IT958687B - Dispositivo di comando dello spostamento di pezzi in un apparec chio di deposizione sotto vuoto - Google Patents
Dispositivo di comando dello spostamento di pezzi in un apparec chio di deposizione sotto vuotoInfo
- Publication number
- IT958687B IT958687B IT6765172A IT6765172A IT958687B IT 958687 B IT958687 B IT 958687B IT 6765172 A IT6765172 A IT 6765172A IT 6765172 A IT6765172 A IT 6765172A IT 958687 B IT958687 B IT 958687B
- Authority
- IT
- Italy
- Prior art keywords
- pieces
- movement
- control
- storage apparatus
- vacuum storage
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB574471 | 1971-03-02 | ||
GB214672A GB1389443A (en) | 1971-03-02 | 1972-01-17 | Electric motors and apparatus for use in vacuum depostion |
Publications (1)
Publication Number | Publication Date |
---|---|
IT958687B true IT958687B (it) | 1973-10-30 |
Family
ID=26237307
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT6765172A IT958687B (it) | 1971-03-02 | 1972-03-01 | Dispositivo di comando dello spostamento di pezzi in un apparec chio di deposizione sotto vuoto |
Country Status (5)
Country | Link |
---|---|
DE (1) | DE2209830A1 (it) |
FR (1) | FR2128476B1 (it) |
GB (1) | GB1389443A (it) |
IT (1) | IT958687B (it) |
NL (1) | NL7202668A (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH663037A5 (de) * | 1985-02-05 | 1987-11-13 | Balzers Hochvakuum | Dampfquelle fuer vakuumbeschichtungsanlagen. |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE364935C (de) * | 1922-12-04 | Ernst Goebel | Elektromagnetisches Riem- oder Seilscheibengetriebe | |
FR805066A (fr) * | 1935-08-02 | 1936-11-10 | Dispositif pour la production de dépôts par sublimation dans le vide | |
FR1346420A (fr) * | 1962-11-07 | 1963-12-20 | Dispositif inducteur à champ magnétique glissant | |
US3333124A (en) * | 1964-09-29 | 1967-07-25 | Skinner Prec Ind Inc | Induction motor |
FR1484237A (fr) * | 1965-06-22 | 1967-06-09 | Pilkington Brothers Ltd | Perfectionnements apportés aux moteurs linéaires à induction |
FR1599841A (it) * | 1968-11-15 | 1970-07-20 | ||
JPS504241B1 (it) * | 1969-12-08 | 1975-02-17 |
-
1972
- 1972-01-17 GB GB214672A patent/GB1389443A/en not_active Expired
- 1972-03-01 IT IT6765172A patent/IT958687B/it active
- 1972-03-01 DE DE19722209830 patent/DE2209830A1/de active Pending
- 1972-03-01 NL NL7202668A patent/NL7202668A/xx unknown
- 1972-03-01 FR FR7207071A patent/FR2128476B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7202668A (it) | 1972-09-05 |
FR2128476A1 (it) | 1972-10-20 |
FR2128476B1 (it) | 1975-10-24 |
GB1389443A (en) | 1975-04-03 |
DE2209830A1 (it) | 1972-09-21 |
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