Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SAfiledCriticalThomson CSF SA
Publication of DE2502720A1publicationCriticalpatent/DE2502720A1/de
Application grantedgrantedCritical
Publication of DE2502720C2publicationCriticalpatent/DE2502720C2/de
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
H01J37/3045—Object or beam position registration
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Electron Beam Exposure
(AREA)
DE197525027201974-01-251975-01-23Verfahren zum Eichen eines korpuskularoptischen Gerätes und korpuskularoptisches Gerät zur Durchführung des Verfahrens
ExpiredDE2502720C2
(de)
Schaltungsanordnung zur Ermittelung der Phasenlage, der Spannungsamplitude oder der Stromamplitude an beliebigen Stellen wiederholt auftretender elektrischer Meßsignale in bezug auf ein vorgegebenes Vergleichssignal