DE2049904A1 - Heizrohre fur die Bearbeitung von Halb leitervorrichtungen - Google Patents

Heizrohre fur die Bearbeitung von Halb leitervorrichtungen

Info

Publication number
DE2049904A1
DE2049904A1 DE19702049904 DE2049904A DE2049904A1 DE 2049904 A1 DE2049904 A1 DE 2049904A1 DE 19702049904 DE19702049904 DE 19702049904 DE 2049904 A DE2049904 A DE 2049904A DE 2049904 A1 DE2049904 A1 DE 2049904A1
Authority
DE
Germany
Prior art keywords
heating tube
tube according
metal film
heating
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19702049904
Other languages
German (de)
English (en)
Inventor
Ronald Lee Dayton Dudkowski Stanley Joseph Kettering Ohio Koepp (V St A ) M
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NCR Voyix Corp
Original Assignee
NCR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NCR Corp filed Critical NCR Corp
Publication of DE2049904A1 publication Critical patent/DE2049904A1/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0014—Devices wherein the heating current flows through particular resistances
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/006—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/053—Field effect transistors fets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/118—Oxide films

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Formation Of Insulating Films (AREA)
  • Electrodes Of Semiconductors (AREA)
DE19702049904 1969-10-14 1970-10-10 Heizrohre fur die Bearbeitung von Halb leitervorrichtungen Pending DE2049904A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86618569A 1969-10-14 1969-10-14

Publications (1)

Publication Number Publication Date
DE2049904A1 true DE2049904A1 (de) 1971-05-13

Family

ID=25347091

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19702049904 Pending DE2049904A1 (de) 1969-10-14 1970-10-10 Heizrohre fur die Bearbeitung von Halb leitervorrichtungen

Country Status (10)

Country Link
US (1) US3645695A (enExample)
JP (1) JPS4922781B1 (enExample)
BE (1) BE757500A (enExample)
CA (1) CA961385A (enExample)
CH (1) CH515613A (enExample)
DE (1) DE2049904A1 (enExample)
ES (1) ES384378A1 (enExample)
FR (1) FR2064318B1 (enExample)
GB (1) GB1260070A (enExample)
ZA (1) ZA706739B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742904A (en) * 1971-06-03 1973-07-03 Motorola Inc Steam generator and gas insertion device
DE2206493C3 (de) * 1972-02-11 1975-01-30 Heraeus-Schott Quarzschmelze Gmbh, 6450 Hanau Mehrschichtiger Quarzglaskörper für die Verwendung in der Festkörpertechnologie
JPS5277590A (en) * 1975-12-24 1977-06-30 Toshiba Corp Semiconductor producing device
US4154192A (en) * 1976-12-10 1979-05-15 Mitsubishi Denki Kabushiki Kaisha Manufacturing apparatus for semiconductor devices
US4592307A (en) * 1985-02-28 1986-06-03 Rca Corporation Vapor phase deposition apparatus
JPS63105255U (enExample) * 1986-12-26 1988-07-07

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2746888A (en) * 1952-07-05 1956-05-22 Du Pont Method of forming titanium coating on refractory body
US3010092A (en) * 1958-08-05 1961-11-21 Bourns Inc Variable resistor
US3112215A (en) * 1959-10-09 1963-11-26 Lonza Ag Preparation of catalytically active coatings
US3507627A (en) * 1964-05-22 1970-04-21 Prototech Inc Heating and catalytic chemical reaction apparatus
US3446659A (en) * 1966-09-16 1969-05-27 Texas Instruments Inc Apparatus and process for growing noncontaminated thermal oxide on silicon
US3516850A (en) * 1966-09-16 1970-06-23 Texas Instruments Inc Process for metal coating a hydrogen permeable material

Also Published As

Publication number Publication date
BE757500A (fr) 1971-03-16
GB1260070A (en) 1972-01-12
CA961385A (en) 1975-01-21
US3645695A (en) 1972-02-29
ES384378A1 (es) 1973-02-16
ZA706739B (en) 1971-05-27
FR2064318A1 (enExample) 1971-07-23
JPS4922781B1 (enExample) 1974-06-11
FR2064318B1 (enExample) 1976-09-03
CH515613A (de) 1971-11-15

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Legal Events

Date Code Title Description
OHW Rejection