DE2364638A1 - Bauteil fuer eine vakuumanlage und verfahren zur herstellung dieses bauteils - Google Patents
Bauteil fuer eine vakuumanlage und verfahren zur herstellung dieses bauteilsInfo
- Publication number
- DE2364638A1 DE2364638A1 DE2364638A DE2364638A DE2364638A1 DE 2364638 A1 DE2364638 A1 DE 2364638A1 DE 2364638 A DE2364638 A DE 2364638A DE 2364638 A DE2364638 A DE 2364638A DE 2364638 A1 DE2364638 A1 DE 2364638A1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- component
- oxide
- hydrogen
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 42
- 229910052739 hydrogen Inorganic materials 0.000 claims description 42
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 33
- 239000010935 stainless steel Substances 0.000 claims description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 10
- 238000001179 sorption measurement Methods 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910021529 ammonia Inorganic materials 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 230000035515 penetration Effects 0.000 claims description 4
- 229920006395 saturated elastomer Polymers 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 31
- 238000009792 diffusion process Methods 0.000 description 11
- 150000002431 hydrogen Chemical class 0.000 description 10
- 150000004767 nitrides Chemical class 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 238000005260 corrosion Methods 0.000 description 9
- 230000007797 corrosion Effects 0.000 description 9
- 229910000831 Steel Inorganic materials 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 239000010959 steel Substances 0.000 description 8
- 238000007872 degassing Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 6
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- 238000005476 soldering Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 3
- 230000001464 adherent effect Effects 0.000 description 3
- 229910000423 chromium oxide Inorganic materials 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000001311 chemical methods and process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 241000159606 Netrium Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000009533 lab test Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00318139A US3833430A (en) | 1972-12-26 | 1972-12-26 | Treatment of stainless steel and similar alloys to reduce hydrogen outgassing |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2364638A1 true DE2364638A1 (de) | 1974-06-27 |
Family
ID=23236826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2364638A Pending DE2364638A1 (de) | 1972-12-26 | 1973-12-24 | Bauteil fuer eine vakuumanlage und verfahren zur herstellung dieses bauteils |
Country Status (4)
Country | Link |
---|---|
US (1) | US3833430A (enrdf_load_stackoverflow) |
JP (1) | JPS4997737A (enrdf_load_stackoverflow) |
DE (1) | DE2364638A1 (enrdf_load_stackoverflow) |
FR (1) | FR2211347B3 (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5832229B2 (ja) * | 1978-09-22 | 1983-07-12 | 日本真空技術株式会社 | 金属窒化物を被覆した真空容器及び真空機器用部品 |
DE2851584B2 (de) * | 1978-11-29 | 1980-09-04 | Fried. Krupp Gmbh, 4300 Essen | Verbundkörper |
US5789086A (en) * | 1990-03-05 | 1998-08-04 | Ohmi; Tadahiro | Stainless steel surface having passivation film |
JP4829485B2 (ja) * | 2003-06-10 | 2011-12-07 | 有限会社真空実験室 | 真空部品用材料、真空部品、真空装置、真空部品用材料の製造方法、真空部品の処理方法及び真空装置の処理方法 |
DE102004010689B3 (de) * | 2004-02-27 | 2005-06-30 | Schott Ag | Absorber mit einer strahlungsselektiven Absorberbeschichtung und Verfahren zu seiner Herstellung |
JP4457359B2 (ja) * | 2006-12-13 | 2010-04-28 | トヨタ自動車株式会社 | 圧力容器 |
JP4552159B2 (ja) * | 2008-07-09 | 2010-09-29 | トヨタ自動車株式会社 | ガスタンク及びガスタンクの製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2703298A (en) * | 1949-10-14 | 1955-03-01 | Robertshaw Fulton Controls Co | Process for annealing stainless steel |
US3741735A (en) * | 1964-01-08 | 1973-06-26 | Atomic Energy Commission | Coating molybdenum with pure gold |
US3691055A (en) * | 1968-09-27 | 1972-09-12 | Kawasaki Steel Co | Method of coating steel sheet surfaces |
US3700505A (en) * | 1971-01-11 | 1972-10-24 | Jerome J Kanter | Coating ferrous base metal articles |
-
1972
- 1972-12-26 US US00318139A patent/US3833430A/en not_active Expired - Lifetime
-
1973
- 1973-12-20 FR FR7345757A patent/FR2211347B3/fr not_active Expired
- 1973-12-24 DE DE2364638A patent/DE2364638A1/de active Pending
- 1973-12-26 JP JP49004463A patent/JPS4997737A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2211347B3 (enrdf_load_stackoverflow) | 1976-04-16 |
JPS4997737A (enrdf_load_stackoverflow) | 1974-09-17 |
US3833430A (en) | 1974-09-03 |
FR2211347A1 (enrdf_load_stackoverflow) | 1974-07-19 |
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