DE69222390T2 - Herstellungsverfahren eines selbstjustierenden Kontakts - Google Patents
Herstellungsverfahren eines selbstjustierenden KontaktsInfo
- Publication number
- DE69222390T2 DE69222390T2 DE69222390T DE69222390T DE69222390T2 DE 69222390 T2 DE69222390 T2 DE 69222390T2 DE 69222390 T DE69222390 T DE 69222390T DE 69222390 T DE69222390 T DE 69222390T DE 69222390 T2 DE69222390 T2 DE 69222390T2
- Authority
- DE
- Germany
- Prior art keywords
- self
- manufacturing process
- adjusting contact
- adjusting
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US78601991A | 1991-10-13 | 1991-10-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69222390D1 DE69222390D1 (de) | 1997-10-30 |
DE69222390T2 true DE69222390T2 (de) | 1998-03-19 |
Family
ID=25137358
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69222390T Expired - Fee Related DE69222390T2 (de) | 1991-10-31 | 1992-10-26 | Herstellungsverfahren eines selbstjustierenden Kontakts |
Country Status (4)
Country | Link |
---|---|
US (2) | US5369303A (de) |
EP (1) | EP0540276B1 (de) |
JP (1) | JPH05283359A (de) |
DE (1) | DE69222390T2 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5880022A (en) * | 1991-12-30 | 1999-03-09 | Lucent Technologies Inc. | Self-aligned contact window |
JP2925416B2 (ja) * | 1992-11-09 | 1999-07-28 | 株式会社東芝 | 半導体集積回路装置の製造方法 |
US5783483A (en) * | 1993-02-24 | 1998-07-21 | Intel Corporation | Method of fabricating a barrier against metal diffusion |
KR970010685B1 (ko) * | 1993-10-30 | 1997-06-30 | 삼성전자 주식회사 | 누설전류가 감소된 박막 트랜지스터 및 그 제조방법 |
KR0141950B1 (ko) * | 1994-12-22 | 1998-06-01 | 문정환 | 반도체소자의 제조방법 |
US5654570A (en) * | 1995-04-19 | 1997-08-05 | International Business Machines Corporation | CMOS gate stack |
US5960318A (en) * | 1995-10-27 | 1999-09-28 | Siemens Aktiengesellschaft | Borderless contact etch process with sidewall spacer and selective isotropic etch process |
US5773341A (en) | 1996-01-18 | 1998-06-30 | Micron Technology, Inc. | Method of making capacitor and conductive line constructions |
US5861340A (en) * | 1996-02-15 | 1999-01-19 | Intel Corporation | Method of forming a polycide film |
US5808362A (en) * | 1996-02-29 | 1998-09-15 | Motorola, Inc. | Interconnect structure and method of forming |
JP3795634B2 (ja) | 1996-06-19 | 2006-07-12 | 株式会社東芝 | 半導体装置の製造方法 |
TW409361B (en) * | 1999-05-13 | 2000-10-21 | Mosel Vitelic Inc | Self-aligned contact process |
US6461743B1 (en) | 2000-08-17 | 2002-10-08 | Louisiana-Pacific Corp. | Smooth-sided integral composite engineered panels and methods for producing same |
US6940134B2 (en) * | 2002-07-02 | 2005-09-06 | International Business Machines Corporation | Semiconductor with contact contacting diffusion adjacent gate electrode |
US20060058854A1 (en) * | 2004-09-14 | 2006-03-16 | Scimed Life Systems, Inc. | Method for stimulating neural tissue in response to a sensed physiological event |
US7642152B2 (en) * | 2005-09-07 | 2010-01-05 | United Microelectronics Corp. | Method of fabricating spacers and cleaning method of post-etching and semiconductor device |
DE102009047891B4 (de) * | 2009-09-30 | 2012-02-23 | GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG | Verfahren zur Herstellung eines Transistors mit verbesserten Füllbedingungen in einem Austauschgateverfahren durch Eckenverrundung vor dem vollständigen Entfernen eines Platzhaltermaterials |
KR102167625B1 (ko) * | 2013-10-24 | 2020-10-19 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
US9548366B1 (en) * | 2016-04-04 | 2017-01-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Self aligned contact scheme |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4743564A (en) * | 1984-12-28 | 1988-05-10 | Kabushiki Kaisha Toshiba | Method for manufacturing a complementary MOS type semiconductor device |
US4826781A (en) * | 1986-03-04 | 1989-05-02 | Seiko Epson Corporation | Semiconductor device and method of preparation |
US4855798A (en) * | 1986-12-19 | 1989-08-08 | Texas Instruments Incorporated | Semiconductor and process of fabrication thereof |
KR920007787B1 (ko) * | 1987-06-09 | 1992-09-17 | 세이꼬 엡슨 가부시끼가이샤 | 반도체 장치 및 그 제조방법 |
US4786609A (en) * | 1987-10-05 | 1988-11-22 | North American Philips Corporation, Signetics Division | Method of fabricating field-effect transistor utilizing improved gate sidewall spacers |
US4922311A (en) * | 1987-12-04 | 1990-05-01 | American Telephone And Telegraph Company | Folded extended window field effect transistor |
JPH0783066B2 (ja) * | 1989-08-11 | 1995-09-06 | 株式会社東芝 | 半導体装置の製造方法 |
US5043790A (en) * | 1990-04-05 | 1991-08-27 | Ramtron Corporation | Sealed self aligned contacts using two nitrides process |
-
1992
- 1992-10-26 EP EP92309796A patent/EP0540276B1/de not_active Expired - Lifetime
- 1992-10-26 DE DE69222390T patent/DE69222390T2/de not_active Expired - Fee Related
- 1992-11-02 JP JP4293603A patent/JPH05283359A/ja active Pending
-
1993
- 1993-09-02 US US08/116,050 patent/US5369303A/en not_active Expired - Lifetime
-
1994
- 1994-08-19 US US08/293,140 patent/US5500382A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0540276A2 (de) | 1993-05-05 |
DE69222390D1 (de) | 1997-10-30 |
JPH05283359A (ja) | 1993-10-29 |
EP0540276A3 (de) | 1994-02-23 |
EP0540276B1 (de) | 1997-09-24 |
US5500382A (en) | 1996-03-19 |
US5369303A (en) | 1994-11-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |