DE2127473A1 - Verfahren zur Herstellung von Whiskers - Google Patents
Verfahren zur Herstellung von WhiskersInfo
- Publication number
- DE2127473A1 DE2127473A1 DE19712127473 DE2127473A DE2127473A1 DE 2127473 A1 DE2127473 A1 DE 2127473A1 DE 19712127473 DE19712127473 DE 19712127473 DE 2127473 A DE2127473 A DE 2127473A DE 2127473 A1 DE2127473 A1 DE 2127473A1
- Authority
- DE
- Germany
- Prior art keywords
- silicon
- whiskers
- halogen
- heated
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000000460 chlorine Substances 0.000 claims description 6
- 229910052736 halogen Inorganic materials 0.000 claims description 6
- 150000002367 halogens Chemical class 0.000 claims description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical class [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 4
- 229910052801 chlorine Inorganic materials 0.000 claims description 4
- 239000003245 coal Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 229910001570 bauxite Inorganic materials 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/005—Growth of whiskers or needles
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/12—Substrate holders or susceptors
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH842470A CH526336A (de) | 1970-06-05 | 1970-06-05 | Verfahren zur Herstellung von Whiskers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2127473A1 true DE2127473A1 (de) | 1971-12-09 |
Family
ID=4340121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712127473 Pending DE2127473A1 (de) | 1970-06-05 | 1971-06-03 | Verfahren zur Herstellung von Whiskers |
Country Status (11)
| Country | Link |
|---|---|
| AT (1) | AT318542B (cs) |
| BE (1) | BE767711A (cs) |
| BR (1) | BR7102227D0 (cs) |
| CH (1) | CH526336A (cs) |
| DE (1) | DE2127473A1 (cs) |
| ES (1) | ES389468A1 (cs) |
| FR (1) | FR2097792A5 (cs) |
| GB (1) | GB1284688A (cs) |
| NL (1) | NL7107194A (cs) |
| SE (1) | SE376896B (cs) |
| SU (1) | SU401042A3 (cs) |
-
1970
- 1970-06-05 CH CH842470A patent/CH526336A/de not_active IP Right Cessation
-
1971
- 1971-03-11 AT AT209971A patent/AT318542B/de not_active IP Right Cessation
- 1971-03-23 ES ES389468A patent/ES389468A1/es not_active Expired
- 1971-04-15 BR BR222771A patent/BR7102227D0/pt unknown
- 1971-04-22 GB GB5953770A patent/GB1284688A/en not_active Expired
- 1971-05-19 SU SU1661466A patent/SU401042A3/ru active
- 1971-05-21 FR FR7118485A patent/FR2097792A5/fr not_active Expired
- 1971-05-25 NL NL7107194A patent/NL7107194A/xx unknown
- 1971-05-26 BE BE767711A patent/BE767711A/xx unknown
- 1971-06-03 DE DE19712127473 patent/DE2127473A1/de active Pending
- 1971-06-04 SE SE729471A patent/SE376896B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| ES389468A1 (es) | 1973-06-01 |
| BR7102227D0 (pt) | 1973-04-10 |
| SU401042A3 (cs) | 1973-10-01 |
| GB1284688A (en) | 1972-08-09 |
| SE376896B (cs) | 1975-06-16 |
| AT318542B (de) | 1974-10-25 |
| BE767711A (fr) | 1971-11-26 |
| CH526336A (de) | 1972-08-15 |
| NL7107194A (cs) | 1971-12-07 |
| FR2097792A5 (cs) | 1972-03-03 |
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