DE2851330A1 - Magnetoresistives halbleiterelement - Google Patents
Magnetoresistives halbleiterelementInfo
- Publication number
- DE2851330A1 DE2851330A1 DE19782851330 DE2851330A DE2851330A1 DE 2851330 A1 DE2851330 A1 DE 2851330A1 DE 19782851330 DE19782851330 DE 19782851330 DE 2851330 A DE2851330 A DE 2851330A DE 2851330 A1 DE2851330 A1 DE 2851330A1
- Authority
- DE
- Germany
- Prior art keywords
- electrode
- electrodes
- short
- semiconductor element
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 59
- 230000005291 magnetic effect Effects 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 28
- 230000035945 sensitivity Effects 0.000 claims description 10
- 239000003302 ferromagnetic material Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 11
- 239000013078 crystal Substances 0.000 description 10
- 239000010410 layer Substances 0.000 description 10
- 239000010408 film Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000005496 eutectics Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 238000010276 construction Methods 0.000 description 5
- 239000003822 epoxy resin Substances 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- KUBDPQJOLOUJRM-UHFFFAOYSA-N 2-(chloromethyl)oxirane;4-[2-(4-hydroxyphenyl)propan-2-yl]phenol Chemical compound ClCC1CO1.C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 KUBDPQJOLOUJRM-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- -1 Gap Inorganic materials 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 229910021478 group 5 element Inorganic materials 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910017115 AlSb Inorganic materials 0.000 description 1
- 229910000976 Electrical steel Inorganic materials 0.000 description 1
- 229910005542 GaSb Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- USYLIGCRWXYYPZ-UHFFFAOYSA-N [Cl].[Fe] Chemical compound [Cl].[Fe] USYLIGCRWXYYPZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14224077A JPS5475284A (en) | 1977-11-29 | 1977-11-29 | Threeeterminal magnetic reluctance effect element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2851330A1 true DE2851330A1 (de) | 1979-06-07 |
| DE2851330C2 DE2851330C2 (en:Method) | 1983-07-28 |
Family
ID=15310684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19782851330 Granted DE2851330A1 (de) | 1977-11-29 | 1978-11-28 | Magnetoresistives halbleiterelement |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4251795A (en:Method) |
| JP (1) | JPS5475284A (en:Method) |
| DE (1) | DE2851330A1 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3216147A1 (de) * | 1982-04-30 | 1983-11-03 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Magnetfeldsensor |
Families Citing this family (63)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4584552A (en) * | 1982-03-26 | 1986-04-22 | Pioneer Electronic Corporation | Hall element with improved composite substrate |
| DE3526166C2 (de) * | 1984-07-23 | 1996-05-02 | Asahi Chemical Ind | Bürstenloser Elektromotor und Verfahren zum Herstellen einer Spuleneinheit für diesen |
| JPS6145922A (ja) * | 1984-08-10 | 1986-03-06 | Hitachi Ltd | 位置検出センサ |
| US4926154A (en) * | 1988-12-23 | 1990-05-15 | General Motors Corporation | Indium arsenide magnetoresistor |
| WO1991014288A1 (en) * | 1990-03-07 | 1991-09-19 | Santa Barbara Research Center | Magnetoresistor structure and operating method |
| US5038130A (en) * | 1990-11-06 | 1991-08-06 | Santa Barbara Research Center | System for sensing changes in a magnetic field |
| US5184106A (en) * | 1991-01-28 | 1993-02-02 | General Motors Corporation | Magnetic field sensor with improved electron mobility |
| US5153557A (en) * | 1991-01-28 | 1992-10-06 | General Motors Corporation | Magnetic field sensor contacts |
| DE9215228U1 (de) * | 1992-11-09 | 1993-04-01 | Woelke Magnetbandtechnik GmbH & Co KG, 8069 Schweitenkirchen | Magnetfeldempfindlicher Sensor |
| US5883564A (en) * | 1994-04-18 | 1999-03-16 | General Motors Corporation | Magnetic field sensor having high mobility thin indium antimonide active layer on thin aluminum indium antimonide buffer layer |
| US6222361B1 (en) * | 1997-12-04 | 2001-04-24 | Sony Precision Technology Inc. | Position detecting device using varying width magneto-resistive effect sensor |
| EP0971423A1 (en) * | 1998-07-10 | 2000-01-12 | Interuniversitair Micro-Elektronica Centrum Vzw | Spin-valve structure and method for making same |
| JP2001134911A (ja) * | 1999-11-01 | 2001-05-18 | Tdk Corp | 薄膜磁気ヘッド、ヘッドサスペンションアセンブリ、磁気ディスク装置及びそれらの製造方法 |
| KR100697123B1 (ko) * | 2003-07-18 | 2007-03-20 | 야마하 가부시키가이샤 | 자기 센서 및 그 제조 방법 |
| DE602006009624D1 (de) * | 2005-01-19 | 2009-11-19 | Murata Manufacturing Co | Mehrstufiger switch |
| AU2006239221C1 (en) | 2005-04-28 | 2012-08-16 | Otsuka Pharmaceutical Co., Ltd. | Pharma-informatics system |
| US8836513B2 (en) | 2006-04-28 | 2014-09-16 | Proteus Digital Health, Inc. | Communication system incorporated in an ingestible product |
| US8912908B2 (en) | 2005-04-28 | 2014-12-16 | Proteus Digital Health, Inc. | Communication system with remote activation |
| US9198608B2 (en) | 2005-04-28 | 2015-12-01 | Proteus Digital Health, Inc. | Communication system incorporated in a container |
| US8802183B2 (en) | 2005-04-28 | 2014-08-12 | Proteus Digital Health, Inc. | Communication system with enhanced partial power source and method of manufacturing same |
| US8547248B2 (en) * | 2005-09-01 | 2013-10-01 | Proteus Digital Health, Inc. | Implantable zero-wire communications system |
| CN101496042A (zh) | 2006-05-02 | 2009-07-29 | 普罗秋斯生物医学公司 | 患者定制的治疗方案 |
| SG175681A1 (en) * | 2006-10-25 | 2011-11-28 | Proteus Biomedical Inc | Controlled activation ingestible identifier |
| US8718193B2 (en) | 2006-11-20 | 2014-05-06 | Proteus Digital Health, Inc. | Active signal processing personal health signal receivers |
| ES2930588T3 (es) * | 2007-02-01 | 2022-12-19 | Otsuka Pharma Co Ltd | Sistemas de marcador de eventos ingeribles |
| AU2008216170B2 (en) | 2007-02-14 | 2012-07-26 | Otsuka Pharmaceutical Co., Ltd. | In-body power source having high surface area electrode |
| EP2124725A1 (en) * | 2007-03-09 | 2009-12-02 | Proteus Biomedical, Inc. | In-body device having a multi-directional transmitter |
| EP2063771A1 (en) | 2007-03-09 | 2009-06-03 | Proteus Biomedical, Inc. | In-body device having a deployable antenna |
| US8540632B2 (en) * | 2007-05-24 | 2013-09-24 | Proteus Digital Health, Inc. | Low profile antenna for in body device |
| EP2192946B1 (en) | 2007-09-25 | 2022-09-14 | Otsuka Pharmaceutical Co., Ltd. | In-body device with virtual dipole signal amplification |
| EP2215726B1 (en) * | 2007-11-27 | 2018-01-10 | Proteus Digital Health, Inc. | Transbody communication systems employing communication channels |
| DK2268261T3 (en) | 2008-03-05 | 2017-08-28 | Proteus Digital Health Inc | Edible event markers with multi-mode communications and systems as well as methods for using them |
| EP2313002B1 (en) | 2008-07-08 | 2018-08-29 | Proteus Digital Health, Inc. | Ingestible event marker data framework |
| MY154217A (en) * | 2008-08-13 | 2015-05-15 | Proteus Digital Health Inc | Ingestible circuitry |
| AU2009305770A1 (en) * | 2008-10-14 | 2010-04-22 | Proteus Digital Health, Inc. | Method and system for incorporating physiologic data in a gaming environment |
| KR101126153B1 (ko) | 2008-12-11 | 2012-03-22 | 프로테우스 바이오메디컬, 인코포레이티드 | 휴대용 일렉트로비세로그래피 시스템을 사용한 위장 기능의 평가 및 그 사용 방법 |
| SG172847A1 (en) | 2009-01-06 | 2011-08-29 | Proteus Biomedical Inc | Pharmaceutical dosages delivery system |
| SG196787A1 (en) | 2009-01-06 | 2014-02-13 | Proteus Digital Health Inc | Ingestion-related biofeedback and personalized medical therapy method and system |
| US8540664B2 (en) | 2009-03-25 | 2013-09-24 | Proteus Digital Health, Inc. | Probablistic pharmacokinetic and pharmacodynamic modeling |
| EP3906845A1 (en) | 2009-04-28 | 2021-11-10 | Otsuka Pharmaceutical Co., Ltd. | Highly reliable ingestible event markers |
| EP2432458A4 (en) | 2009-05-12 | 2014-02-12 | Proteus Digital Health Inc | ACCEPTABLE EVENT MARKER WITH SUGAR COMPONENT |
| US8558563B2 (en) * | 2009-08-21 | 2013-10-15 | Proteus Digital Health, Inc. | Apparatus and method for measuring biochemical parameters |
| TWI517050B (zh) | 2009-11-04 | 2016-01-11 | 普羅托斯數位健康公司 | 供應鏈管理之系統 |
| UA109424C2 (uk) | 2009-12-02 | 2015-08-25 | Фармацевтичний продукт, фармацевтична таблетка з електронним маркером і спосіб виготовлення фармацевтичної таблетки | |
| WO2011127252A2 (en) | 2010-04-07 | 2011-10-13 | Proteus Biomedical, Inc. | Miniature ingestible device |
| TWI557672B (zh) | 2010-05-19 | 2016-11-11 | 波提亞斯數位康健公司 | 用於從製造商跟蹤藥物直到患者之電腦系統及電腦實施之方法、用於確認將藥物給予患者的設備及方法、患者介面裝置 |
| JP2014504902A (ja) | 2010-11-22 | 2014-02-27 | プロテウス デジタル ヘルス， インコーポレイテッド | 医薬品を有する摂取可能なデバイス |
| WO2015112603A1 (en) | 2014-01-21 | 2015-07-30 | Proteus Digital Health, Inc. | Masticable ingestible product and communication system therefor |
| US9756874B2 (en) | 2011-07-11 | 2017-09-12 | Proteus Digital Health, Inc. | Masticable ingestible product and communication system therefor |
| AU2012284125A1 (en) | 2011-07-21 | 2014-02-06 | Proteus Digital Health, Inc. | Mobile communication device, system, and method |
| US9235683B2 (en) | 2011-11-09 | 2016-01-12 | Proteus Digital Health, Inc. | Apparatus, system, and method for managing adherence to a regimen |
| US9817087B2 (en) * | 2012-03-14 | 2017-11-14 | Analog Devices, Inc. | Sensor with magnetroesitive and/or thin film element abutting shorting bars and a method of manufacture thereof |
| CN104487347B (zh) | 2012-07-23 | 2017-09-01 | 普罗秋斯数字健康公司 | 用于制造包括电子器件的片剂的方法和系统 |
| ES2683709T3 (es) | 2012-10-18 | 2018-09-27 | Proteus Digital Health, Inc. | Aparato, sistema, y procedimiento para optimizar de manera adaptativa la disipación de energía y la energía de difusión en una fuente de energía para un dispositivo de comunicación |
| US11149123B2 (en) | 2013-01-29 | 2021-10-19 | Otsuka Pharmaceutical Co., Ltd. | Highly-swellable polymeric films and compositions comprising the same |
| JP5941240B2 (ja) | 2013-03-15 | 2016-06-29 | プロテウス デジタル ヘルス， インコーポレイテッド | 金属検出器装置、システム、および方法 |
| JP6511439B2 (ja) | 2013-06-04 | 2019-05-15 | プロテウス デジタル ヘルス， インコーポレイテッド | データ収集および転帰の査定のためのシステム、装置、および方法 |
| US9796576B2 (en) | 2013-08-30 | 2017-10-24 | Proteus Digital Health, Inc. | Container with electronically controlled interlock |
| US10084880B2 (en) | 2013-11-04 | 2018-09-25 | Proteus Digital Health, Inc. | Social media networking based on physiologic information |
| TWI619280B (zh) * | 2014-04-01 | 2018-03-21 | 友達光電股份有限公司 | 感測元件 |
| US11051543B2 (en) | 2015-07-21 | 2021-07-06 | Otsuka Pharmaceutical Co. Ltd. | Alginate on adhesive bilayer laminate film |
| MX2019000888A (es) | 2016-07-22 | 2019-06-03 | Proteus Digital Health Inc | Percepcion y deteccion electromagnetica de marcadores de evento ingeribles. |
| AU2017348094B2 (en) | 2016-10-26 | 2022-10-13 | Otsuka Pharmaceutical Co., Ltd. | Methods for manufacturing capsules with ingestible event markers |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1050868B (en:Method) * | ||||
| DE2534414A1 (de) * | 1975-08-01 | 1977-02-10 | Precision Electronic Component | Magneto-widerstand und verfahren zu dessen herstellung |
| JPH05267583A (ja) * | 1992-03-18 | 1993-10-15 | Nec Corp | 半導体集積回路装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3691502A (en) * | 1968-04-24 | 1972-09-12 | Kogyo Gijutsuin | Semiconductor type potentiometer device |
| US3852103A (en) * | 1968-07-26 | 1974-12-03 | D Collins | Raster pattern magnetoresistors |
| JPS4934675B1 (en:Method) * | 1970-01-09 | 1974-09-17 | ||
| US3731007A (en) * | 1971-04-19 | 1973-05-01 | Denki Onkyo Co Ltd | Magnetic head having a magneto-resistive bridge circuit |
| US3921217A (en) * | 1971-12-27 | 1975-11-18 | Ibm | Three-legged magnetic recording head using a magnetorestive element |
| NL168981C (nl) * | 1975-04-15 | 1982-05-17 | Philips Nv | Magnetoweerstand leeskop. |
| JPS5267583A (en) * | 1975-12-03 | 1977-06-04 | Fujitsu Ltd | Magnetic reluctance device |
-
1977
- 1977-11-29 JP JP14224077A patent/JPS5475284A/ja active Pending
-
1978
- 1978-11-28 DE DE19782851330 patent/DE2851330A1/de active Granted
- 1978-11-29 US US05/964,554 patent/US4251795A/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1050868B (en:Method) * | ||||
| DE2534414A1 (de) * | 1975-08-01 | 1977-02-10 | Precision Electronic Component | Magneto-widerstand und verfahren zu dessen herstellung |
| JPH05267583A (ja) * | 1992-03-18 | 1993-10-15 | Nec Corp | 半導体集積回路装置 |
Non-Patent Citations (1)
| Title |
|---|
| DE-B.: Herbert Weiß "Physik und Anwendung salvanomagnitischer Bauelemente", Sammlung Vieweg 1969, S. 81-83 u. 245-250 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3216147A1 (de) * | 1982-04-30 | 1983-11-03 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Magnetfeldsensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5475284A (en) | 1979-06-15 |
| US4251795A (en) | 1981-02-17 |
| DE2851330C2 (en:Method) | 1983-07-28 |
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