GB1497193A - Boron doping of semiconductors - Google Patents

Boron doping of semiconductors

Info

Publication number
GB1497193A
GB1497193A GB3078577A GB3078577A GB1497193A GB 1497193 A GB1497193 A GB 1497193A GB 3078577 A GB3078577 A GB 3078577A GB 3078577 A GB3078577 A GB 3078577A GB 1497193 A GB1497193 A GB 1497193A
Authority
GB
United Kingdom
Prior art keywords
glass
bao
ceramic body
semiconductors
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3078577A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OI Glass Inc
Original Assignee
Owens Illinois Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/534,860 external-priority patent/US3962000A/en
Application filed by Owens Illinois Inc filed Critical Owens Illinois Inc
Publication of GB1497193A publication Critical patent/GB1497193A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C03C10/0045—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents containing SiO2, Al2O3 and MgO as main constituents
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0054—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing PbO, SnO2, B2O3
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/062—Glass compositions containing silica with less than 40% silica by weight
    • C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Glass Compositions (AREA)

Abstract

1497193 Glass-ceramics OWENS-ILLINOIS Inc 7 Jan 1975 [20 Dec 1974] 30785/77 Divided out of 1497191 Heading C1M [Also in Division H1] A dopant source for the diffusion of B into Si and/or Ge from a vapour containing B 2 O 3 , preferably in a carrier gas, comprises a rigid, dimensionally-stable glass-ceramic body having the following composition (all proportions are expressed as mole per cent): SiO 2 40-60 (preferably 40-55) Al 2 O 3 10-30 B 2 O 3 20-40 alkaline earth oxide, selected from BaO, MgO, CaO, SrO 3-20 (preferably 5-15) and wherein the BaO content is 1-15 (preferably 3-15). The glass-ceramic contains substantially no alkali metal oxides (<0À5). Processes for manufacturing the glass-ceramic body by thermal in situ crystallization of a parent glass body are disclosed.
GB3078577A 1974-12-20 1975-01-07 Boron doping of semiconductors Expired GB1497193A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/534,860 US3962000A (en) 1974-01-07 1974-12-20 Barium aluminoborosilicate glass-ceramics for semiconductor doping

Publications (1)

Publication Number Publication Date
GB1497193A true GB1497193A (en) 1978-01-05

Family

ID=24131820

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3078577A Expired GB1497193A (en) 1974-12-20 1975-01-07 Boron doping of semiconductors

Country Status (4)

Country Link
CA (1) CA1061100A (en)
DE (5) DE2559841C2 (en)
FR (1) FR2295566A1 (en)
GB (1) GB1497193A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013208799A1 (en) * 2013-05-14 2014-11-20 Heraeus Quarzglas Gmbh & Co. Kg SiO2-based barrier layer for high-temperature diffusion and coating processes

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL125167C (en) 1963-01-17
DE1596848B1 (en) * 1966-12-31 1970-10-08 Jenaer Glaswerk Schott & Gen Alkaline-oxide-free, thermally highly resilient glass-ceramic with low dielectric losses produced from a glass by heat treatment
GB1143907A (en) * 1967-07-10 1969-02-26 Marconi Co Ltd Improvements in or relating to methods of manufacturing semiconductor devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013208799A1 (en) * 2013-05-14 2014-11-20 Heraeus Quarzglas Gmbh & Co. Kg SiO2-based barrier layer for high-temperature diffusion and coating processes

Also Published As

Publication number Publication date
DE2559840C2 (en) 1983-09-22
FR2295566A1 (en) 1976-07-16
FR2295566B1 (en) 1979-07-06
DE2559841C2 (en) 1983-10-20
DE2560268C2 (en) 1985-03-07
DE2560267C2 (en) 1985-05-23
DE2545628A1 (en) 1976-07-01
CA1061100A (en) 1979-08-28

Similar Documents

Publication Publication Date Title
US5318931A (en) Glass panes for vehicles
GB1430096A (en) Glass composition for producing microporous articles
CA1042927A (en) Glass envelope for tungsten-bromine lamp
US5264400A (en) Glass panes for vehicles
AR042415A2 (en) GLASS SHEET FOR THE MANUFACTURING OF SUBSTRATES OR THERMALLY STABLE PLATES AND USES OF THE SAME
KR870003944A (en) Flat panel type indicator of strontium aluminosilicate glass substrate
AU2671400A (en) Glass with high proportion of zirconium-oxide and its uses
MY119480A (en) Aluminosilicate glass for flat display services
GB1341533A (en)
GB1497192A (en) Boron doping of semiconductors
KR910000553A (en) Zinc Phosphate Glass Containing Rare Earth Metals
JP2532045B2 (en) Lighting glass composition
CA2375719A1 (en) Glass fiber composition
KR970042349A (en) Aluminum Phosphate Glasses Containing Cupric Oxide
GB1497191A (en) Boron doping of semiconductors
GB1112666A (en) Glass-ceramic body and method of making it
GB1388777A (en) Glass compositions and cathode-ray tubes made therefrom
GB1204670A (en) Improvements relating to glass
JPH0558670A (en) Glass for vehicle
GB1497193A (en) Boron doping of semiconductors
GB2032909A (en) Sealing Glass Compositions
US3885182A (en) Lamp having light diffusing envelope
GB1357063A (en) Manufacture of borosilicate glasses
EP0146187B1 (en) Glass composition suitable for use in a fluorescent lamp
GB863500A (en) Thermally devitrifiable glasses

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee