JPS5515512B1 - - Google Patents
Info
- Publication number
- JPS5515512B1 JPS5515512B1 JP5559171A JP5559171A JPS5515512B1 JP S5515512 B1 JPS5515512 B1 JP S5515512B1 JP 5559171 A JP5559171 A JP 5559171A JP 5559171 A JP5559171 A JP 5559171A JP S5515512 B1 JPS5515512 B1 JP S5515512B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US5820070A | 1970-07-24 | 1970-07-24 | |
| US5816070A | 1970-07-24 | 1970-07-24 | |
| US5817070A | 1970-07-24 | 1970-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5515512B1 true JPS5515512B1 (ja) | 1980-04-24 |
Family
ID=27369405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5559171A Pending JPS5515512B1 (ja) | 1970-07-24 | 1971-07-24 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5515512B1 (ja) |
| DE (1) | DE2136919A1 (ja) |
| FR (1) | FR2101897A5 (ja) |
| GB (1) | GB1294804A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013087353A (ja) * | 2011-10-21 | 2013-05-13 | Mitsubishi Gas Chemical Co Inc | 銅及びモリブデンを含む多層膜用エッチング液 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1221896A (en) * | 1983-06-06 | 1987-05-19 | Norvell J. Nelson | Aqueous process for etching copper and other metals |
| GB2192136B (en) * | 1986-07-04 | 1991-01-02 | Virotherm Lab Ltd | Medical breathing apparatus |
| AT395177B (de) * | 1990-07-05 | 1992-10-12 | Provera Gmbh | Aetzloesung |
| US5328561A (en) * | 1992-07-10 | 1994-07-12 | Macdermid Incorporated | Microetchant for copper surfaces and processes for using same |
| DE4339320A1 (de) * | 1993-11-18 | 1995-05-24 | Elochem Aetztechnik Gmbh | Verfahren zum beschleunigten Ätzen und Abscheiden von Metallen in ammoniakalischen Ätzanlagen |
| JP2923524B2 (ja) * | 1995-08-01 | 1999-07-26 | メック株式会社 | 銅および銅合金のマイクロエッチング剤並びにマイクロエッチング方法 |
-
1971
- 1971-07-20 GB GB3391771A patent/GB1294804A/en not_active Expired
- 1971-07-23 DE DE19712136919 patent/DE2136919A1/de active Pending
- 1971-07-23 FR FR7127142A patent/FR2101897A5/fr not_active Expired
- 1971-07-24 JP JP5559171A patent/JPS5515512B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013087353A (ja) * | 2011-10-21 | 2013-05-13 | Mitsubishi Gas Chemical Co Inc | 銅及びモリブデンを含む多層膜用エッチング液 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2101897A5 (ja) | 1972-03-31 |
| DE2136919A1 (de) | 1972-02-03 |
| GB1294804A (en) | 1972-11-01 |