DE2114711A1 - Maschine zum Überprüfen und Korrigieren von Elementen hybrider integrierter Schaltungen - Google Patents
Maschine zum Überprüfen und Korrigieren von Elementen hybrider integrierter SchaltungenInfo
- Publication number
- DE2114711A1 DE2114711A1 DE19712114711 DE2114711A DE2114711A1 DE 2114711 A1 DE2114711 A1 DE 2114711A1 DE 19712114711 DE19712114711 DE 19712114711 DE 2114711 A DE2114711 A DE 2114711A DE 2114711 A1 DE2114711 A1 DE 2114711A1
- Authority
- DE
- Germany
- Prior art keywords
- machine according
- correction
- circuit
- corrected
- carrier plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012937 correction Methods 0.000 claims description 37
- 238000012360 testing method Methods 0.000 claims description 17
- 238000005259 measurement Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 3
- 238000003860 storage Methods 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 2
- 241000218220 Ulmaceae Species 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 9
- 238000009760 electrical discharge machining Methods 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 229920003319 Araldite® Polymers 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000557626 Corvus corax Species 0.000 description 1
- 241000628997 Flos Species 0.000 description 1
- 101001001462 Homo sapiens Importin subunit alpha-5 Proteins 0.000 description 1
- 102100036186 Importin subunit alpha-5 Human genes 0.000 description 1
- 101100136650 Mus musculus Pigo gene Proteins 0.000 description 1
- PQLZZALLLYUAKL-UHFFFAOYSA-N [Au].[Cr].[Ni] Chemical compound [Au].[Cr].[Ni] PQLZZALLLYUAKL-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000881 depressing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 235000013601 eggs Nutrition 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- AHLBNYSZXLDEJQ-FWEHEUNISA-N orlistat Chemical compound CCCCCCCCCCC[C@H](OC(=O)[C@H](CC(C)C)NC=O)C[C@@H]1OC(=O)[C@H]1CCCCCC AHLBNYSZXLDEJQ-FWEHEUNISA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/30—Apparatus or processes specially adapted for manufacturing resistors adapted for baking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/2408—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by pulsed voltage erosion, e.g. spark erosion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/2416—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/17—Post-manufacturing processes
- H05K2203/171—Tuning, e.g. by trimming of printed components or high frequency circuits
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT6794170 | 1970-03-20 | ||
| IT6849570 | 1970-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2114711A1 true DE2114711A1 (de) | 1971-09-30 |
Family
ID=26329850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712114711 Pending DE2114711A1 (de) | 1970-03-20 | 1971-03-22 | Maschine zum Überprüfen und Korrigieren von Elementen hybrider integrierter Schaltungen |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3723694A (enExample) |
| DE (1) | DE2114711A1 (enExample) |
| FR (1) | FR2083455B1 (enExample) |
| GB (1) | GB1344297A (enExample) |
| NL (1) | NL7103709A (enExample) |
| SE (1) | SE363922B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0007598A1 (de) * | 1978-08-02 | 1980-02-06 | Siemens Aktiengesellschaft | Verfahren zur Herstellung einer elektrischen Schichtschaltung auf Kunststoffolie |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3364390B2 (ja) * | 1995-12-30 | 2003-01-08 | 東京エレクトロン株式会社 | 検査装置 |
| US12070753B2 (en) * | 2020-03-30 | 2024-08-27 | Fei Company | Method for temperature monitoring in cryo-electron microscopy |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2079310A (en) * | 1933-10-31 | 1937-05-04 | Joseph W Piercy | Mechanism for producing printing plates by electric arcs |
| NL290932A (enExample) * | 1963-03-29 | |||
| US3335255A (en) * | 1963-11-14 | 1967-08-08 | Avco Corp | Arc erosion milling machine |
| US3486221A (en) * | 1967-06-14 | 1969-12-30 | Sprague Electric Co | High energy beam trimming of electrical components |
| CH464386A (de) * | 1967-07-20 | 1968-10-31 | Exnii Metallorezh Stankov | Vorschub-Programmsteuerungseinrichtung für eine Elektrofunken-Abtragmaschine |
| US3596039A (en) * | 1968-07-19 | 1971-07-27 | Sprague Electric Co | Trimming thin-film capacitors by spark erosion |
-
1971
- 1971-03-18 FR FR7109569A patent/FR2083455B1/fr not_active Expired
- 1971-03-19 SE SE03623/71A patent/SE363922B/xx unknown
- 1971-03-19 NL NL7103709A patent/NL7103709A/xx unknown
- 1971-03-22 US US00126604A patent/US3723694A/en not_active Expired - Lifetime
- 1971-03-22 DE DE19712114711 patent/DE2114711A1/de active Pending
- 1971-04-19 GB GB2472971*A patent/GB1344297A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0007598A1 (de) * | 1978-08-02 | 1980-02-06 | Siemens Aktiengesellschaft | Verfahren zur Herstellung einer elektrischen Schichtschaltung auf Kunststoffolie |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1344297A (en) | 1974-01-16 |
| SE363922B (enExample) | 1974-02-04 |
| US3723694A (en) | 1973-03-27 |
| FR2083455A1 (enExample) | 1971-12-17 |
| FR2083455B1 (enExample) | 1976-07-23 |
| NL7103709A (enExample) | 1971-09-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |