DE2559840C2 - Verfahren zur Dotierung von Halbleitermaterial - Google Patents

Verfahren zur Dotierung von Halbleitermaterial

Info

Publication number
DE2559840C2
DE2559840C2 DE2559840A DE2559840A DE2559840C2 DE 2559840 C2 DE2559840 C2 DE 2559840C2 DE 2559840 A DE2559840 A DE 2559840A DE 2559840 A DE2559840 A DE 2559840A DE 2559840 C2 DE2559840 C2 DE 2559840C2
Authority
DE
Germany
Prior art keywords
mol
glass
doping
silicon
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2559840A
Other languages
German (de)
English (en)
Inventor
James Erich Oregon Ohio Rapp
William Earl Smith, (verstorben)
Peter Joseph Toledo Ohio Vergano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OI Glass Inc
Original Assignee
Owens Illinois Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/534,860 external-priority patent/US3962000A/en
Application filed by Owens Illinois Inc filed Critical Owens Illinois Inc
Application granted granted Critical
Publication of DE2559840C2 publication Critical patent/DE2559840C2/de
Expired legal-status Critical Current

Links

Classifications

    • H10P32/12—
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C03C10/0045—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents containing SiO2, Al2O3 and MgO as main constituents
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0054—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing PbO, SnO2, B2O3
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/062—Glass compositions containing silica with less than 40% silica by weight
    • C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources
    • H10P32/171—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Metallurgy (AREA)
  • Glass Compositions (AREA)
DE2559840A 1974-12-20 1975-10-11 Verfahren zur Dotierung von Halbleitermaterial Expired DE2559840C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/534,860 US3962000A (en) 1974-01-07 1974-12-20 Barium aluminoborosilicate glass-ceramics for semiconductor doping

Publications (1)

Publication Number Publication Date
DE2559840C2 true DE2559840C2 (de) 1983-09-22

Family

ID=24131820

Family Applications (5)

Application Number Title Priority Date Filing Date
DE2559840A Expired DE2559840C2 (de) 1974-12-20 1975-10-11 Verfahren zur Dotierung von Halbleitermaterial
DE2559841A Expired DE2559841C2 (de) 1974-12-20 1975-10-11 Verfahren zur Dotierung von Halbleitermaterial
DE2560268A Expired DE2560268C2 (de) 1974-12-20 1975-10-11 Verwendung eines Glaskeramikkörpers als Dotierstoffquelle für die Dampfphasen-Dotierung mit B↓2↓0↓3↓
DE19752545628 Pending DE2545628A1 (de) 1974-12-20 1975-10-11 Bordotierung von halbleitern
DE2560267A Expired DE2560267C2 (de) 1974-12-20 1975-10-11 Verwendung eines Glaskeramikkörpers als Dotierstoffquelle für die Dampfphasen-Dotierung mit B↓2↓O↓3↓

Family Applications After (4)

Application Number Title Priority Date Filing Date
DE2559841A Expired DE2559841C2 (de) 1974-12-20 1975-10-11 Verfahren zur Dotierung von Halbleitermaterial
DE2560268A Expired DE2560268C2 (de) 1974-12-20 1975-10-11 Verwendung eines Glaskeramikkörpers als Dotierstoffquelle für die Dampfphasen-Dotierung mit B↓2↓0↓3↓
DE19752545628 Pending DE2545628A1 (de) 1974-12-20 1975-10-11 Bordotierung von halbleitern
DE2560267A Expired DE2560267C2 (de) 1974-12-20 1975-10-11 Verwendung eines Glaskeramikkörpers als Dotierstoffquelle für die Dampfphasen-Dotierung mit B↓2↓O↓3↓

Country Status (4)

Country Link
CA (1) CA1061100A (enExample)
DE (5) DE2559840C2 (enExample)
FR (1) FR2295566A1 (enExample)
GB (1) GB1497193A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013208799A1 (de) * 2013-05-14 2014-11-20 Heraeus Quarzglas Gmbh & Co. Kg SiO2-basierte Sperrschicht für Hochtemperatur-Diffusions- und Beschichtungsprozesse

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3530016A (en) * 1967-07-10 1970-09-22 Marconi Co Ltd Methods of manufacturing semiconductor devices

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL125167C (enExample) * 1963-01-17
DE1596848B1 (de) * 1966-12-31 1970-10-08 Jenaer Glaswerk Schott & Gen Durch Waermebehandlung aus einem Glas hergestellte alkalioxidfreie,thermisch hoch belastbare Glaskeramik mit geringen dielektrischen Verlusten

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3530016A (en) * 1967-07-10 1970-09-22 Marconi Co Ltd Methods of manufacturing semiconductor devices

Also Published As

Publication number Publication date
DE2560268C2 (de) 1985-03-07
DE2559841C2 (de) 1983-10-20
GB1497193A (en) 1978-01-05
DE2545628A1 (de) 1976-07-01
FR2295566A1 (fr) 1976-07-16
DE2560267C2 (de) 1985-05-23
CA1061100A (en) 1979-08-28
FR2295566B1 (enExample) 1979-07-06

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Legal Events

Date Code Title Description
OI Miscellaneous see part 1
OD Request for examination
OI Miscellaneous see part 1
8181 Inventor (new situation)

Free format text: VERGANO, PETER JOSEPH, TOLEDO, OHIO, US SMITH, WILLIAM EARL, (VERSTORBEN), US RAPP, JAMES ERICH, OREGON, OHIO, US

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