FR2413776A1 - Objectif d'optique electronique - Google Patents

Objectif d'optique electronique

Info

Publication number
FR2413776A1
FR2413776A1 FR7800049A FR7800049A FR2413776A1 FR 2413776 A1 FR2413776 A1 FR 2413776A1 FR 7800049 A FR7800049 A FR 7800049A FR 7800049 A FR7800049 A FR 7800049A FR 2413776 A1 FR2413776 A1 FR 2413776A1
Authority
FR
France
Prior art keywords
deviators
zone
magnetic field
optics lens
objective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7800049A
Other languages
English (en)
Other versions
FR2413776B1 (fr
Inventor
Emmanuel De Chambost
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7800049A priority Critical patent/FR2413776A1/fr
Priority to DE19782856782 priority patent/DE2856782A1/de
Priority to JP16436778A priority patent/JPS54101276A/ja
Priority to GB7968A priority patent/GB2012105B/en
Publication of FR2413776A1 publication Critical patent/FR2413776A1/fr
Priority to US06/154,911 priority patent/US4330709A/en
Application granted granted Critical
Publication of FR2413776B1 publication Critical patent/FR2413776B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Abstract

L'INVENTION A POUR OBJET UN OBJECTIF D'OPTIQUE ELECTRONIQUE. CET OBJECTIF COMPORTE UNE LENTILLE ELECTROMAGNETIQUE DE REVOLUTION AUTOUR DE SON AXE OPTIQUE ET FORMEE DE DEUX PIECES POLAIRES, L'UNE EN FER DOUX, L'AUTRE EN FERRITE, SEPAREE L'UNE DE L'AUTRE PAR UN ENTREFER. ELLE COMPORTE EGALEMENT DEUX DEVIATEURS, L'UN PLACE DANS UNE ZONE DE FAIBLE CHAMP MAGNETIQUE LONGITUDINAL, L'AUTRE DANS UNE ZONE DE FORT CHAMP MAGNETIQUE LONGITUDINAL, CES DEUX DEVIATEURS ETANT IDENTIQUES ET DECALES DE 215 A 225 L'UN PAR RAPPORT A L'AUTRE. L'INVENTION S'APPLIQUE AUX DISPOSITIFS DE L'ELECTROLITHOGRAPHIE.
FR7800049A 1978-01-03 1978-01-03 Objectif d'optique electronique Granted FR2413776A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR7800049A FR2413776A1 (fr) 1978-01-03 1978-01-03 Objectif d'optique electronique
DE19782856782 DE2856782A1 (de) 1978-01-03 1978-12-29 Elektronenoptik-objektiv
JP16436778A JPS54101276A (en) 1978-01-03 1978-12-31 Electrooptical objective lens and microlithoraphic system
GB7968A GB2012105B (en) 1978-01-03 1979-01-02 Electronic optical objective
US06/154,911 US4330709A (en) 1978-01-03 1980-05-30 Electronic optical objective

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7800049A FR2413776A1 (fr) 1978-01-03 1978-01-03 Objectif d'optique electronique

Publications (2)

Publication Number Publication Date
FR2413776A1 true FR2413776A1 (fr) 1979-07-27
FR2413776B1 FR2413776B1 (fr) 1980-09-19

Family

ID=9203081

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7800049A Granted FR2413776A1 (fr) 1978-01-03 1978-01-03 Objectif d'optique electronique

Country Status (5)

Country Link
US (1) US4330709A (fr)
JP (1) JPS54101276A (fr)
DE (1) DE2856782A1 (fr)
FR (1) FR2413776A1 (fr)
GB (1) GB2012105B (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2507816A1 (fr) * 1981-06-15 1982-12-17 Nippon Telegraph & Telephone Systeme deflecteur de focalisation pour faisceau de particules chargees
EP0129681A2 (fr) * 1983-06-28 1985-01-02 International Business Machines Corporation Système de projection par faisceau électronique avec lentille à immersion d'axe variable
EP0821392A1 (fr) * 1996-07-25 1998-01-28 ACT Advanced Circuit Testing Gesellschaft für Testsystementwicklung mbH Système déflecteur

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5738544A (en) * 1980-08-19 1982-03-03 Matsushita Electronics Corp Electromagnetic deflection system picture tube system equipment
JPS5788659A (en) * 1980-11-21 1982-06-02 Jeol Ltd Electron ray device
NL8301712A (nl) * 1983-05-13 1984-12-03 Philips Nv Kleurenbeeldbuis.
NL8801208A (nl) * 1988-05-09 1989-12-01 Philips Nv Geladen deeltjes bundel apparaat.
FR2837931B1 (fr) * 2002-03-29 2004-12-10 Cameca Dispositif de mesure de l'emission de rayons x produite par un objet soumis a un faisceau d'electrons
US8642959B2 (en) 2007-10-29 2014-02-04 Micron Technology, Inc. Method and system of performing three-dimensional imaging using an electron microscope
US10008360B2 (en) 2015-01-26 2018-06-26 Hermes Microvision Inc. Objective lens system for fast scanning large FOV

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1325540A (en) * 1969-10-10 1973-08-01 Texas Instruments Ltd Electron beam apparatus
JPS4929089B1 (fr) * 1970-05-13 1974-08-01
US3801792A (en) * 1973-05-23 1974-04-02 Bell Telephone Labor Inc Electron beam apparatus
JPS561744B2 (fr) * 1973-06-26 1981-01-14
JPS5944743B2 (ja) * 1974-04-16 1984-10-31 日本電子株式会社 走査電子顕微鏡等用照射電子レンズ系
JPS5169327A (en) * 1974-12-03 1976-06-15 Canon Kk Ekishoku dosochi
US4162403A (en) * 1978-07-26 1979-07-24 Advanced Metals Research Corp. Method and means for compensating for charge carrier beam astigmatism

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2507816A1 (fr) * 1981-06-15 1982-12-17 Nippon Telegraph & Telephone Systeme deflecteur de focalisation pour faisceau de particules chargees
EP0129681A2 (fr) * 1983-06-28 1985-01-02 International Business Machines Corporation Système de projection par faisceau électronique avec lentille à immersion d'axe variable
EP0129681A3 (en) * 1983-06-28 1986-04-16 International Business Machines Corporation Variable axis immerson lens electron beam projection system
EP0821392A1 (fr) * 1996-07-25 1998-01-28 ACT Advanced Circuit Testing Gesellschaft für Testsystementwicklung mbH Système déflecteur

Also Published As

Publication number Publication date
FR2413776B1 (fr) 1980-09-19
JPS6216502B2 (fr) 1987-04-13
GB2012105A (en) 1979-07-18
US4330709A (en) 1982-05-18
DE2856782C2 (fr) 1991-03-07
JPS54101276A (en) 1979-08-09
DE2856782A1 (de) 1979-07-12
GB2012105B (en) 1982-09-15

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Legal Events

Date Code Title Description
ST Notification of lapse