CA976669A - Control mechanism for an electron-optical apparatus - Google Patents

Control mechanism for an electron-optical apparatus

Info

Publication number
CA976669A
CA976669A CA166,694A CA166694A CA976669A CA 976669 A CA976669 A CA 976669A CA 166694 A CA166694 A CA 166694A CA 976669 A CA976669 A CA 976669A
Authority
CA
Canada
Prior art keywords
electron
control mechanism
optical apparatus
optical
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA166,694A
Inventor
Johan C. Tiemeijer
Johannes P.A. Smulders
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA976669A publication Critical patent/CA976669A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/07—Programme control other than numerical control, i.e. in sequence controllers or logic controllers where the programme is defined in the fixed connection of electrical elements, e.g. potentiometers, counters, transistors
    • G05B19/075—Programme control other than numerical control, i.e. in sequence controllers or logic controllers where the programme is defined in the fixed connection of electrical elements, e.g. potentiometers, counters, transistors for delivering a step function, a slope or a continuous function
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electron Sources, Ion Sources (AREA)
CA166,694A 1972-03-24 1973-03-21 Control mechanism for an electron-optical apparatus Expired CA976669A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7203932A NL7203932A (en) 1972-03-24 1972-03-24

Publications (1)

Publication Number Publication Date
CA976669A true CA976669A (en) 1975-10-21

Family

ID=19815686

Family Applications (1)

Application Number Title Priority Date Filing Date
CA166,694A Expired CA976669A (en) 1972-03-24 1973-03-21 Control mechanism for an electron-optical apparatus

Country Status (6)

Country Link
JP (1) JPS499177A (en)
CA (1) CA976669A (en)
DE (1) DE2311424A1 (en)
FR (1) FR2177861B1 (en)
GB (1) GB1424762A (en)
NL (1) NL7203932A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4206349A (en) * 1977-12-01 1980-06-03 Hitachi, Ltd. Electron microscope

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5354465A (en) * 1976-10-28 1978-05-17 Jeol Ltd Lens control circuit for electromicroscope or the like
JPS5464458A (en) * 1977-10-31 1979-05-24 Jeol Ltd Magnification selection circuit of electromicro scope
JPS5816745B2 (en) * 1977-11-11 1983-04-01 日本電子株式会社 Lens control circuit for electron microscopes, etc.
JPS57145262U (en) * 1981-03-09 1982-09-11
JP3866509B2 (en) 2000-12-08 2007-01-10 富士工業株式会社 Reel seat for fishing rod and fishing rod

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1265362A (en) * 1969-02-04 1972-03-01
US3629845A (en) * 1970-06-03 1971-12-21 Hewlett Packard Co Digital adjustment apparatus for electronic instrumentation
JPS495662A (en) * 1972-04-11 1974-01-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4206349A (en) * 1977-12-01 1980-06-03 Hitachi, Ltd. Electron microscope

Also Published As

Publication number Publication date
FR2177861B1 (en) 1976-05-21
JPS499177A (en) 1974-01-26
DE2311424A1 (en) 1973-10-04
GB1424762A (en) 1976-02-11
NL7203932A (en) 1973-09-26
FR2177861A1 (en) 1973-11-09

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