GB1497193A - Boron doping of semiconductors - Google Patents

Boron doping of semiconductors

Info

Publication number
GB1497193A
GB1497193A GB3078577A GB3078577A GB1497193A GB 1497193 A GB1497193 A GB 1497193A GB 3078577 A GB3078577 A GB 3078577A GB 3078577 A GB3078577 A GB 3078577A GB 1497193 A GB1497193 A GB 1497193A
Authority
GB
United Kingdom
Prior art keywords
glass
preferably
bao
ceramic body
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3078577A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Owens Illinois Inc
Original Assignee
Owens Illinois Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US05/534,860 priority Critical patent/US3962000A/en
Application filed by Owens Illinois Inc filed Critical Owens Illinois Inc
Publication of GB1497193A publication Critical patent/GB1497193A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/223Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C03C10/0045Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents containing SiO2, Al2O3 and MgO as main constituents
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0054Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing PbO, SnO2, B2O3
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/062Glass compositions containing silica with less than 40% silica by weight
    • C03C3/064Glass compositions containing silica with less than 40% silica by weight containing boron
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165Diffusion sources

Abstract

1497193 Glass-ceramics OWENS-ILLINOIS Inc 7 Jan 1975 [20 Dec 1974] 30785/77 Divided out of 1497191 Heading C1M [Also in Division H1] A dopant source for the diffusion of B into Si and/or Ge from a vapour containing B 2 O 3 , preferably in a carrier gas, comprises a rigid, dimensionally-stable glass-ceramic body having the following composition (all proportions are expressed as mole per cent): SiO 2 40-60 (preferably 40-55) Al 2 O 3 10-30 B 2 O 3 20-40 alkaline earth oxide, selected from BaO, MgO, CaO, SrO 3-20 (preferably 5-15) and wherein the BaO content is 1-15 (preferably 3-15). The glass-ceramic contains substantially no alkali metal oxides (<0À5). Processes for manufacturing the glass-ceramic body by thermal in situ crystallization of a parent glass body are disclosed.
GB3078577A 1974-01-07 1975-01-07 Boron doping of semiconductors Expired GB1497193A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US05/534,860 US3962000A (en) 1974-01-07 1974-12-20 Barium aluminoborosilicate glass-ceramics for semiconductor doping

Publications (1)

Publication Number Publication Date
GB1497193A true GB1497193A (en) 1978-01-05

Family

ID=24131820

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3078577A Expired GB1497193A (en) 1974-01-07 1975-01-07 Boron doping of semiconductors

Country Status (4)

Country Link
CA (1) CA1061100A (en)
DE (5) DE2560268C2 (en)
FR (1) FR2295566B1 (en)
GB (1) GB1497193A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013208799A1 (en) * 2013-05-14 2014-11-20 Heraeus Quarzglas Gmbh & Co. Kg SiO2-based barrier layer for high-temperature diffusion and coating processes

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL125167C (en) * 1963-01-17
DE1596848B1 (en) * 1966-12-31 1970-10-08 Jenaer Glaswerk Schott & Gen Through Heat Treatment of a glass produced alkalioxidfreie, high thermal stress glass ceramic with low dielectric losses
GB1143907A (en) * 1967-07-10 1969-02-26 Marconi Co Ltd Improvements in or relating to methods of manufacturing semiconductor devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013208799A1 (en) * 2013-05-14 2014-11-20 Heraeus Quarzglas Gmbh & Co. Kg SiO2-based barrier layer for high-temperature diffusion and coating processes

Also Published As

Publication number Publication date
CA1061100A1 (en)
DE2560268C2 (en) 1985-03-07
FR2295566B1 (en) 1979-07-06
DE2559840C2 (en) 1983-09-22
DE2559841C2 (en) 1983-10-20
DE2560267C2 (en) 1985-05-23
DE2545628A1 (en) 1976-07-01
CA1061100A (en) 1979-08-28
FR2295566A1 (en) 1976-07-16

Similar Documents

Publication Publication Date Title
US4060423A (en) High-temperature glass composition
JP4446148B2 (en) Method for producing alkali-free aluminosilicate glass
US5320986A (en) Green-colored infrared and ultraviolet radiation absorbing glass and method of producing same
EP0588000B1 (en) Chemically and thermally resistant borosilicate glas which is fusible with tungsten
EP0850896B1 (en) Use of water dispersable mixtures of polyisocyanates as concrete additives
US2805166A (en) Glasses containing oxides of rare earth metals
JP4215176B2 (en) High chemical resistance and low viscosity borosilicate glass containing zirconium oxide and lithium oxide
US6992031B2 (en) Method for producing aluminosilicate glass
US4615988A (en) Glass fibers and a composition for manufacturing the same
CN1307116C (en) UV-blocking borosilicate glass, the use of the same, and a fluorescent lamp
US6284686B1 (en) Lead and arsenic free borosilicate glass and lamp containing same
US3496401A (en) Glass envelopes for iodine cycle incandescent lamps
US3275492A (en) Opal glass with a low coefficient of thermal expansion
US4537862A (en) Lead-free and cadmium-free glass frit compositions for glazing, enameling and decorating
US4277286A (en) Lead-free glasses of high x-ray absorption for cathode ray tubes
CA2113505A1 (en) High liquidus viscosity glasses for flat panel displays
US3723142A (en) Neutral gray glass
US3723790A (en) Electrical lamp or tube comprising copper coated nickel-iron alloy electrical current conductors and a glass enclosure
FR2563210A1 (en) Optical glass color and filter
EP0019327B1 (en) Method of producing doped quartz glass, and objects produced therefrom
CA2169936A1 (en) Glass composition for making glazing
US5547904A (en) Borosilicate glass having improved UV transmission, thermal and chemical properities and methods of making and using same
US6612133B2 (en) Method for shifting absorption peak wavelength of infrared radiation absorbing glass
KR960706456A (en) Reinforced glass substrates
US3978362A (en) Glass envelope for tungsten-bromine lamp

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee