DE2536013A1 - Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten - Google Patents
Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichtenInfo
- Publication number
- DE2536013A1 DE2536013A1 DE19752536013 DE2536013A DE2536013A1 DE 2536013 A1 DE2536013 A1 DE 2536013A1 DE 19752536013 DE19752536013 DE 19752536013 DE 2536013 A DE2536013 A DE 2536013A DE 2536013 A1 DE2536013 A1 DE 2536013A1
- Authority
- DE
- Germany
- Prior art keywords
- silicon
- vapor
- hydrophobic
- organosilicon compound
- groups
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 16
- 229910052814 silicon oxide Inorganic materials 0.000 title claims description 6
- 239000011253 protective coating Substances 0.000 title description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000011241 protective layer Substances 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 15
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 14
- 230000002209 hydrophobic effect Effects 0.000 claims description 11
- 150000003961 organosilicon compounds Chemical class 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 125000004429 atom Chemical group 0.000 claims description 5
- 125000003368 amide group Chemical group 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 238000010025 steaming Methods 0.000 claims description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 2
- 125000004423 acyloxy group Chemical group 0.000 claims description 2
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 125000000217 alkyl group Chemical group 0.000 claims description 2
- 125000002947 alkylene group Chemical group 0.000 claims description 2
- 125000002344 aminooxy group Chemical group [H]N([H])O[*] 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 2
- 125000001165 hydrophobic group Chemical group 0.000 claims 2
- 150000005840 aryl radicals Chemical class 0.000 claims 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims 1
- 125000001424 substituent group Chemical group 0.000 claims 1
- 239000010410 layer Substances 0.000 description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 239000000969 carrier Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- 239000007900 aqueous suspension Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- -1 methoxy, ethoxy Chemical group 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- 229910020175 SiOH Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 1
- FALCQDAWENTNHF-UHFFFAOYSA-N ethenyl(2-methoxyethoxy)silane Chemical compound COCCO[SiH2]C=C FALCQDAWENTNHF-UHFFFAOYSA-N 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000000031 ethylamino group Chemical group [H]C([H])([H])C([H])([H])N([H])[*] 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 125000004368 propenyl group Chemical group C(=CC)* 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000004078 waterproofing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/266—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension of base or substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31663—As siloxane, silicone or silane
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Silicon Compounds (AREA)
- Laminated Bodies (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Optical Filters (AREA)
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19752536013 DE2536013A1 (de) | 1975-08-13 | 1975-08-13 | Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten |
| FR7622059A FR2320363A1 (fr) | 1975-08-13 | 1976-07-20 | Procede pour ameliorer la tenue des couches protectrices constituees d'oxyde de silicium |
| US05/711,842 US4105821A (en) | 1975-08-13 | 1976-08-05 | Silicon oxide coated metal having improved corrosion resistance |
| IT2608776A IT1065805B (it) | 1975-08-13 | 1976-08-06 | Procedimento per migliorare la durevolezza di strati protettivi costituiti di ossidi di silicio |
| AT597876A AT345058B (de) | 1975-08-13 | 1976-08-11 | Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten |
| GB3350676A GB1536720A (en) | 1975-08-13 | 1976-08-12 | Method of the durability of protective coatings made from silicon oxides |
| NL7608974A NL7608974A (nl) | 1975-08-13 | 1976-08-12 | Werkwijze ter verbetering van de houdbaarheid van uit siliciumoxyden bestaande beschermende lagen. |
| SE7609029A SE7609029L (sv) | 1975-08-13 | 1976-08-12 | Sett att forbettra hallbarheten for skyddsskikt, som bestar av kiseloxider |
| JP9693676A JPS5223580A (en) | 1975-08-13 | 1976-08-13 | Process for improving stability of protective layer deposited from silica vapor |
| ES450687A ES450687A1 (es) | 1975-08-13 | 1976-08-13 | Procedimiento para mejorar la durabilidad de capas protecto-ras vaporizadas. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19752536013 DE2536013A1 (de) | 1975-08-13 | 1975-08-13 | Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2536013A1 true DE2536013A1 (de) | 1977-03-03 |
Family
ID=5953855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752536013 Withdrawn DE2536013A1 (de) | 1975-08-13 | 1975-08-13 | Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US4105821A (enExample) |
| JP (1) | JPS5223580A (enExample) |
| AT (1) | AT345058B (enExample) |
| DE (1) | DE2536013A1 (enExample) |
| ES (1) | ES450687A1 (enExample) |
| FR (1) | FR2320363A1 (enExample) |
| GB (1) | GB1536720A (enExample) |
| IT (1) | IT1065805B (enExample) |
| NL (1) | NL7608974A (enExample) |
| SE (1) | SE7609029L (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3002643A1 (de) * | 1979-10-31 | 1981-09-10 | Naučno-issledovatel'skij i eksperimentalnyj institut avtomobilnogo elektro-oborudovanija i avtopriborov, Moskav | Verfahren zum auftragen von deckschichten auf reflektierende flaechen und anlage zu dessen verwirklichung |
| EP0212691A1 (en) * | 1985-06-14 | 1987-03-04 | Focus Semiconductor Systems, Inc. | Low temperature chemical vapor deposition of silicon dioxide films |
| EP0857518A1 (de) * | 1997-02-10 | 1998-08-12 | Leybold Systems GmbH | Verfahren und Vorrichtung zur Schutzbeschichtung von Verspiegelungsschichten |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4410418A (en) * | 1982-03-30 | 1983-10-18 | Phillips Petroleum Company | Method for reducing carbon formation in a thermal cracking process |
| US4483132A (en) * | 1983-02-14 | 1984-11-20 | Deere & Company | Cotton picker spindle |
| JPS60142584A (ja) * | 1983-12-28 | 1985-07-27 | 川崎製鉄株式会社 | プリント基板およびその製造方法 |
| CA1240215A (en) * | 1984-07-11 | 1988-08-09 | Edwin A. Chandross | Fabrication of devices with a silicon oxide region |
| JPS61227165A (ja) * | 1985-03-29 | 1986-10-09 | Mitsubishi Electric Corp | 蒸着装置 |
| JPS63149601A (ja) * | 1986-12-15 | 1988-06-22 | Toyota Central Res & Dev Lab Inc | 防曇性光学部材 |
| DE4021798A1 (de) * | 1990-07-09 | 1992-02-06 | Heraeus Quarzglas | Infrarotstrahler mit geschuetzter reflexionsschicht und verfahren zu seiner herstellung |
| EP0470777A3 (en) * | 1990-08-07 | 1993-06-02 | The Boc Group, Inc. | Thin gas barrier films and rapid deposition method therefor |
| TW289900B (enExample) * | 1994-04-22 | 1996-11-01 | Gould Electronics Inc | |
| US5527562A (en) * | 1994-10-21 | 1996-06-18 | Aluminum Company Of America | Siloxane coatings for aluminum reflectors |
| ES2205565T3 (es) * | 1998-11-12 | 2004-05-01 | ALCAN TECHNOLOGY & MANAGEMENT AG | Reflector con superficie resistente. |
| US6350397B1 (en) | 1999-03-10 | 2002-02-26 | Aspen Research Corporation | Optical member with layer having a coating geometry and composition that enhance cleaning properties |
| US6896970B2 (en) * | 2001-01-31 | 2005-05-24 | Areway, Inc. | Corrosion resistant coating giving polished effect |
| US6709119B2 (en) | 2001-04-27 | 2004-03-23 | Alusuisse Technology & Management Ltd. | Resistant surface reflector |
| US9061317B2 (en) | 2002-04-17 | 2015-06-23 | Air Products And Chemicals, Inc. | Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants |
| US20080268177A1 (en) * | 2002-05-17 | 2008-10-30 | Air Products And Chemicals, Inc. | Porogens, Porogenated Precursors and Methods for Using the Same to Provide Porous Organosilica Glass Films with Low Dielectric Constants |
| US6846515B2 (en) * | 2002-04-17 | 2005-01-25 | Air Products And Chemicals, Inc. | Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants |
| US8293001B2 (en) * | 2002-04-17 | 2012-10-23 | Air Products And Chemicals, Inc. | Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants |
| US7384471B2 (en) * | 2002-04-17 | 2008-06-10 | Air Products And Chemicals, Inc. | Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants |
| US8951342B2 (en) | 2002-04-17 | 2015-02-10 | Air Products And Chemicals, Inc. | Methods for using porogens for low k porous organosilica glass films |
| US6921062B2 (en) | 2002-07-23 | 2005-07-26 | Advanced Technology Materials, Inc. | Vaporizer delivery ampoule |
| JP2007523959A (ja) * | 2003-06-23 | 2007-08-23 | チューリッヒ大学 | 超疎水性コーティング |
| US7332445B2 (en) * | 2004-09-28 | 2008-02-19 | Air Products And Chemicals, Inc. | Porous low dielectric constant compositions and methods for making and using same |
| JP5259938B2 (ja) * | 2006-08-14 | 2013-08-07 | スタンレー電気株式会社 | 金属多層膜構造およびその成膜方法 |
| US20080241805A1 (en) | 2006-08-31 | 2008-10-02 | Q-Track Corporation | System and method for simulated dosimetry using a real time locating system |
| DE102006056578A1 (de) * | 2006-11-30 | 2008-06-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung einer Nanostruktur an einer Kunststoffoberfläche |
| ES2543593T3 (es) * | 2007-04-04 | 2015-08-20 | Tetra Laval Holdings & Finance S.A. | Laminado de envasado, método para fabricar el laminado de envasado y recipiente de envasado producido a partir del mismo |
| KR20230080495A (ko) | 2012-05-31 | 2023-06-07 | 엔테그리스, 아이엔씨. | 배취식 침착을 위한 고 물질 플럭스를 갖는 유체의 소스 시약-기반 수송 |
| JP6542089B2 (ja) * | 2015-09-30 | 2019-07-10 | 富士フイルム株式会社 | 車両用ミラー |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB706003A (en) * | 1949-05-18 | 1954-03-24 | British American Res Ltd | Improvements in the coating of articles by evaporation and/or sputtering in evacuated chambers |
| US2748031A (en) * | 1952-12-31 | 1956-05-29 | Kafig Emanuel | Reproduction of printed patterns by vacuum evaporation |
| US2904450A (en) * | 1958-05-14 | 1959-09-15 | Ford Motor Co | Transparent coating |
| US3352712A (en) * | 1964-08-28 | 1967-11-14 | Rca Corp | Method of stabilizing semi-conductor devices having exposed surfaces of a hydrophilic oxide |
| GB1229473A (enExample) * | 1968-06-14 | 1971-04-21 | ||
| CS151965B1 (enExample) * | 1970-07-03 | 1973-12-19 | ||
| US3984581A (en) * | 1973-02-28 | 1976-10-05 | Carl Zeiss-Stiftung | Method for the production of anti-reflection coatings on optical elements made of transparent organic polymers |
| US3991234A (en) * | 1974-09-30 | 1976-11-09 | American Optical Corporation | Process for coating a lens of synthetic polymer with a durable abrasion resistant vitreous composition |
-
1975
- 1975-08-13 DE DE19752536013 patent/DE2536013A1/de not_active Withdrawn
-
1976
- 1976-07-20 FR FR7622059A patent/FR2320363A1/fr active Granted
- 1976-08-05 US US05/711,842 patent/US4105821A/en not_active Expired - Lifetime
- 1976-08-06 IT IT2608776A patent/IT1065805B/it active
- 1976-08-11 AT AT597876A patent/AT345058B/de not_active IP Right Cessation
- 1976-08-12 NL NL7608974A patent/NL7608974A/xx not_active Application Discontinuation
- 1976-08-12 GB GB3350676A patent/GB1536720A/en not_active Expired
- 1976-08-12 SE SE7609029A patent/SE7609029L/ not_active Application Discontinuation
- 1976-08-13 ES ES450687A patent/ES450687A1/es not_active Expired
- 1976-08-13 JP JP9693676A patent/JPS5223580A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3002643A1 (de) * | 1979-10-31 | 1981-09-10 | Naučno-issledovatel'skij i eksperimentalnyj institut avtomobilnogo elektro-oborudovanija i avtopriborov, Moskav | Verfahren zum auftragen von deckschichten auf reflektierende flaechen und anlage zu dessen verwirklichung |
| EP0212691A1 (en) * | 1985-06-14 | 1987-03-04 | Focus Semiconductor Systems, Inc. | Low temperature chemical vapor deposition of silicon dioxide films |
| EP0857518A1 (de) * | 1997-02-10 | 1998-08-12 | Leybold Systems GmbH | Verfahren und Vorrichtung zur Schutzbeschichtung von Verspiegelungsschichten |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2320363A1 (fr) | 1977-03-04 |
| JPS5223580A (en) | 1977-02-22 |
| GB1536720A (en) | 1978-12-20 |
| SE7609029L (sv) | 1977-02-14 |
| ES450687A1 (es) | 1977-07-16 |
| NL7608974A (nl) | 1977-02-15 |
| ATA597876A (de) | 1977-12-15 |
| US4105821A (en) | 1978-08-08 |
| IT1065805B (it) | 1985-03-04 |
| AT345058B (de) | 1978-08-25 |
| FR2320363B3 (enExample) | 1977-07-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2536013A1 (de) | Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten | |
| EP1383940B1 (de) | Funktionelle keramische schichten, auf basis einer, mit kristallinen nanoteilchen hergestellten trägerschicht | |
| DE69911431T2 (de) | Wasserabstossende zusammensetzung, verfahren zur herstellung einer beschichtung und produkt mit dieser beschichtung | |
| DE69418029T2 (de) | Rohrelement für erdverlegte rohrleitung, entsprechende erdverlegte rohrleitung und herstellungsverfahren eines solchen rohrelementes | |
| KR950704368A (ko) | 산 내식성을 갖는 색조-투명 복합 코팅의 제조방법(method for preparing color-clear composite coatings having resistance to acid etching) | |
| EP0792846A1 (de) | Barriereschichten | |
| DE1571168B2 (de) | Verfahren zum Überziehen von Gegenständen | |
| DE102008043682A1 (de) | Verfahren zur Beschichtung von Oberflächen mit Partikeln und Verwendung der nach diesem Verfahren hergestellten Beschichtungen | |
| DE69411644T2 (de) | Bügeleisen mit einer Antihaftschichtbeschichtung | |
| EP3554721B1 (de) | Verfahren zum beschichten von kfz-felgen | |
| DE2263480A1 (de) | Schutzschicht auf unterlagen zum schutz gegen mechanische und chemische einfluesse | |
| DE2625448C3 (de) | Verfahren und Vorrichtung zur Herstellung einer Schutzschicht auf der Oberfläche optischer Reflektoren | |
| DE102012211746B4 (de) | Friktionsarme beschichtungsschicht für ein fahrzeugteil und verfahren zum erzeugen derselben | |
| EP1727925A1 (de) | Verfahren und vorrichtung zur ausbildung dünner schichten aus siliziumnitrid auf substratoberflächen | |
| EP0787220B1 (de) | Dichtungselement, insbesondere für absperr- und regelorgane und verfahren zu seiner herstellung | |
| DE4116522C2 (de) | Verfahren zur Herstellung von mit einer porösen alpha-Al¶2¶O¶3¶-Schicht versehenen Substraten, nach dem Verfahren erhaltene Substrate sowie Beschichtungsmittel zur Durchführung des Verfahrens | |
| DE10014035B4 (de) | Gefärbte Konversionsschicht, eine Lösung zu ihrer Herstellung sowie ihre Verwendung | |
| WO1996025243A1 (de) | Verfahren zur herstellung eines schichtsystems auf substraten und das mit diesem verfahren hergestellte schichtsystem | |
| EP2743376B1 (de) | Wässriges Mittel und Beschichtungsverfahren zur korrosionsschützenden Behandlung metallischer Substrate | |
| DE19937325B4 (de) | Verfahren zur Hydrophobierung von Oberflächen grobkeramischer Dachziegel und grobkeramischer Dachziegel mit einer ein Kapillargefüge aufweisenden hydrophobierten Oberfläche | |
| DE19523208A1 (de) | Wärmeübertrager, insbesondere Verdampfer für eine Kraftfahrzeug-Klimaanlage | |
| DE10315229B4 (de) | Verfahren zur Behandlung einer Fläche eines Reflektors eines Kraftfahrzeugscheinwerfers | |
| WO2005028125A1 (de) | Korrosionsschutzbeschichtung | |
| DE102014210211A1 (de) | Verdampfereinrichtung für eine Klimaanlage | |
| DE2612154C2 (de) | Verfahren zur Korrosionsschutzbeschichtung von Rohren oder Leitungselementen aus Stahl |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8141 | Disposal/no request for examination |