DE2151167C3 - Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis - Google Patents
Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-NachweisInfo
- Publication number
- DE2151167C3 DE2151167C3 DE2151167A DE2151167A DE2151167C3 DE 2151167 C3 DE2151167 C3 DE 2151167C3 DE 2151167 A DE2151167 A DE 2151167A DE 2151167 A DE2151167 A DE 2151167A DE 2151167 C3 DE2151167 C3 DE 2151167C3
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- electrode
- anode
- test sample
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 71
- 238000001514 detection method Methods 0.000 title claims description 5
- 238000012360 testing method Methods 0.000 claims description 40
- 230000005684 electric field Effects 0.000 claims description 4
- 230000004075 alteration Effects 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 42
- 238000005259 measurement Methods 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 229910052729 chemical element Inorganic materials 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000004452 microanalysis Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012549 training Methods 0.000 description 2
- 235000001674 Agaricus brunnescens Nutrition 0.000 description 1
- 238000000441 X-ray spectroscopy Methods 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 235000013601 eggs Nutrition 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000000050 ionisation spectroscopy Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2151167A DE2151167C3 (de) | 1971-10-14 | 1971-10-14 | Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis |
| CH1441672A CH547530A (de) | 1971-10-14 | 1972-10-03 | Elektronenstrahl-mikroanalysator mit auger-elektronennachweis. |
| US00297017A US3760180A (en) | 1971-10-14 | 1972-10-12 | Electron-beam micro-analyzer with an auger electron detector |
| GB4720672A GB1389119A (en) | 1971-10-14 | 1972-10-12 | Electron-beam microanalyser apparatus |
| FR7236341A FR2157476A5 (show.php) | 1971-10-14 | 1972-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2151167A DE2151167C3 (de) | 1971-10-14 | 1971-10-14 | Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2151167A1 DE2151167A1 (de) | 1973-05-10 |
| DE2151167B2 DE2151167B2 (de) | 1973-10-11 |
| DE2151167C3 true DE2151167C3 (de) | 1974-05-09 |
Family
ID=5822311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2151167A Expired DE2151167C3 (de) | 1971-10-14 | 1971-10-14 | Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3760180A (show.php) |
| CH (1) | CH547530A (show.php) |
| DE (1) | DE2151167C3 (show.php) |
| FR (1) | FR2157476A5 (show.php) |
| GB (1) | GB1389119A (show.php) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3921078A (en) * | 1971-04-20 | 1975-11-18 | Jeol Ltd | Breakdown protection for field emission electron gun |
| US3965351A (en) * | 1974-10-30 | 1976-06-22 | The United States Of America As Represented By The United States Energy Research And Development Administration | Differential auger spectrometry |
| DE2751277C2 (de) * | 1977-11-16 | 1980-01-03 | Bosch-Siemens Hausgeraete Gmbh, 7000 Stuttgart | Schaltungsanordnung zum Steuern einer Wäschetrockner-Programmschalteinrichtung |
| FR2410271A1 (fr) * | 1977-11-29 | 1979-06-22 | Anvar | Perfectionnements aux procedes de micro-analyse faisant intervenir un rayonnement x |
| GB1596105A (en) * | 1978-02-20 | 1981-08-19 | Nat Res Dev | Electrostatic engergy analysis |
| US4179604A (en) * | 1978-09-29 | 1979-12-18 | The United States Of America As Represented By The Secretary Of The Navy | Electron collector for forming low-loss electron images |
| DE2842527C3 (de) * | 1978-09-29 | 1981-12-17 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen | Elektrostatische Emissionslinse |
| DE2922325A1 (de) * | 1979-06-01 | 1980-12-11 | Philips Patentverwaltung | Rasterelektronenmikroskop |
| KR850001390B1 (ko) * | 1980-07-31 | 1985-09-24 | 니혼 덴시 가부시끼 가이샤 | 2차 전자 검출장치 |
| DE3138929A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Verbessertes sekundaerelektronen-spektrometer fuer die potentialmessung an einer probe mit einer elektronensonde |
| JPS5932145A (ja) * | 1982-08-16 | 1984-02-21 | Hitachi Ltd | 電位検出装置 |
| GB8327737D0 (en) * | 1983-10-17 | 1983-11-16 | Texas Instruments Ltd | Electron detector |
| JPH0766772B2 (ja) * | 1983-11-30 | 1995-07-19 | 株式会社日立製作所 | 多段加速方式電界放射形電子顕微鏡 |
| US4713543A (en) * | 1984-08-13 | 1987-12-15 | Siemens Aktiengesellschaft | Scanning particle microscope |
| EP0189498B1 (en) * | 1985-01-29 | 1989-05-03 | International Business Machines Corporation | Field-emission scanning auger electron microscope |
| US4680468A (en) * | 1985-08-05 | 1987-07-14 | Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee | Particle detector |
| GB2215907B (en) * | 1987-07-14 | 1992-04-15 | Jeol Ltd | Apparatus using a charged-particle beam |
| JP3101539B2 (ja) * | 1994-06-24 | 2000-10-23 | インターナショナル・ビジネス・マシーンズ・コーポレ−ション | 電子線ナノメトロジー・システム |
| FR2837931B1 (fr) * | 2002-03-29 | 2004-12-10 | Cameca | Dispositif de mesure de l'emission de rayons x produite par un objet soumis a un faisceau d'electrons |
| US8283631B2 (en) * | 2008-05-08 | 2012-10-09 | Kla-Tencor Corporation | In-situ differential spectroscopy |
| US20110294071A1 (en) * | 2010-05-28 | 2011-12-01 | Canon Kabushiki Kaisha | Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus |
| WO2017126089A1 (ja) * | 2016-01-21 | 2017-07-27 | 公益財団法人高輝度光科学研究センター | 阻止電位型エネルギー分析器 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3191028A (en) * | 1963-04-22 | 1965-06-22 | Albert V Crewe | Scanning electron microscope |
| US3461306A (en) * | 1967-04-27 | 1969-08-12 | Gen Electric | Electron probe microanalyzer for measuring the differential energy response of auger electrons |
| US3582649A (en) * | 1968-10-21 | 1971-06-01 | Varian Associates | Retarding field electron diffraction spectrometer having improved resolution |
| US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
-
1971
- 1971-10-14 DE DE2151167A patent/DE2151167C3/de not_active Expired
-
1972
- 1972-10-03 CH CH1441672A patent/CH547530A/xx not_active IP Right Cessation
- 1972-10-12 GB GB4720672A patent/GB1389119A/en not_active Expired
- 1972-10-12 US US00297017A patent/US3760180A/en not_active Expired - Lifetime
- 1972-10-13 FR FR7236341A patent/FR2157476A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2151167A1 (de) | 1973-05-10 |
| DE2151167B2 (de) | 1973-10-11 |
| US3760180A (en) | 1973-09-18 |
| CH547530A (de) | 1974-03-29 |
| GB1389119A (en) | 1975-04-03 |
| FR2157476A5 (show.php) | 1973-06-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| E77 | Valid patent as to the heymanns-index 1977 | ||
| EHJ | Ceased/non-payment of the annual fee |