FR2101897A5 - - Google Patents

Info

Publication number
FR2101897A5
FR2101897A5 FR7127142A FR7127142A FR2101897A5 FR 2101897 A5 FR2101897 A5 FR 2101897A5 FR 7127142 A FR7127142 A FR 7127142A FR 7127142 A FR7127142 A FR 7127142A FR 2101897 A5 FR2101897 A5 FR 2101897A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7127142A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Application granted granted Critical
Publication of FR2101897A5 publication Critical patent/FR2101897A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
FR7127142A 1970-07-24 1971-07-23 Expired FR2101897A5 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5820070A 1970-07-24 1970-07-24
US5816070A 1970-07-24 1970-07-24
US5817070A 1970-07-24 1970-07-24

Publications (1)

Publication Number Publication Date
FR2101897A5 true FR2101897A5 (fr) 1972-03-31

Family

ID=27369405

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7127142A Expired FR2101897A5 (fr) 1970-07-24 1971-07-23

Country Status (4)

Country Link
JP (1) JPS5515512B1 (fr)
DE (1) DE2136919A1 (fr)
FR (1) FR2101897A5 (fr)
GB (1) GB1294804A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992001086A1 (fr) * 1990-07-05 1992-01-23 Elo-Chem Ätztechnik Gmbh Solution de gravure

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1221896A (fr) * 1983-06-06 1987-05-19 Norvell J. Nelson Gravure par voie aqueuse sur cuivre et autres metaux
GB2192136B (en) * 1986-07-04 1991-01-02 Virotherm Lab Ltd Medical breathing apparatus
US5328561A (en) * 1992-07-10 1994-07-12 Macdermid Incorporated Microetchant for copper surfaces and processes for using same
DE4339320A1 (de) * 1993-11-18 1995-05-24 Elochem Aetztechnik Gmbh Verfahren zum beschleunigten Ätzen und Abscheiden von Metallen in ammoniakalischen Ätzanlagen
JP2923524B2 (ja) * 1995-08-01 1999-07-26 メック株式会社 銅および銅合金のマイクロエッチング剤並びにマイクロエッチング方法
JP5874308B2 (ja) * 2011-10-21 2016-03-02 三菱瓦斯化学株式会社 銅及びモリブデンを含む多層膜用エッチング液

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992001086A1 (fr) * 1990-07-05 1992-01-23 Elo-Chem Ätztechnik Gmbh Solution de gravure

Also Published As

Publication number Publication date
DE2136919A1 (de) 1972-02-03
JPS5515512B1 (fr) 1980-04-24
GB1294804A (en) 1972-11-01

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Legal Events

Date Code Title Description
ST Notification of lapse