DE2853415C2 - - Google Patents
Info
- Publication number
- DE2853415C2 DE2853415C2 DE19782853415 DE2853415A DE2853415C2 DE 2853415 C2 DE2853415 C2 DE 2853415C2 DE 19782853415 DE19782853415 DE 19782853415 DE 2853415 A DE2853415 A DE 2853415A DE 2853415 C2 DE2853415 C2 DE 2853415C2
- Authority
- DE
- Germany
- Prior art keywords
- support arms
- rod
- support
- rotary shaft
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 239000013078 crystal Substances 0.000 claims description 12
- 125000006850 spacer group Chemical group 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 238000004857 zone melting Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 241001676573 Minium Species 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- OOKDYUQHMDBHMB-UHFFFAOYSA-N 3,6-dichloro-2-methoxybenzoic acid;2-(2,4-dichlorophenoxy)acetic acid;n-methylmethanamine Chemical compound CNC.CNC.COC1=C(Cl)C=CC(Cl)=C1C(O)=O.OC(=O)COC1=CC=C(Cl)C=C1Cl OOKDYUQHMDBHMB-UHFFFAOYSA-N 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/285—Crystal holders, e.g. chucks
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19782853415 DE2853415A1 (de) | 1978-12-11 | 1978-12-11 | Vorrichtung zum tiegelfreien zonenschmelzen eines an seinem unteren ende mit einem angeschmolzenen keimkristall versehenen halbleiterkristallstabes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19782853415 DE2853415A1 (de) | 1978-12-11 | 1978-12-11 | Vorrichtung zum tiegelfreien zonenschmelzen eines an seinem unteren ende mit einem angeschmolzenen keimkristall versehenen halbleiterkristallstabes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2853415A1 DE2853415A1 (de) | 1980-06-19 |
| DE2853415C2 true DE2853415C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-25 |
Family
ID=6056839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19782853415 Granted DE2853415A1 (de) | 1978-12-11 | 1978-12-11 | Vorrichtung zum tiegelfreien zonenschmelzen eines an seinem unteren ende mit einem angeschmolzenen keimkristall versehenen halbleiterkristallstabes |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE2853415A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3322629A1 (de) * | 1983-06-23 | 1985-01-03 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum tiegelfreien zonenschmelzen |
| JPS63270383A (ja) * | 1987-04-27 | 1988-11-08 | Shin Etsu Handotai Co Ltd | 半導体結晶棒の支持装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2548050C3 (de) * | 1975-10-27 | 1980-09-04 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zur Stabhalterung beim tiegelfreien Zonenschmelzen |
-
1978
- 1978-12-11 DE DE19782853415 patent/DE2853415A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2853415A1 (de) | 1980-06-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3308489C2 (de) | Zentriervorrichtung für aufrecht stehende Gefäße, insbesondere in Etikettiermaschinen | |
| DE1299097B (de) | Vorrichtung zum Schneiden einer Glasplatte | |
| DE2853415C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE2718280C2 (de) | Kapsel-Sortiervorrichtung | |
| EP0524176B1 (de) | Vertikalspannvorrichtung für förderbandabstreifer und dergleichen | |
| CH663591A5 (de) | Anordnung zum abtrennen von gruppen verschiedener laenge von gegenstaenden. | |
| EP1461255B1 (de) | Aufnahmevorrichtung für einen behälter und ein verfahren zum fixieren eines behälters | |
| DE2853414C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE6911841U (de) | Probenehmervorrichtung fuer koerniges material. | |
| DE929945C (de) | Vorrichtung zur automatischen Herstellung von geformten Kaesemassestuecken | |
| DE19741632A1 (de) | Mahlwerk zum Zerkleinern von körnigem Mahlgut | |
| DE816046C (de) | Maschine zum zentrischen Anbohren von Werkstuecken | |
| DE2626459A1 (de) | Verschliessvorrichtung fuer flaschen | |
| CH427695A (de) | Stufenlos verstellbarer Bock, insbesondere Rollbock | |
| DE3219046C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE2023018C3 (de) | Vorrichtung zum Orientieren von Halbfabrikaten asymmetrischer Form in einer Rutsche | |
| CH635553A5 (de) | Planet-kannenstock. | |
| DE1023191B (de) | Verfahren und Vorrichtung zum Herstellen ueberzogener Tabletten | |
| DE3224521A1 (de) | Umlaufende gefaessbehandlungsmaschine, insbesondere gefaessfuellmaschine | |
| DE4318361C2 (de) | Stützvorrichtung | |
| DE572845C (de) | Stuetzlager | |
| DE933304C (de) | Einstellvorrichtung fuer Lager | |
| DE557322C (de) | Gravierblock | |
| DE596415C (de) | Maschine zum Schaelen von Reis | |
| DE967474C (de) | Fliehkraft-Staubabscheider |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8120 | Willingness to grant licenses paragraph 23 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |