DE2637206A1 - Eine duennschicht insbesondere aus organischem material aufweisende anordnungen und verfahren zur herstellung derselben - Google Patents
Eine duennschicht insbesondere aus organischem material aufweisende anordnungen und verfahren zur herstellung derselbenInfo
- Publication number
- DE2637206A1 DE2637206A1 DE19762637206 DE2637206A DE2637206A1 DE 2637206 A1 DE2637206 A1 DE 2637206A1 DE 19762637206 DE19762637206 DE 19762637206 DE 2637206 A DE2637206 A DE 2637206A DE 2637206 A1 DE2637206 A1 DE 2637206A1
- Authority
- DE
- Germany
- Prior art keywords
- film
- layer
- arrangements
- organic material
- component according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
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- 238000000034 method Methods 0.000 claims description 24
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- 239000004065 semiconductor Substances 0.000 claims description 23
- 239000010409 thin film Substances 0.000 claims description 20
- 239000012212 insulator Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 17
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- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 2
- XBDYBAVJXHJMNQ-UHFFFAOYSA-N Tetrahydroanthracene Natural products C1=CC=C2C=C(CCCC3)C3=CC2=C1 XBDYBAVJXHJMNQ-UHFFFAOYSA-N 0.000 description 2
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- 229910052794 bromium Inorganic materials 0.000 description 2
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- HVYWMOMLDIMFJA-DPAQBDIFSA-N cholesterol Chemical compound C1C=C2C[C@@H](O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2 HVYWMOMLDIMFJA-DPAQBDIFSA-N 0.000 description 2
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- 125000000623 heterocyclic group Chemical group 0.000 description 2
- 239000002784 hot electron Substances 0.000 description 2
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- 150000004668 long chain fatty acids Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 2
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- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WNYGJFSQQMVJQI-UHFFFAOYSA-N 2-(10-butylanthracen-9-yl)propanoic acid Chemical compound C(CCC)C=1C2=CC=CC=C2C(=C2C=CC=CC=12)C(C(=O)O)C WNYGJFSQQMVJQI-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-N Propionic acid Substances CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- DGEZNRSVGBDHLK-UHFFFAOYSA-N [1,10]phenanthroline Chemical compound C1=CN=C2C3=NC=CC=C3C=CC2=C1 DGEZNRSVGBDHLK-UHFFFAOYSA-N 0.000 description 1
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- 125000002252 acyl group Chemical group 0.000 description 1
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- NPAHZDPFZZHZJA-UHFFFAOYSA-N anthracene;propanoic acid Chemical compound CCC(O)=O.C1=CC=CC2=CC3=CC=CC=C3C=C21 NPAHZDPFZZHZJA-UHFFFAOYSA-N 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
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- 235000012000 cholesterol Nutrition 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
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- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
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- 229930195733 hydrocarbon Natural products 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
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- 229910044991 metal oxide Inorganic materials 0.000 description 1
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- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- XRWKADIRZXTTLH-UHFFFAOYSA-N n,n-dimethylnitramide Chemical compound CN(C)[N+]([O-])=O XRWKADIRZXTTLH-UHFFFAOYSA-N 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- ROYYMCKUKXXJRR-UHFFFAOYSA-N oxoaluminum;hydrofluoride Chemical compound F.[Al]=O ROYYMCKUKXXJRR-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
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- 229920000642 polymer Polymers 0.000 description 1
- 150000004032 porphyrins Chemical class 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
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- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000028327 secretion Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
- JAIHDOVRCZNXDU-UHFFFAOYSA-N violanthrene Chemical compound C12=C3C4=CC=C2C2=CC=CC=C2CC1=CC=C3C1=CC=C2CC3=CC=CC=C3C3=CC=C4C1=C32 JAIHDOVRCZNXDU-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
- H01L21/02285—Langmuir-Blodgett techniques
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/701—Organic molecular electronic devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/451—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising a metal-semiconductor-metal [m-s-m] structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/701—Langmuir Blodgett films
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- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/141—Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
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- H10K85/30—Coordination compounds
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- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/611—Charge transfer complexes
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
- H10K85/621—Aromatic anhydride or imide compounds, e.g. perylene tetra-carboxylic dianhydride or perylene tetracarboxylic di-imide
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- H10K85/649—Aromatic compounds comprising a hetero atom
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
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- Engineering & Computer Science (AREA)
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Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB34263/75A GB1572181A (en) | 1975-08-18 | 1975-08-18 | Device comprising a thin film of organic materila |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2637206A1 true DE2637206A1 (de) | 1977-03-10 |
Family
ID=10363472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19762637206 Ceased DE2637206A1 (de) | 1975-08-18 | 1976-08-18 | Eine duennschicht insbesondere aus organischem material aufweisende anordnungen und verfahren zur herstellung derselben |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5235587A (fi) |
DE (1) | DE2637206A1 (fi) |
FR (1) | FR2321769A1 (fi) |
GB (1) | GB1572181A (fi) |
NL (1) | NL7609163A (fi) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0239368A2 (en) * | 1986-03-25 | 1987-09-30 | Kabushiki Kaisha Toshiba | Field-effect transistor |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1085947A (en) * | 1977-08-02 | 1980-09-16 | Ching W. Tang | Multilayer organic photovoltaic elements |
EP0076060B1 (en) * | 1981-09-25 | 1986-12-17 | Imperial Chemical Industries Plc | Method of applying thin films to substrates |
GB2117669A (en) * | 1982-03-05 | 1983-10-19 | Nat Res Dev | Polymeric films |
JPH0669006B2 (ja) * | 1984-04-12 | 1994-08-31 | 松下電器産業株式会社 | 有機磁性薄膜およびその製造方法 |
JPS60223887A (ja) * | 1984-04-20 | 1985-11-08 | Canon Inc | 発光表示素子 |
US4773742A (en) * | 1984-05-15 | 1988-09-27 | Canon Kabushiki Kaisha | Display method with fatly acid ester host molecule |
JPH0610734B2 (ja) * | 1984-05-15 | 1994-02-09 | キヤノン株式会社 | 表示媒体 |
JPS6137887A (ja) * | 1984-07-31 | 1986-02-22 | Canon Inc | El素子 |
JPS6137888A (ja) * | 1984-07-31 | 1986-02-22 | Canon Inc | El素子 |
JPS6137858A (ja) * | 1984-07-31 | 1986-02-22 | Canon Inc | 電界発光素子 |
JPS6137883A (ja) * | 1984-07-31 | 1986-02-22 | Canon Inc | 電界発光素子 |
JPS6137889A (ja) * | 1984-07-31 | 1986-02-22 | Canon Inc | El素子 |
JPS61219185A (ja) * | 1985-03-26 | 1986-09-29 | Toshiba Corp | 発光素子 |
US4819057A (en) * | 1985-09-30 | 1989-04-04 | Kabushiki Kaisha Toshiba | Semiconductor light-emitting element |
GB8527213D0 (en) * | 1985-11-05 | 1985-12-11 | British Petroleum Co Plc | Separation process |
EP0237017B1 (en) * | 1986-03-11 | 1995-09-06 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisha | Electric-electronic device including polyimide thin film |
CA1256592A (en) * | 1986-04-01 | 1989-06-27 | Masakazu Uekita | Electric-electronic device including polyimide thin film |
US4939556A (en) * | 1986-07-10 | 1990-07-03 | Canon Kabushiki Kaisha | Conductor device |
US4714838A (en) * | 1986-10-31 | 1987-12-22 | Minnesota Mining And Manufacturing Company | Second harmonic generation with N,N'-substituted barbituric acids |
FI77679C (fi) * | 1987-02-23 | 1989-04-10 | K & V Licencing Oy | Filmaggregat och foerfarande foer dess framstaellning. |
JPH02501609A (ja) * | 1987-10-09 | 1990-05-31 | ヒューズ・エアクラフト・カンパニー | ラングミュア・ブロジェット絶縁層を有するGaAs電気回路装置 |
JP2651237B2 (ja) * | 1989-02-10 | 1997-09-10 | 出光興産株式会社 | 薄膜エレクトロルミネッセンス素子 |
WO1990005998A1 (en) * | 1988-11-21 | 1990-05-31 | Mitsui Toatsu Chemicals, Inc. | Light-emitting element |
JP2651233B2 (ja) * | 1989-01-20 | 1997-09-10 | 出光興産株式会社 | 薄膜有機el素子 |
US5006915A (en) * | 1989-02-14 | 1991-04-09 | Ricoh Company, Ltd. | Electric device and photoelectric conversion device comprising the same |
JPH03105896A (ja) * | 1989-09-20 | 1991-05-02 | Hitachi Ltd | El発光体 |
US7186380B2 (en) * | 2002-07-01 | 2007-03-06 | Hewlett-Packard Development Company, L.P. | Transistor and sensors made from molecular materials with electric dipoles |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2153441A1 (de) * | 1971-10-27 | 1973-05-10 | Licentia Gmbh | Verfahren zum herstellen eines halbleiterbauelementes |
-
1975
- 1975-08-18 GB GB34263/75A patent/GB1572181A/en not_active Expired
-
1976
- 1976-08-18 JP JP51098553A patent/JPS5235587A/ja active Pending
- 1976-08-18 DE DE19762637206 patent/DE2637206A1/de not_active Ceased
- 1976-08-18 FR FR7625128A patent/FR2321769A1/fr active Granted
- 1976-08-18 NL NL7609163A patent/NL7609163A/xx not_active Application Discontinuation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2153441A1 (de) * | 1971-10-27 | 1973-05-10 | Licentia Gmbh | Verfahren zum herstellen eines halbleiterbauelementes |
Non-Patent Citations (1)
Title |
---|
"Die Naturwissenschaften", 27. Jg. H. 18, 5. Mai 1939, S. 287-292 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0239368A2 (en) * | 1986-03-25 | 1987-09-30 | Kabushiki Kaisha Toshiba | Field-effect transistor |
EP0239368A3 (en) * | 1986-03-25 | 1990-02-07 | Kabushiki Kaisha Toshiba | Field-effect transistor |
US5294820A (en) * | 1986-03-25 | 1994-03-15 | Kabushiki Kaisha Toshiba | Field-effect transistor |
Also Published As
Publication number | Publication date |
---|---|
GB1572181A (en) | 1980-07-23 |
NL7609163A (nl) | 1977-02-22 |
JPS5235587A (en) | 1977-03-18 |
FR2321769B1 (fi) | 1982-10-29 |
FR2321769A1 (fr) | 1977-03-18 |
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