GB1389443A - Electric motors and apparatus for use in vacuum depostion - Google Patents

Electric motors and apparatus for use in vacuum depostion

Info

Publication number
GB1389443A
GB1389443A GB214672A GB214672A GB1389443A GB 1389443 A GB1389443 A GB 1389443A GB 214672 A GB214672 A GB 214672A GB 214672 A GB214672 A GB 214672A GB 1389443 A GB1389443 A GB 1389443A
Authority
GB
United Kingdom
Prior art keywords
vacuum
vessel
motor
linear induction
induction motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB214672A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB214672A priority Critical patent/GB1389443A/en
Priority to DE19722209830 priority patent/DE2209830A1/de
Priority to IT6765172A priority patent/IT958687B/it
Priority to NL7202668A priority patent/NL7202668A/xx
Priority to FR7207071A priority patent/FR2128476B1/fr
Priority to JP774273A priority patent/JPS4882301A/ja
Publication of GB1389443A publication Critical patent/GB1389443A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB214672A 1971-03-02 1972-01-17 Electric motors and apparatus for use in vacuum depostion Expired GB1389443A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB214672A GB1389443A (en) 1971-03-02 1972-01-17 Electric motors and apparatus for use in vacuum depostion
DE19722209830 DE2209830A1 (enrdf_load_stackoverflow) 1971-03-02 1972-03-01
IT6765172A IT958687B (it) 1971-03-02 1972-03-01 Dispositivo di comando dello spostamento di pezzi in un apparec chio di deposizione sotto vuoto
NL7202668A NL7202668A (enrdf_load_stackoverflow) 1971-03-02 1972-03-01
FR7207071A FR2128476B1 (enrdf_load_stackoverflow) 1971-03-02 1972-03-01
JP774273A JPS4882301A (enrdf_load_stackoverflow) 1972-01-17 1973-01-17

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB574471 1971-03-02
GB214672A GB1389443A (en) 1971-03-02 1972-01-17 Electric motors and apparatus for use in vacuum depostion

Publications (1)

Publication Number Publication Date
GB1389443A true GB1389443A (en) 1975-04-03

Family

ID=26237307

Family Applications (1)

Application Number Title Priority Date Filing Date
GB214672A Expired GB1389443A (en) 1971-03-02 1972-01-17 Electric motors and apparatus for use in vacuum depostion

Country Status (5)

Country Link
DE (1) DE2209830A1 (enrdf_load_stackoverflow)
FR (1) FR2128476B1 (enrdf_load_stackoverflow)
GB (1) GB1389443A (enrdf_load_stackoverflow)
IT (1) IT958687B (enrdf_load_stackoverflow)
NL (1) NL7202668A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663037A5 (de) * 1985-02-05 1987-11-13 Balzers Hochvakuum Dampfquelle fuer vakuumbeschichtungsanlagen.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE364935C (de) * 1922-12-04 Ernst Goebel Elektromagnetisches Riem- oder Seilscheibengetriebe
FR805066A (fr) * 1935-08-02 1936-11-10 Dispositif pour la production de dépôts par sublimation dans le vide
FR1346420A (fr) * 1962-11-07 1963-12-20 Dispositif inducteur à champ magnétique glissant
US3333124A (en) * 1964-09-29 1967-07-25 Skinner Prec Ind Inc Induction motor
FR1484237A (fr) * 1965-06-22 1967-06-09 Pilkington Brothers Ltd Perfectionnements apportés aux moteurs linéaires à induction
FR1599841A (enrdf_load_stackoverflow) * 1968-11-15 1970-07-20
JPS504241B1 (enrdf_load_stackoverflow) * 1969-12-08 1975-02-17

Also Published As

Publication number Publication date
DE2209830A1 (enrdf_load_stackoverflow) 1972-09-21
NL7202668A (enrdf_load_stackoverflow) 1972-09-05
FR2128476A1 (enrdf_load_stackoverflow) 1972-10-20
IT958687B (it) 1973-10-30
FR2128476B1 (enrdf_load_stackoverflow) 1975-10-24

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees