DE2620500A1 - Verfahren zur herstellung eines wandlers - Google Patents

Verfahren zur herstellung eines wandlers

Info

Publication number
DE2620500A1
DE2620500A1 DE19762620500 DE2620500A DE2620500A1 DE 2620500 A1 DE2620500 A1 DE 2620500A1 DE 19762620500 DE19762620500 DE 19762620500 DE 2620500 A DE2620500 A DE 2620500A DE 2620500 A1 DE2620500 A1 DE 2620500A1
Authority
DE
Germany
Prior art keywords
power source
cantilever
glass
layers
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19762620500
Other languages
German (de)
English (en)
Inventor
Teruyuki Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Micronas GmbH
Original Assignee
Deutsche ITT Industries GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsche ITT Industries GmbH filed Critical Deutsche ITT Industries GmbH
Publication of DE2620500A1 publication Critical patent/DE2620500A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Force In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
DE19762620500 1975-05-14 1976-05-08 Verfahren zur herstellung eines wandlers Pending DE2620500A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/577,412 US3953920A (en) 1975-05-14 1975-05-14 Method of making a transducer

Publications (1)

Publication Number Publication Date
DE2620500A1 true DE2620500A1 (de) 1976-11-25

Family

ID=24308606

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19762620500 Pending DE2620500A1 (de) 1975-05-14 1976-05-08 Verfahren zur herstellung eines wandlers

Country Status (9)

Country Link
US (1) US3953920A (enExample)
JP (1) JPS52448A (enExample)
CA (1) CA1070856A (enExample)
CH (1) CH609769A5 (enExample)
DE (1) DE2620500A1 (enExample)
FR (1) FR2325017A1 (enExample)
GB (1) GB1512486A (enExample)
IT (1) IT1063291B (enExample)
NL (1) NL7605091A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3937529A1 (de) * 1989-11-08 1991-05-16 Siemens Ag Verfahren zum verbinden eines siliziumteiles mit einem glasteil

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4016644A (en) * 1974-03-18 1977-04-12 Kulite Semiconductor Products, Inc. Methods of fabricating low pressure silicon transducers
US4311980A (en) * 1978-10-12 1982-01-19 Fabrica Italiana Magneti Marelli, S.P.A. Device for pressure measurement using a resistor strain gauge
US4271584A (en) * 1978-12-04 1981-06-09 The United States Of America As Represented By The Secretary Of The Navy Method of attaching LED chip to a header
FR2494437A1 (fr) * 1980-11-20 1982-05-21 Commissariat Energie Atomique Dispositif de mesure comprenant une jauge de contrainte avec un support en verre mince
GB2146566B (en) * 1983-09-16 1986-11-26 Standard Telephones Cables Ltd Electrostatic bonding
US4987780A (en) * 1987-11-16 1991-01-29 Litton Systems, Inc. Integrated accelerometer assembly
US7430926B2 (en) * 2006-02-13 2008-10-07 General Electric Company Apparatus for measuring bearing thrust load
KR102273713B1 (ko) * 2014-11-05 2021-07-06 주식회사 만도 압력센서
US10264720B1 (en) 2015-06-23 2019-04-16 Flextronics Ap, Llc Lead trimming module
WO2017146809A1 (en) 2016-02-25 2017-08-31 Massachusetts Institute Of Technology Directional force sensing element and system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1138401A (en) * 1965-05-06 1969-01-01 Mallory & Co Inc P R Bonding
US3417459A (en) * 1965-05-06 1968-12-24 Mallory & Co Inc P R Bonding electrically conductive metals to insulators
JPS4920239B1 (enExample) * 1969-10-28 1974-05-23
US3713068A (en) * 1971-06-07 1973-01-23 Itt Bonded assemblies and methods of making the same
US3775839A (en) * 1972-03-27 1973-12-04 Itt Method of making a transducer
US3781978A (en) * 1972-05-16 1974-01-01 Gen Electric Process of making thermoelectrostatic bonded semiconductor devices
US3803706A (en) * 1972-12-27 1974-04-16 Itt Method of making a transducer
US3805377A (en) * 1973-04-18 1974-04-23 Itt Method of making a transducer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3937529A1 (de) * 1989-11-08 1991-05-16 Siemens Ag Verfahren zum verbinden eines siliziumteiles mit einem glasteil

Also Published As

Publication number Publication date
GB1512486A (en) 1978-06-01
IT1063291B (it) 1985-02-11
US3953920A (en) 1976-05-04
NL7605091A (nl) 1976-11-16
CA1070856A (en) 1980-01-29
CH609769A5 (enExample) 1979-03-15
FR2325017A1 (fr) 1977-04-15
JPS52448A (en) 1977-01-05

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