CH515613A - Heizvorrichtung für die Behandlung von Halbleitervorrichtungen - Google Patents

Heizvorrichtung für die Behandlung von Halbleitervorrichtungen

Info

Publication number
CH515613A
CH515613A CH1540770A CH1540770A CH515613A CH 515613 A CH515613 A CH 515613A CH 1540770 A CH1540770 A CH 1540770A CH 1540770 A CH1540770 A CH 1540770A CH 515613 A CH515613 A CH 515613A
Authority
CH
Switzerland
Prior art keywords
heater
treatment
semiconductor devices
semiconductor
devices
Prior art date
Application number
CH1540770A
Other languages
English (en)
Inventor
Lee Koepp Ronald
Joseph Dudkowski Stanley
Original Assignee
Ncr Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ncr Co filed Critical Ncr Co
Publication of CH515613A publication Critical patent/CH515613A/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0014—Devices wherein the heating current flows through particular resistances
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/006—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/053—Field effect transistors fets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/118—Oxide films
CH1540770A 1969-10-14 1970-10-14 Heizvorrichtung für die Behandlung von Halbleitervorrichtungen CH515613A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86618569A 1969-10-14 1969-10-14

Publications (1)

Publication Number Publication Date
CH515613A true CH515613A (de) 1971-11-15

Family

ID=25347091

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1540770A CH515613A (de) 1969-10-14 1970-10-14 Heizvorrichtung für die Behandlung von Halbleitervorrichtungen

Country Status (10)

Country Link
US (1) US3645695A (de)
JP (1) JPS4922781B1 (de)
BE (1) BE757500A (de)
CA (1) CA961385A (de)
CH (1) CH515613A (de)
DE (1) DE2049904A1 (de)
ES (1) ES384378A1 (de)
FR (1) FR2064318B1 (de)
GB (1) GB1260070A (de)
ZA (1) ZA706739B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742904A (en) * 1971-06-03 1973-07-03 Motorola Inc Steam generator and gas insertion device
DE2206493C3 (de) * 1972-02-11 1975-01-30 Heraeus-Schott Quarzschmelze Gmbh, 6450 Hanau Mehrschichtiger Quarzglaskörper für die Verwendung in der Festkörpertechnologie
JPS5277590A (en) * 1975-12-24 1977-06-30 Toshiba Corp Semiconductor producing device
US4154192A (en) * 1976-12-10 1979-05-15 Mitsubishi Denki Kabushiki Kaisha Manufacturing apparatus for semiconductor devices
US4592307A (en) * 1985-02-28 1986-06-03 Rca Corporation Vapor phase deposition apparatus
JPS63105255U (de) * 1986-12-26 1988-07-07

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2746888A (en) * 1952-07-05 1956-05-22 Du Pont Method of forming titanium coating on refractory body
US3010092A (en) * 1958-08-05 1961-11-21 Bourns Inc Variable resistor
US3112215A (en) * 1959-10-09 1963-11-26 Lonza Ag Preparation of catalytically active coatings
US3507627A (en) * 1964-05-22 1970-04-21 Prototech Inc Heating and catalytic chemical reaction apparatus
US3516850A (en) * 1966-09-16 1970-06-23 Texas Instruments Inc Process for metal coating a hydrogen permeable material
US3446659A (en) * 1966-09-16 1969-05-27 Texas Instruments Inc Apparatus and process for growing noncontaminated thermal oxide on silicon

Also Published As

Publication number Publication date
CA961385A (en) 1975-01-21
DE2049904A1 (de) 1971-05-13
GB1260070A (en) 1972-01-12
JPS4922781B1 (de) 1974-06-11
ES384378A1 (es) 1973-02-16
US3645695A (en) 1972-02-29
FR2064318B1 (de) 1976-09-03
BE757500A (fr) 1971-03-16
FR2064318A1 (de) 1971-07-23
ZA706739B (en) 1971-05-27

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Legal Events

Date Code Title Description
PL Patent ceased