DE2136919A1 - Wäßrige Losung zum Atzen von Kupfer - Google Patents

Wäßrige Losung zum Atzen von Kupfer

Info

Publication number
DE2136919A1
DE2136919A1 DE19712136919 DE2136919A DE2136919A1 DE 2136919 A1 DE2136919 A1 DE 2136919A1 DE 19712136919 DE19712136919 DE 19712136919 DE 2136919 A DE2136919 A DE 2136919A DE 2136919 A1 DE2136919 A1 DE 2136919A1
Authority
DE
Germany
Prior art keywords
copper
etching
ions
solution
solution according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712136919
Other languages
German (de)
English (en)
Inventor
Charles Raymond Gulla Michael Newton Dutkewych Oleh Borys Medfield Mass Shipley (VStA)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Publication of DE2136919A1 publication Critical patent/DE2136919A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
DE19712136919 1970-07-24 1971-07-23 Wäßrige Losung zum Atzen von Kupfer Pending DE2136919A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5820070A 1970-07-24 1970-07-24
US5817070A 1970-07-24 1970-07-24
US5816070A 1970-07-24 1970-07-24

Publications (1)

Publication Number Publication Date
DE2136919A1 true DE2136919A1 (de) 1972-02-03

Family

ID=27369405

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712136919 Pending DE2136919A1 (de) 1970-07-24 1971-07-23 Wäßrige Losung zum Atzen von Kupfer

Country Status (4)

Country Link
JP (1) JPS5515512B1 (ja)
DE (1) DE2136919A1 (ja)
FR (1) FR2101897A5 (ja)
GB (1) GB1294804A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5328561A (en) * 1992-07-10 1994-07-12 Macdermid Incorporated Microetchant for copper surfaces and processes for using same
DE4339320A1 (de) * 1993-11-18 1995-05-24 Elochem Aetztechnik Gmbh Verfahren zum beschleunigten Ätzen und Abscheiden von Metallen in ammoniakalischen Ätzanlagen
CN1090686C (zh) * 1995-08-01 2002-09-11 美克株式会社 铜及铜合金的微蚀刻剂

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1221896A (en) * 1983-06-06 1987-05-19 Norvell J. Nelson Aqueous process for etching copper and other metals
GB2192136B (en) * 1986-07-04 1991-01-02 Virotherm Lab Ltd Medical breathing apparatus
AT395177B (de) * 1990-07-05 1992-10-12 Provera Gmbh Aetzloesung
JP5874308B2 (ja) * 2011-10-21 2016-03-02 三菱瓦斯化学株式会社 銅及びモリブデンを含む多層膜用エッチング液

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5328561A (en) * 1992-07-10 1994-07-12 Macdermid Incorporated Microetchant for copper surfaces and processes for using same
DE4339320A1 (de) * 1993-11-18 1995-05-24 Elochem Aetztechnik Gmbh Verfahren zum beschleunigten Ätzen und Abscheiden von Metallen in ammoniakalischen Ätzanlagen
CN1090686C (zh) * 1995-08-01 2002-09-11 美克株式会社 铜及铜合金的微蚀刻剂

Also Published As

Publication number Publication date
GB1294804A (en) 1972-11-01
JPS5515512B1 (ja) 1980-04-24
FR2101897A5 (ja) 1972-03-31

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