DE2209830A1 - - Google Patents
Info
- Publication number
- DE2209830A1 DE2209830A1 DE19722209830 DE2209830A DE2209830A1 DE 2209830 A1 DE2209830 A1 DE 2209830A1 DE 19722209830 DE19722209830 DE 19722209830 DE 2209830 A DE2209830 A DE 2209830A DE 2209830 A1 DE2209830 A1 DE 2209830A1
- Authority
- DE
- Germany
- Prior art keywords
- motor
- induction motor
- vessel
- workpiece carrier
- linear induction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006698 induction Effects 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000004804 winding Methods 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 6
- 238000001771 vacuum deposition Methods 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 241000446313 Lamella Species 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical group 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB574471 | 1971-03-02 | ||
| GB214672A GB1389443A (en) | 1971-03-02 | 1972-01-17 | Electric motors and apparatus for use in vacuum depostion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2209830A1 true DE2209830A1 (enrdf_load_stackoverflow) | 1972-09-21 |
Family
ID=26237307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722209830 Pending DE2209830A1 (enrdf_load_stackoverflow) | 1971-03-02 | 1972-03-01 |
Country Status (5)
| Country | Link |
|---|---|
| DE (1) | DE2209830A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2128476B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1389443A (enrdf_load_stackoverflow) |
| IT (1) | IT958687B (enrdf_load_stackoverflow) |
| NL (1) | NL7202668A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH663037A5 (de) * | 1985-02-05 | 1987-11-13 | Balzers Hochvakuum | Dampfquelle fuer vakuumbeschichtungsanlagen. |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE364935C (de) * | 1922-12-04 | Ernst Goebel | Elektromagnetisches Riem- oder Seilscheibengetriebe | |
| FR805066A (fr) * | 1935-08-02 | 1936-11-10 | Dispositif pour la production de dépôts par sublimation dans le vide | |
| FR1346420A (fr) * | 1962-11-07 | 1963-12-20 | Dispositif inducteur à champ magnétique glissant | |
| US3333124A (en) * | 1964-09-29 | 1967-07-25 | Skinner Prec Ind Inc | Induction motor |
| FR1484237A (fr) * | 1965-06-22 | 1967-06-09 | Pilkington Brothers Ltd | Perfectionnements apportés aux moteurs linéaires à induction |
| FR1599841A (enrdf_load_stackoverflow) * | 1968-11-15 | 1970-07-20 | ||
| JPS504241B1 (enrdf_load_stackoverflow) * | 1969-12-08 | 1975-02-17 |
-
1972
- 1972-01-17 GB GB214672A patent/GB1389443A/en not_active Expired
- 1972-03-01 IT IT6765172A patent/IT958687B/it active
- 1972-03-01 NL NL7202668A patent/NL7202668A/xx unknown
- 1972-03-01 DE DE19722209830 patent/DE2209830A1/de active Pending
- 1972-03-01 FR FR7207071A patent/FR2128476B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7202668A (enrdf_load_stackoverflow) | 1972-09-05 |
| FR2128476A1 (enrdf_load_stackoverflow) | 1972-10-20 |
| IT958687B (it) | 1973-10-30 |
| FR2128476B1 (enrdf_load_stackoverflow) | 1975-10-24 |
| GB1389443A (en) | 1975-04-03 |
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