DE2132034A1 - Verfahren zur Herstellung von Zwischenverbindungen fuer elektrische Baueinheiten auf Festkoerpern - Google Patents

Verfahren zur Herstellung von Zwischenverbindungen fuer elektrische Baueinheiten auf Festkoerpern

Info

Publication number
DE2132034A1
DE2132034A1 DE19712132034 DE2132034A DE2132034A1 DE 2132034 A1 DE2132034 A1 DE 2132034A1 DE 19712132034 DE19712132034 DE 19712132034 DE 2132034 A DE2132034 A DE 2132034A DE 2132034 A1 DE2132034 A1 DE 2132034A1
Authority
DE
Germany
Prior art keywords
layer
conductive pattern
conductive
pattern
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712132034
Other languages
German (de)
English (en)
Inventor
Dyke Wilde Peter Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of DE2132034A1 publication Critical patent/DE2132034A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/069—Manufacture or treatment of conductive parts of the interconnections by forming self-aligned vias or self-aligned contact plugs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE19712132034 1970-06-29 1971-06-28 Verfahren zur Herstellung von Zwischenverbindungen fuer elektrische Baueinheiten auf Festkoerpern Pending DE2132034A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US050779A US3865624A (en) 1970-06-29 1970-06-29 Interconnection of electrical devices

Publications (1)

Publication Number Publication Date
DE2132034A1 true DE2132034A1 (de) 1972-01-05

Family

ID=21967376

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712132034 Pending DE2132034A1 (de) 1970-06-29 1971-06-28 Verfahren zur Herstellung von Zwischenverbindungen fuer elektrische Baueinheiten auf Festkoerpern

Country Status (8)

Country Link
US (1) US3865624A (https=)
BE (1) BE769050A (https=)
CA (1) CA922426A (https=)
DE (1) DE2132034A1 (https=)
FR (1) FR2096565B1 (https=)
GB (1) GB1347410A (https=)
NL (1) NL7108657A (https=)
SE (1) SE364396B (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL166156C (nl) * 1971-05-22 1981-06-15 Philips Nv Halfgeleiderinrichting bevattende ten minste een op een halfgeleidersubstraatlichaam aangebrachte halfge- leiderlaag met ten minste een isolatiezone, welke een in de halfgeleiderlaag verzonken isolatielaag uit door plaatselijke thermische oxydatie van het half- geleidermateriaal van de halfgeleiderlaag gevormd isolerend materiaal bevat en een werkwijze voor het vervaardigen daarvan.
JPS59220952A (ja) * 1983-05-31 1984-12-12 Toshiba Corp 半導体装置の製造方法
US4400867A (en) * 1982-04-26 1983-08-30 Bell Telephone Laboratories, Incorporated High conductivity metallization for semiconductor integrated circuits
JPH06314687A (ja) * 1993-04-30 1994-11-08 Sony Corp 多層配線構造の半導体装置およびその製造方法
US5736457A (en) * 1994-12-09 1998-04-07 Sematech Method of making a damascene metallization
US8361856B2 (en) 2010-11-01 2013-01-29 Micron Technology, Inc. Memory cells, arrays of memory cells, and methods of forming memory cells
US8329567B2 (en) 2010-11-03 2012-12-11 Micron Technology, Inc. Methods of forming doped regions in semiconductor substrates
US8431458B2 (en) 2010-12-27 2013-04-30 Micron Technology, Inc. Methods of forming a nonvolatile memory cell and methods of forming an array of nonvolatile memory cells
US8450175B2 (en) 2011-02-22 2013-05-28 Micron Technology, Inc. Methods of forming a vertical transistor and at least a conductive line electrically coupled therewith
US8569831B2 (en) 2011-05-27 2013-10-29 Micron Technology, Inc. Integrated circuit arrays and semiconductor constructions
US9036391B2 (en) 2012-03-06 2015-05-19 Micron Technology, Inc. Arrays of vertically-oriented transistors, memory arrays including vertically-oriented transistors, and memory cells
US9006060B2 (en) 2012-08-21 2015-04-14 Micron Technology, Inc. N-type field effect transistors, arrays comprising N-type vertically-oriented transistors, methods of forming an N-type field effect transistor, and methods of forming an array comprising vertically-oriented N-type transistors
US9129896B2 (en) 2012-08-21 2015-09-08 Micron Technology, Inc. Arrays comprising vertically-oriented transistors, integrated circuitry comprising a conductive line buried in silicon-comprising semiconductor material, methods of forming a plurality of conductive lines buried in silicon-comprising semiconductor material, and methods of forming an array comprising vertically-oriented transistors
US9478550B2 (en) 2012-08-27 2016-10-25 Micron Technology, Inc. Arrays of vertically-oriented transistors, and memory arrays including vertically-oriented transistors
US9111853B2 (en) 2013-03-15 2015-08-18 Micron Technology, Inc. Methods of forming doped elements of semiconductor device structures
US11259402B1 (en) 2020-09-08 2022-02-22 United States Of America As Represented By The Secretary Of The Air Force Fabrication of electrical and/or optical crossover signal lines through direct write deposition techniques

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3386894A (en) * 1964-09-28 1968-06-04 Northern Electric Co Formation of metallic contacts
US3436611A (en) * 1965-01-25 1969-04-01 Texas Instruments Inc Insulation structure for crossover leads in integrated circuitry
US3442701A (en) * 1965-05-19 1969-05-06 Bell Telephone Labor Inc Method of fabricating semiconductor contacts
DE1564705A1 (de) * 1966-09-12 1970-05-14 Siemens Ag Halbleiteranordnung mit mindestens einem in Emitterschaltung betriebenen Transistor
US3988214A (en) * 1968-06-17 1976-10-26 Nippon Electric Company, Ltd. Method of fabricating a semiconductor device

Also Published As

Publication number Publication date
BE769050A (fr) 1971-11-03
FR2096565B1 (https=) 1974-05-31
SE364396B (https=) 1974-02-18
GB1347410A (en) 1974-02-27
US3865624A (en) 1975-02-11
CA922426A (en) 1973-03-06
NL7108657A (https=) 1971-12-31
FR2096565A1 (https=) 1972-02-18

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