DE2050488C3 - Vorrichtung zum Anbringen einer Vielzahl äquidistanter Ritznuten auf einer Halbleiterscheibe - Google Patents

Vorrichtung zum Anbringen einer Vielzahl äquidistanter Ritznuten auf einer Halbleiterscheibe

Info

Publication number
DE2050488C3
DE2050488C3 DE2050488A DE2050488A DE2050488C3 DE 2050488 C3 DE2050488 C3 DE 2050488C3 DE 2050488 A DE2050488 A DE 2050488A DE 2050488 A DE2050488 A DE 2050488A DE 2050488 C3 DE2050488 C3 DE 2050488C3
Authority
DE
Germany
Prior art keywords
semiconductor wafer
sensing elements
wafer
cutting tool
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2050488A
Other languages
German (de)
English (en)
Other versions
DE2050488A1 (de
DE2050488B2 (de
Inventor
Winfried Dr.-Ing. 8025 Unterhaching Suess
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karl Suess Kg Praezisionsgeraete fur Wissenschaf
Original Assignee
KARL SUESS KG PRAEZISIONSGERAETE fur WISSENSCHAFT und INDUSTRIE 8046 GARCHING
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KARL SUESS KG PRAEZISIONSGERAETE fur WISSENSCHAFT und INDUSTRIE 8046 GARCHING filed Critical KARL SUESS KG PRAEZISIONSGERAETE fur WISSENSCHAFT und INDUSTRIE 8046 GARCHING
Priority to DE2050488A priority Critical patent/DE2050488C3/de
Priority to FR7137758A priority patent/FR2113032A5/fr
Priority to NL7114109A priority patent/NL7114109A/xx
Publication of DE2050488A1 publication Critical patent/DE2050488A1/de
Publication of DE2050488B2 publication Critical patent/DE2050488B2/de
Application granted granted Critical
Publication of DE2050488C3 publication Critical patent/DE2050488C3/de
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE2050488A 1970-10-14 1970-10-14 Vorrichtung zum Anbringen einer Vielzahl äquidistanter Ritznuten auf einer Halbleiterscheibe Expired DE2050488C3 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE2050488A DE2050488C3 (de) 1970-10-14 1970-10-14 Vorrichtung zum Anbringen einer Vielzahl äquidistanter Ritznuten auf einer Halbleiterscheibe
FR7137758A FR2113032A5 (2) 1970-10-14 1971-10-12
NL7114109A NL7114109A (2) 1970-10-14 1971-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2050488A DE2050488C3 (de) 1970-10-14 1970-10-14 Vorrichtung zum Anbringen einer Vielzahl äquidistanter Ritznuten auf einer Halbleiterscheibe

Publications (3)

Publication Number Publication Date
DE2050488A1 DE2050488A1 (de) 1972-06-08
DE2050488B2 DE2050488B2 (de) 1975-05-22
DE2050488C3 true DE2050488C3 (de) 1976-01-08

Family

ID=5785127

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2050488A Expired DE2050488C3 (de) 1970-10-14 1970-10-14 Vorrichtung zum Anbringen einer Vielzahl äquidistanter Ritznuten auf einer Halbleiterscheibe

Country Status (3)

Country Link
DE (1) DE2050488C3 (2)
FR (1) FR2113032A5 (2)
NL (1) NL7114109A (2)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69534098T2 (de) * 1994-01-18 2006-02-09 Dynatex International (Inc.), Santa Rosa Verfahren und vorrichtung zum anritzen und/oder brechen von halbleiterplättchen
DE4425879A1 (de) * 1994-07-09 1996-01-11 Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev Vorrichtung zum Ritzen von im wesentlichen einkristallinen Substraten
CN111267255B (zh) * 2020-01-13 2021-12-24 精典电子股份有限公司 一种圆晶片切割设备

Also Published As

Publication number Publication date
FR2113032A5 (2) 1972-06-23
DE2050488A1 (de) 1972-06-08
DE2050488B2 (de) 1975-05-22
NL7114109A (2) 1972-04-18

Similar Documents

Publication Publication Date Title
DE19717299A1 (de) Schutzeinrichtung für Maschinen, wie Abkantpressen, Schneidemaschinen, Stanzmaschinen o. dgl.
DE2709738A1 (de) Brennschneidmaschine
DE2050488C3 (de) Vorrichtung zum Anbringen einer Vielzahl äquidistanter Ritznuten auf einer Halbleiterscheibe
AT406744B (de) Drahtbiegemaschine, insbesondere zum biegen von baustahldrähten
DE2638268A1 (de) Fuer einen gruppeneinsatz geeignete fleckflaemmduese und verfahren zum selektiven flaemmen
EP0425724B1 (de) Biegemaschine
DE2421392A1 (de) Rohr-trennautomat
DE3346144C1 (de) Vorrichtung für das Schweißen mit optischen Energiestrahlen hoher Energiedichte
EP0585576A1 (de) Lochstanze
DE2910633C2 (2)
EP0019230B1 (de) Plattensäge mit aufrechtem Gestell
DE2815677C2 (de) Einrichtung zur kontinuierlichen Mitnahme eines Werkstückes
DE2704814C2 (de) Fräsmaschine zum gleichzeitigen Planfräsen der Oberseite und der Unterseite eines bandförmigen Gußstranges
WO2015018580A1 (de) Plattenaufteilanlage
DE3809821C2 (2)
DE102005002092B4 (de) Vorrichtung zum Spannen von Rohren und Verfahren zur Steuerung einer solchen Vorrichtung
DE10319208A1 (de) Furniermessermaschine
DE1453268A1 (de) Keilzinkenfraesmaschine
DE3802451C2 (de) Aufteilmaschine für z. B. aus Holz oder auch aus einem anderen Material bestehende Paneele
EP0308822A2 (de) Werkzeugmaschine
DE29517466U1 (de) Schneidmaschine
DE524048C (de) Maschine zur selbsttaetigen Herstellung von Werkstueckabschnitten, insbesondere Rollenbolzen aus Stangenmaterial
DE2851252A1 (de) Verfahren und vorrichtung zum verbinden eines oberfadens mit einem unterfaden
DE2451857C3 (de) Vorrichtung zum Ausformen einer Muffe an einem Rohr aus thermoplastischem Kunststoff
DE925304C (de) Feindraht-Wickelmaschine

Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
8327 Change in the person/name/address of the patent owner

Owner name: KARL SUESS KG, PRAEZISIONSGERAETE FUER WISSENSCHAF