DE2311424A1 - Steuermechanismus fuer ein elektronenoptisches geraet - Google Patents

Steuermechanismus fuer ein elektronenoptisches geraet

Info

Publication number
DE2311424A1
DE2311424A1 DE19732311424 DE2311424A DE2311424A1 DE 2311424 A1 DE2311424 A1 DE 2311424A1 DE 19732311424 DE19732311424 DE 19732311424 DE 2311424 A DE2311424 A DE 2311424A DE 2311424 A1 DE2311424 A1 DE 2311424A1
Authority
DE
Germany
Prior art keywords
electron
digital
optical device
setting
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19732311424
Other languages
German (de)
English (en)
Inventor
Johannes Petrus Anton Smulders
Johan Cornelis Tiemeijer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE2311424A1 publication Critical patent/DE2311424A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/07—Programme control other than numerical control, i.e. in sequence controllers or logic controllers where the programme is defined in the fixed connection of electrical elements, e.g. potentiometers, counters, transistors
    • G05B19/075—Programme control other than numerical control, i.e. in sequence controllers or logic controllers where the programme is defined in the fixed connection of electrical elements, e.g. potentiometers, counters, transistors for delivering a step function, a slope or a continuous function
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electromagnetism (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19732311424 1972-03-24 1973-03-08 Steuermechanismus fuer ein elektronenoptisches geraet Pending DE2311424A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7203932A NL7203932A (xx) 1972-03-24 1972-03-24

Publications (1)

Publication Number Publication Date
DE2311424A1 true DE2311424A1 (de) 1973-10-04

Family

ID=19815686

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732311424 Pending DE2311424A1 (de) 1972-03-24 1973-03-08 Steuermechanismus fuer ein elektronenoptisches geraet

Country Status (6)

Country Link
JP (1) JPS499177A (xx)
CA (1) CA976669A (xx)
DE (1) DE2311424A1 (xx)
FR (1) FR2177861B1 (xx)
GB (1) GB1424762A (xx)
NL (1) NL7203932A (xx)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5354465A (en) * 1976-10-28 1978-05-17 Jeol Ltd Lens control circuit for electromicroscope or the like
JPS5464458A (en) * 1977-10-31 1979-05-24 Jeol Ltd Magnification selection circuit of electromicro scope
JPS5816745B2 (ja) * 1977-11-11 1983-04-01 日本電子株式会社 電子顕微鏡等のレンズ制御回路
JPS5477060A (en) * 1977-12-01 1979-06-20 Hitachi Ltd Electron microscope
JPS57145262U (xx) * 1981-03-09 1982-09-11
JP3866509B2 (ja) 2000-12-08 2007-01-10 富士工業株式会社 釣竿用リールシートと、釣竿

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1265362A (xx) * 1969-02-04 1972-03-01
US3629845A (en) * 1970-06-03 1971-12-21 Hewlett Packard Co Digital adjustment apparatus for electronic instrumentation
JPS495662A (xx) * 1972-04-11 1974-01-18

Also Published As

Publication number Publication date
CA976669A (en) 1975-10-21
GB1424762A (en) 1976-02-11
JPS499177A (xx) 1974-01-26
FR2177861A1 (xx) 1973-11-09
FR2177861B1 (xx) 1976-05-21
NL7203932A (xx) 1973-09-26

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