IT1065805B - Procedimento per migliorare la durevolezza di strati protettivi costituiti di ossidi di silicio - Google Patents

Procedimento per migliorare la durevolezza di strati protettivi costituiti di ossidi di silicio

Info

Publication number
IT1065805B
IT1065805B IT2608776A IT2608776A IT1065805B IT 1065805 B IT1065805 B IT 1065805B IT 2608776 A IT2608776 A IT 2608776A IT 2608776 A IT2608776 A IT 2608776A IT 1065805 B IT1065805 B IT 1065805B
Authority
IT
Italy
Prior art keywords
durability
improving
procedure
protective layers
layers constituting
Prior art date
Application number
IT2608776A
Other languages
English (en)
Italian (it)
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Application granted granted Critical
Publication of IT1065805B publication Critical patent/IT1065805B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/266—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension of base or substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Silicon Compounds (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Optical Filters (AREA)
IT2608776A 1975-08-13 1976-08-06 Procedimento per migliorare la durevolezza di strati protettivi costituiti di ossidi di silicio IT1065805B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752536013 DE2536013A1 (de) 1975-08-13 1975-08-13 Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten

Publications (1)

Publication Number Publication Date
IT1065805B true IT1065805B (it) 1985-03-04

Family

ID=5953855

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2608776A IT1065805B (it) 1975-08-13 1976-08-06 Procedimento per migliorare la durevolezza di strati protettivi costituiti di ossidi di silicio

Country Status (10)

Country Link
US (1) US4105821A (enExample)
JP (1) JPS5223580A (enExample)
AT (1) AT345058B (enExample)
DE (1) DE2536013A1 (enExample)
ES (1) ES450687A1 (enExample)
FR (1) FR2320363A1 (enExample)
GB (1) GB1536720A (enExample)
IT (1) IT1065805B (enExample)
NL (1) NL7608974A (enExample)
SE (1) SE7609029L (enExample)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2062013B (en) * 1979-10-31 1984-07-04 Ni I Edxperimental Inst Avtomo Coating reflecting surfaces with organic layer by glow discharge
US4410418A (en) * 1982-03-30 1983-10-18 Phillips Petroleum Company Method for reducing carbon formation in a thermal cracking process
US4483132A (en) * 1983-02-14 1984-11-20 Deere & Company Cotton picker spindle
JPS60142584A (ja) * 1983-12-28 1985-07-27 川崎製鉄株式会社 プリント基板およびその製造方法
CA1240215A (en) * 1984-07-11 1988-08-09 Edwin A. Chandross Fabrication of devices with a silicon oxide region
JPS61227165A (ja) * 1985-03-29 1986-10-09 Mitsubishi Electric Corp 蒸着装置
KR870000750A (ko) * 1985-06-14 1987-02-20 이마드 마하윌리 이산화실리콘 필름을 화학적으로 증기피복하는 방법
JPS63149601A (ja) * 1986-12-15 1988-06-22 Toyota Central Res & Dev Lab Inc 防曇性光学部材
DE4021798A1 (de) * 1990-07-09 1992-02-06 Heraeus Quarzglas Infrarotstrahler mit geschuetzter reflexionsschicht und verfahren zu seiner herstellung
EP0470777A3 (en) * 1990-08-07 1993-06-02 The Boc Group, Inc. Thin gas barrier films and rapid deposition method therefor
TW289900B (enExample) * 1994-04-22 1996-11-01 Gould Electronics Inc
US5527562A (en) * 1994-10-21 1996-06-18 Aluminum Company Of America Siloxane coatings for aluminum reflectors
DE19704947A1 (de) * 1997-02-10 1998-08-13 Leybold Systems Gmbh Verfahren und Vorrichtung zur Schutzbeschichtung von Verspiegelungsschichten
ES2205565T3 (es) * 1998-11-12 2004-05-01 ALCAN TECHNOLOGY & MANAGEMENT AG Reflector con superficie resistente.
US6350397B1 (en) 1999-03-10 2002-02-26 Aspen Research Corporation Optical member with layer having a coating geometry and composition that enhance cleaning properties
US6896970B2 (en) * 2001-01-31 2005-05-24 Areway, Inc. Corrosion resistant coating giving polished effect
US6709119B2 (en) 2001-04-27 2004-03-23 Alusuisse Technology & Management Ltd. Resistant surface reflector
US9061317B2 (en) 2002-04-17 2015-06-23 Air Products And Chemicals, Inc. Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
US20080268177A1 (en) * 2002-05-17 2008-10-30 Air Products And Chemicals, Inc. Porogens, Porogenated Precursors and Methods for Using the Same to Provide Porous Organosilica Glass Films with Low Dielectric Constants
US6846515B2 (en) * 2002-04-17 2005-01-25 Air Products And Chemicals, Inc. Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants
US8293001B2 (en) * 2002-04-17 2012-10-23 Air Products And Chemicals, Inc. Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
US7384471B2 (en) * 2002-04-17 2008-06-10 Air Products And Chemicals, Inc. Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
US8951342B2 (en) 2002-04-17 2015-02-10 Air Products And Chemicals, Inc. Methods for using porogens for low k porous organosilica glass films
US6921062B2 (en) 2002-07-23 2005-07-26 Advanced Technology Materials, Inc. Vaporizer delivery ampoule
JP2007523959A (ja) * 2003-06-23 2007-08-23 チューリッヒ大学 超疎水性コーティング
US7332445B2 (en) * 2004-09-28 2008-02-19 Air Products And Chemicals, Inc. Porous low dielectric constant compositions and methods for making and using same
JP5259938B2 (ja) * 2006-08-14 2013-08-07 スタンレー電気株式会社 金属多層膜構造およびその成膜方法
US20080241805A1 (en) 2006-08-31 2008-10-02 Q-Track Corporation System and method for simulated dosimetry using a real time locating system
DE102006056578A1 (de) * 2006-11-30 2008-06-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung einer Nanostruktur an einer Kunststoffoberfläche
ES2543593T3 (es) * 2007-04-04 2015-08-20 Tetra Laval Holdings & Finance S.A. Laminado de envasado, método para fabricar el laminado de envasado y recipiente de envasado producido a partir del mismo
KR20230080495A (ko) 2012-05-31 2023-06-07 엔테그리스, 아이엔씨. 배취식 침착을 위한 고 물질 플럭스를 갖는 유체의 소스 시약-기반 수송
JP6542089B2 (ja) * 2015-09-30 2019-07-10 富士フイルム株式会社 車両用ミラー

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB706003A (en) * 1949-05-18 1954-03-24 British American Res Ltd Improvements in the coating of articles by evaporation and/or sputtering in evacuated chambers
US2748031A (en) * 1952-12-31 1956-05-29 Kafig Emanuel Reproduction of printed patterns by vacuum evaporation
US2904450A (en) * 1958-05-14 1959-09-15 Ford Motor Co Transparent coating
US3352712A (en) * 1964-08-28 1967-11-14 Rca Corp Method of stabilizing semi-conductor devices having exposed surfaces of a hydrophilic oxide
GB1229473A (enExample) * 1968-06-14 1971-04-21
CS151965B1 (enExample) * 1970-07-03 1973-12-19
US3984581A (en) * 1973-02-28 1976-10-05 Carl Zeiss-Stiftung Method for the production of anti-reflection coatings on optical elements made of transparent organic polymers
US3991234A (en) * 1974-09-30 1976-11-09 American Optical Corporation Process for coating a lens of synthetic polymer with a durable abrasion resistant vitreous composition

Also Published As

Publication number Publication date
FR2320363A1 (fr) 1977-03-04
JPS5223580A (en) 1977-02-22
GB1536720A (en) 1978-12-20
SE7609029L (sv) 1977-02-14
ES450687A1 (es) 1977-07-16
NL7608974A (nl) 1977-02-15
ATA597876A (de) 1977-12-15
US4105821A (en) 1978-08-08
AT345058B (de) 1978-08-25
DE2536013A1 (de) 1977-03-03
FR2320363B3 (enExample) 1977-07-29

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