FR2128476A1 - - Google Patents

Info

Publication number
FR2128476A1
FR2128476A1 FR7207071A FR7207071A FR2128476A1 FR 2128476 A1 FR2128476 A1 FR 2128476A1 FR 7207071 A FR7207071 A FR 7207071A FR 7207071 A FR7207071 A FR 7207071A FR 2128476 A1 FR2128476 A1 FR 2128476A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7207071A
Other languages
French (fr)
Other versions
FR2128476B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of FR2128476A1 publication Critical patent/FR2128476A1/fr
Application granted granted Critical
Publication of FR2128476B1 publication Critical patent/FR2128476B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7207071A 1971-03-02 1972-03-01 Expired FR2128476B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB574471 1971-03-02
GB214672A GB1389443A (en) 1971-03-02 1972-01-17 Electric motors and apparatus for use in vacuum depostion

Publications (2)

Publication Number Publication Date
FR2128476A1 true FR2128476A1 (enrdf_load_stackoverflow) 1972-10-20
FR2128476B1 FR2128476B1 (enrdf_load_stackoverflow) 1975-10-24

Family

ID=26237307

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7207071A Expired FR2128476B1 (enrdf_load_stackoverflow) 1971-03-02 1972-03-01

Country Status (5)

Country Link
DE (1) DE2209830A1 (enrdf_load_stackoverflow)
FR (1) FR2128476B1 (enrdf_load_stackoverflow)
GB (1) GB1389443A (enrdf_load_stackoverflow)
IT (1) IT958687B (enrdf_load_stackoverflow)
NL (1) NL7202668A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2576918A1 (fr) * 1985-02-05 1986-08-08 Balzers Hochvakuum Source de vapeur pour installations de revetement sous vide

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE364935C (de) * 1922-12-04 Ernst Goebel Elektromagnetisches Riem- oder Seilscheibengetriebe
FR805066A (fr) * 1935-08-02 1936-11-10 Dispositif pour la production de dépôts par sublimation dans le vide
FR1346420A (fr) * 1962-11-07 1963-12-20 Dispositif inducteur à champ magnétique glissant
FR1484237A (fr) * 1965-06-22 1967-06-09 Pilkington Brothers Ltd Perfectionnements apportés aux moteurs linéaires à induction
US3333124A (en) * 1964-09-29 1967-07-25 Skinner Prec Ind Inc Induction motor
FR1599841A (enrdf_load_stackoverflow) * 1968-11-15 1970-07-20
FR2073092A5 (enrdf_load_stackoverflow) * 1969-12-08 1971-09-24 Information Magnetics Corp

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE364935C (de) * 1922-12-04 Ernst Goebel Elektromagnetisches Riem- oder Seilscheibengetriebe
FR805066A (fr) * 1935-08-02 1936-11-10 Dispositif pour la production de dépôts par sublimation dans le vide
FR1346420A (fr) * 1962-11-07 1963-12-20 Dispositif inducteur à champ magnétique glissant
US3333124A (en) * 1964-09-29 1967-07-25 Skinner Prec Ind Inc Induction motor
FR1484237A (fr) * 1965-06-22 1967-06-09 Pilkington Brothers Ltd Perfectionnements apportés aux moteurs linéaires à induction
FR1599841A (enrdf_load_stackoverflow) * 1968-11-15 1970-07-20
FR2073092A5 (enrdf_load_stackoverflow) * 1969-12-08 1971-09-24 Information Magnetics Corp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2576918A1 (fr) * 1985-02-05 1986-08-08 Balzers Hochvakuum Source de vapeur pour installations de revetement sous vide

Also Published As

Publication number Publication date
DE2209830A1 (enrdf_load_stackoverflow) 1972-09-21
NL7202668A (enrdf_load_stackoverflow) 1972-09-05
IT958687B (it) 1973-10-30
FR2128476B1 (enrdf_load_stackoverflow) 1975-10-24
GB1389443A (en) 1975-04-03

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Legal Events

Date Code Title Description
ST Notification of lapse