NL7202668A - - Google Patents

Info

Publication number
NL7202668A
NL7202668A NL7202668A NL7202668A NL7202668A NL 7202668 A NL7202668 A NL 7202668A NL 7202668 A NL7202668 A NL 7202668A NL 7202668 A NL7202668 A NL 7202668A NL 7202668 A NL7202668 A NL 7202668A
Authority
NL
Netherlands
Application number
NL7202668A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7202668A publication Critical patent/NL7202668A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL7202668A 1971-03-02 1972-03-01 NL7202668A (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB574471 1971-03-02
GB214672A GB1389443A (en) 1971-03-02 1972-01-17 Electric motors and apparatus for use in vacuum depostion

Publications (1)

Publication Number Publication Date
NL7202668A true NL7202668A (enrdf_load_stackoverflow) 1972-09-05

Family

ID=26237307

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7202668A NL7202668A (enrdf_load_stackoverflow) 1971-03-02 1972-03-01

Country Status (5)

Country Link
DE (1) DE2209830A1 (enrdf_load_stackoverflow)
FR (1) FR2128476B1 (enrdf_load_stackoverflow)
GB (1) GB1389443A (enrdf_load_stackoverflow)
IT (1) IT958687B (enrdf_load_stackoverflow)
NL (1) NL7202668A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663037A5 (de) * 1985-02-05 1987-11-13 Balzers Hochvakuum Dampfquelle fuer vakuumbeschichtungsanlagen.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE364935C (de) * 1922-12-04 Ernst Goebel Elektromagnetisches Riem- oder Seilscheibengetriebe
FR805066A (fr) * 1935-08-02 1936-11-10 Dispositif pour la production de dépôts par sublimation dans le vide
FR1346420A (fr) * 1962-11-07 1963-12-20 Dispositif inducteur à champ magnétique glissant
US3333124A (en) * 1964-09-29 1967-07-25 Skinner Prec Ind Inc Induction motor
FR1484237A (fr) * 1965-06-22 1967-06-09 Pilkington Brothers Ltd Perfectionnements apportés aux moteurs linéaires à induction
FR1599841A (enrdf_load_stackoverflow) * 1968-11-15 1970-07-20
JPS504241B1 (enrdf_load_stackoverflow) * 1969-12-08 1975-02-17

Also Published As

Publication number Publication date
DE2209830A1 (enrdf_load_stackoverflow) 1972-09-21
FR2128476A1 (enrdf_load_stackoverflow) 1972-10-20
IT958687B (it) 1973-10-30
FR2128476B1 (enrdf_load_stackoverflow) 1975-10-24
GB1389443A (en) 1975-04-03

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