IT958687B - Dispositivo di comando dello spostamento di pezzi in un apparec chio di deposizione sotto vuoto - Google Patents

Dispositivo di comando dello spostamento di pezzi in un apparec chio di deposizione sotto vuoto

Info

Publication number
IT958687B
IT958687B IT6765172A IT6765172A IT958687B IT 958687 B IT958687 B IT 958687B IT 6765172 A IT6765172 A IT 6765172A IT 6765172 A IT6765172 A IT 6765172A IT 958687 B IT958687 B IT 958687B
Authority
IT
Italy
Prior art keywords
pieces
movement
control
storage apparatus
vacuum storage
Prior art date
Application number
IT6765172A
Other languages
English (en)
Original Assignee
Dobson Christopher David
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dobson Christopher David filed Critical Dobson Christopher David
Application granted granted Critical
Publication of IT958687B publication Critical patent/IT958687B/it

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT6765172A 1971-03-02 1972-03-01 Dispositivo di comando dello spostamento di pezzi in un apparec chio di deposizione sotto vuoto IT958687B (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB574471 1971-03-02
GB214672A GB1389443A (en) 1971-03-02 1972-01-17 Electric motors and apparatus for use in vacuum depostion

Publications (1)

Publication Number Publication Date
IT958687B true IT958687B (it) 1973-10-30

Family

ID=26237307

Family Applications (1)

Application Number Title Priority Date Filing Date
IT6765172A IT958687B (it) 1971-03-02 1972-03-01 Dispositivo di comando dello spostamento di pezzi in un apparec chio di deposizione sotto vuoto

Country Status (5)

Country Link
DE (1) DE2209830A1 (it)
FR (1) FR2128476B1 (it)
GB (1) GB1389443A (it)
IT (1) IT958687B (it)
NL (1) NL7202668A (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663037A5 (de) * 1985-02-05 1987-11-13 Balzers Hochvakuum Dampfquelle fuer vakuumbeschichtungsanlagen.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE364935C (de) * 1922-12-04 Ernst Goebel Elektromagnetisches Riem- oder Seilscheibengetriebe
FR805066A (fr) * 1935-08-02 1936-11-10 Dispositif pour la production de dépôts par sublimation dans le vide
FR1346420A (fr) * 1962-11-07 1963-12-20 Dispositif inducteur à champ magnétique glissant
US3333124A (en) * 1964-09-29 1967-07-25 Skinner Prec Ind Inc Induction motor
FR1484237A (fr) * 1965-06-22 1967-06-09 Pilkington Brothers Ltd Perfectionnements apportés aux moteurs linéaires à induction
FR1599841A (it) * 1968-11-15 1970-07-20
JPS504241B1 (it) * 1969-12-08 1975-02-17

Also Published As

Publication number Publication date
NL7202668A (it) 1972-09-05
FR2128476A1 (it) 1972-10-20
FR2128476B1 (it) 1975-10-24
GB1389443A (en) 1975-04-03
DE2209830A1 (it) 1972-09-21

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