DE2856782A1 - Elektronenoptik-objektiv - Google Patents

Elektronenoptik-objektiv

Info

Publication number
DE2856782A1
DE2856782A1 DE19782856782 DE2856782A DE2856782A1 DE 2856782 A1 DE2856782 A1 DE 2856782A1 DE 19782856782 DE19782856782 DE 19782856782 DE 2856782 A DE2856782 A DE 2856782A DE 2856782 A1 DE2856782 A1 DE 2856782A1
Authority
DE
Germany
Prior art keywords
lens
electron optics
exit pupil
coils
dipl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19782856782
Other languages
German (de)
English (en)
Other versions
DE2856782C2 (US20050265960A1-20051201-C00007.png
Inventor
Emmanuel De Chambost
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of DE2856782A1 publication Critical patent/DE2856782A1/de
Application granted granted Critical
Publication of DE2856782C2 publication Critical patent/DE2856782C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Beam Exposure (AREA)
  • Lenses (AREA)
DE19782856782 1978-01-03 1978-12-29 Elektronenoptik-objektiv Granted DE2856782A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7800049A FR2413776A1 (fr) 1978-01-03 1978-01-03 Objectif d'optique electronique

Publications (2)

Publication Number Publication Date
DE2856782A1 true DE2856782A1 (de) 1979-07-12
DE2856782C2 DE2856782C2 (US20050265960A1-20051201-C00007.png) 1991-03-07

Family

ID=9203081

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19782856782 Granted DE2856782A1 (de) 1978-01-03 1978-12-29 Elektronenoptik-objektiv

Country Status (5)

Country Link
US (1) US4330709A (US20050265960A1-20051201-C00007.png)
JP (1) JPS54101276A (US20050265960A1-20051201-C00007.png)
DE (1) DE2856782A1 (US20050265960A1-20051201-C00007.png)
FR (1) FR2413776A1 (US20050265960A1-20051201-C00007.png)
GB (1) GB2012105B (US20050265960A1-20051201-C00007.png)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5738544A (en) * 1980-08-19 1982-03-03 Matsushita Electronics Corp Electromagnetic deflection system picture tube system equipment
JPS5788659A (en) * 1980-11-21 1982-06-02 Jeol Ltd Electron ray device
JPS57206173A (en) * 1981-06-15 1982-12-17 Nippon Telegr & Teleph Corp <Ntt> Focusing deflecting device for charged corpuscule beam
NL8301712A (nl) * 1983-05-13 1984-12-03 Philips Nv Kleurenbeeldbuis.
US4544846A (en) * 1983-06-28 1985-10-01 International Business Machines Corporation Variable axis immersion lens electron beam projection system
NL8801208A (nl) * 1988-05-09 1989-12-01 Philips Nv Geladen deeltjes bundel apparaat.
EP0821392B1 (en) * 1996-07-25 2004-09-29 Advantest Corporation Deflection system
FR2837931B1 (fr) * 2002-03-29 2004-12-10 Cameca Dispositif de mesure de l'emission de rayons x produite par un objet soumis a un faisceau d'electrons
US8642959B2 (en) 2007-10-29 2014-02-04 Micron Technology, Inc. Method and system of performing three-dimensional imaging using an electron microscope
US10008360B2 (en) * 2015-01-26 2018-06-26 Hermes Microvision Inc. Objective lens system for fast scanning large FOV

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3736423A (en) * 1970-05-13 1973-05-29 Hitachi Ltd Electron lens of magnetic field type for an electron microscope and the like
US3753034A (en) * 1969-10-10 1973-08-14 Texas Instruments Inc Electron beam apparatus
US3801792A (en) * 1973-05-23 1974-04-02 Bell Telephone Labor Inc Electron beam apparatus
US3978338A (en) * 1974-04-16 1976-08-31 Nihon Denshi Kabushiki Kaisha Illumination system in a scanning electron microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561744B2 (US20050265960A1-20051201-C00007.png) * 1973-06-26 1981-01-14
JPS5169327A (en) * 1974-12-03 1976-06-15 Canon Kk Ekishoku dosochi
US4162403A (en) * 1978-07-26 1979-07-24 Advanced Metals Research Corp. Method and means for compensating for charge carrier beam astigmatism

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3753034A (en) * 1969-10-10 1973-08-14 Texas Instruments Inc Electron beam apparatus
US3736423A (en) * 1970-05-13 1973-05-29 Hitachi Ltd Electron lens of magnetic field type for an electron microscope and the like
US3801792A (en) * 1973-05-23 1974-04-02 Bell Telephone Labor Inc Electron beam apparatus
US3978338A (en) * 1974-04-16 1976-08-31 Nihon Denshi Kabushiki Kaisha Illumination system in a scanning electron microscope

Also Published As

Publication number Publication date
DE2856782C2 (US20050265960A1-20051201-C00007.png) 1991-03-07
FR2413776B1 (US20050265960A1-20051201-C00007.png) 1980-09-19
GB2012105A (en) 1979-07-18
FR2413776A1 (fr) 1979-07-27
GB2012105B (en) 1982-09-15
US4330709A (en) 1982-05-18
JPS54101276A (en) 1979-08-09
JPS6216502B2 (US20050265960A1-20051201-C00007.png) 1987-04-13

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8128 New person/name/address of the agent

Representative=s name: PRINZ, E., DIPL.-ING. LEISER, G., DIPL.-ING., PAT.

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee