US07655688-20100202-C00086.png)
AU (1) AU525145B2 (US07655688-20100202-C00086.png)
CA (1) CA1116280A (US07655688-20100202-C00086.png)
DE (2) DE2858777C2 (US07655688-20100202-C00086.png)
FR (1) FR2424632A1 (US07655688-20100202-C00086.png)
GB (1) GB2019647B (US07655688-20100202-C00086.png)
HK (1) HK77886A (US07655688-20100202-C00086.png)
IT (1) IT1192596B (US07655688-20100202-C00086.png)
MY (1) MY8700212A (US07655688-20100202-C00086.png)
NL (1) NL7812518A (US07655688-20100202-C00086.png)
SE (1) SE7812503L (US07655688-20100202-C00086.png)
SG (1) SG37084G (US07655688-20100202-C00086.png)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4272641A (en) * 1979-04-19 1981-06-09 Rca Corporation Tandem junction amorphous silicon solar cells
FR2454705B1 (fr) * 1979-04-19 1986-06-20 Rca Corp Cellule solaire au silicium amorphe
US4320249A (en) * 1979-08-13 1982-03-16 Shunpei Yamazaki Heterojunction type semiconductor photoelectric conversion device
FR2464564A1 (fr) * 1979-08-28 1981-03-06 Rca Corp Batterie solaire au silicium amorphe
JPS56103477A (en) * 1980-01-21 1981-08-18 Hitachi Ltd Photoelectric conversion element
JPS5795677A (en) * 1980-12-03 1982-06-14 Kanegafuchi Chem Ind Co Ltd Amorphous silicon type photoelectric tranducer
JPS56114384A (en) * 1980-02-13 1981-09-08 Sanyo Electric Co Ltd Solar battery
US4292092A (en) * 1980-06-02 1981-09-29 Rca Corporation Laser processing technique for fabricating series-connected and tandem junction series-connected solar cells into a solar battery
DE3023165A1 (de) * 1980-06-20 1982-01-07 Siemens AG, 1000 Berlin und 8000 München Solarzelle aus amorphem silizium
JPS5898985A (ja) * 1981-12-09 1983-06-13 Seiko Epson Corp 薄膜太陽電池
JPS58101469A (ja) * 1981-12-11 1983-06-16 Seiko Epson Corp 薄膜太陽電池
JPS58201379A (ja) * 1982-05-19 1983-11-24 Matsushita Electric Ind Co Ltd 光電変換素子
DE3219606A1 (de) * 1982-05-25 1983-12-01 Siemens AG, 1000 Berlin und 8000 München Schottky-leistungsdiode
FR2536913B1 (fr) * 1982-11-25 1986-04-04 Saint Gobain Rech Sa Perfectionnement aux cellules photovoltaiques a couche polycristalline a base de cds
JPS60224283A (ja) * 1984-04-20 1985-11-08 Sumitomo Special Metals Co Ltd 薄膜電池用金属基板材
JPS62169372A (ja) * 1987-01-09 1987-07-25 Matsushita Electric Ind Co Ltd 半導体素子の製造方法
US4927770A (en) * 1988-11-14 1990-05-22 Electric Power Research Inst. Corp. Of District Of Columbia Method of fabricating back surface point contact solar cells
US4933022A (en) * 1988-11-14 1990-06-12 Board Of Trustees Of The Leland Stanford Univ. & Electric Power Research Institute Solar cell having interdigitated contacts and internal bypass diodes
US4933021A (en) * 1988-11-14 1990-06-12 Electric Power Research Institute Monolithic series-connected solar cells employing shorted p-n junctions for electrical isolation
FR2646560B1 (fr) * 1989-04-27 1994-01-14 Solems Sa Procede pour ameliorer la reponse spectrale d'une structure photoconductrice, cellule solaire et structure photoreceptive ameliorees
US5246506A (en) * 1991-07-16 1993-09-21 Solarex Corporation Multijunction photovoltaic device and fabrication method
US5455430A (en) * 1991-08-01 1995-10-03 Sanyo Electric Co., Ltd. Photovoltaic device having a semiconductor grade silicon layer formed on a metallurgical grade substrate
US5230746A (en) * 1992-03-03 1993-07-27 Amoco Corporation Photovoltaic device having enhanced rear reflecting contact
US6121541A (en) * 1997-07-28 2000-09-19 Bp Solarex Monolithic multi-junction solar cells with amorphous silicon and CIS and their alloys
US6344608B2 (en) * 1998-06-30 2002-02-05 Canon Kabushiki Kaisha Photovoltaic element
US6077722A (en) * 1998-07-14 2000-06-20 Bp Solarex Producing thin film photovoltaic modules with high integrity interconnects and dual layer contacts
US6111189A (en) * 1998-07-28 2000-08-29 Bp Solarex Photovoltaic module framing system with integral electrical raceways
US8297883B2 (en) * 2008-04-07 2012-10-30 Viv Suppression, Inc. Underwater device for ROV installable tools
US7858427B2 (en) * 2009-03-03 2010-12-28 Applied Materials, Inc. Crystalline silicon solar cells on low purity substrate
US20110272010A1 (en) * 2010-05-10 2011-11-10 International Business Machines Corporation High work function metal interfacial films for improving fill factor in solar cells
US20130000689A1 (en) * 2011-07-01 2013-01-03 Miasolé Photovoltaic module support assembly with standoff clamps
US9099578B2 (en) 2012-06-04 2015-08-04 Nusola, Inc. Structure for creating ohmic contact in semiconductor devices and methods for manufacture
US8952246B2 (en) 2012-04-02 2015-02-10 Nusola, Inc. Single-piece photovoltaic structure
WO2014145294A2 (en) * 2013-03-15 2014-09-18 Nusola Inc. Manufacturing equipment for photovoltaic devices and methods
DE102013007644B4 (de) * 2013-05-06 2017-09-21 Hochschule Für Technik Und Wirtschaft Des Saarlandes Anordnung zur Messung einer Dehnung, eines Druckes oder einer Kraft mit einer Widerstandsschicht
US20180062011A1 (en) * 2015-01-22 2018-03-01 Solaero Technologies Corp. Space solar cell panel with blocking diodes
JP6673466B2 (ja) * 2016-03-22 2020-03-25 株式会社村田製作所 セラミック電子部品およびセラミック電子部品の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2632987A1 (de) * 1975-07-28 1977-02-10 Rca Corp Halbleiterbauelement
US4064521A (en) * 1975-07-28 1977-12-20 Rca Corporation Semiconductor device having a body of amorphous silicon
US4071426A (en) * 1975-01-23 1978-01-31 Rca Corporation Method of making high resistance cermet film

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3843420A (en) * 1972-10-24 1974-10-22 Rca Corp Sputtered granular ferromagnetic iron-nickel-silica films
US3919589A (en) * 1973-04-06 1975-11-11 Rca Corp Electroluminescent cell with a current-limiting layer of high resistivity
US4196438A (en) * 1976-09-29 1980-04-01 Rca Corporation Article and device having an amorphous silicon containing a halogen and method of fabrication
US4126150A (en) * 1977-03-28 1978-11-21 Rca Corporation Photovoltaic device having increased absorption efficiency
US4177506A (en) * 1978-05-22 1979-12-04 Easterling Jimmy W Illuminated bar for an advertising sign

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4071426A (en) * 1975-01-23 1978-01-31 Rca Corporation Method of making high resistance cermet film
DE2632987A1 (de) * 1975-07-28 1977-02-10 Rca Corp Halbleiterbauelement
US4064521A (en) * 1975-07-28 1977-12-20 Rca Corporation Semiconductor device having a body of amorphous silicon

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
NL-B.: Photovoltair Solar Energy Conference, Proceedings of the International Conference, held at Luxembourg, 27.-30.Sept.1977, Dordrecht, Holland, S.299-307 *
US-Z.: Appl. Phys. Solid States Science, Bd. 6, 1976, S. 407 ff *
US-Z.: IEEE Transactions on Electronic Devices,Bd. ED-24, 1977, S. 449 ff *
US-Z.: J. Appl. Phys., Bd. 45, 1974, S. 295 ff *

Also Published As

Publication number Publication date
GB2019647A (en) 1979-10-31
NL7812518A (nl) 1979-10-26
SE7812503L (sv) 1979-10-25
US4167015A (en) 1979-09-04
DE2854653C2 (US07655688-20100202-C00086.png) 1991-09-19
FR2424632A1 (fr) 1979-11-23
CA1116280A (en) 1982-01-12
DE2854653A1 (de) 1979-10-31
AU525145B2 (en) 1982-10-21
MY8700212A (en) 1987-12-31
JPS6228598B2 (US07655688-20100202-C00086.png) 1987-06-22
IT1192596B (it) 1988-04-20
HK77886A (en) 1986-10-24
SG37084G (en) 1985-03-08
FR2424632B1 (US07655688-20100202-C00086.png) 1984-05-11
AU4261278A (en) 1979-11-01
GB2019647B (en) 1982-05-12
IT7830853A0 (it) 1978-12-14
JPS54141593A (en) 1979-11-02

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