ES384378A1 - Un tubo-horno para tratar semiconductores. - Google Patents
Un tubo-horno para tratar semiconductores.Info
- Publication number
- ES384378A1 ES384378A1 ES70384378A ES384378A ES384378A1 ES 384378 A1 ES384378 A1 ES 384378A1 ES 70384378 A ES70384378 A ES 70384378A ES 384378 A ES384378 A ES 384378A ES 384378 A1 ES384378 A1 ES 384378A1
- Authority
- ES
- Spain
- Prior art keywords
- insulator layer
- silicon dioxide
- metal film
- platinum metal
- dioxide insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000903 blocking effect Effects 0.000 title 1
- 229910001415 sodium ion Inorganic materials 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 23
- 235000012239 silicon dioxide Nutrition 0.000 abstract 15
- 150000002500 ions Chemical class 0.000 abstract 9
- 239000012212 insulator Substances 0.000 abstract 8
- 239000000377 silicon dioxide Substances 0.000 abstract 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 7
- 239000010453 quartz Substances 0.000 abstract 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 2
- 229910001882 dioxygen Inorganic materials 0.000 abstract 2
- 230000005669 field effect Effects 0.000 abstract 2
- 238000000137 annealing Methods 0.000 abstract 1
- 239000007888 film coating Substances 0.000 abstract 1
- 238000009501 film coating Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0014—Devices wherein the heating current flows through particular resistances
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/006—Apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/053—Field effect transistors fets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/118—Oxide films
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Formation Of Insulating Films (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US86618569A | 1969-10-14 | 1969-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES384378A1 true ES384378A1 (es) | 1973-02-16 |
Family
ID=25347091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES70384378A Expired ES384378A1 (es) | 1969-10-14 | 1970-10-09 | Un tubo-horno para tratar semiconductores. |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3645695A (de) |
| JP (1) | JPS4922781B1 (de) |
| BE (1) | BE757500A (de) |
| CA (1) | CA961385A (de) |
| CH (1) | CH515613A (de) |
| DE (1) | DE2049904A1 (de) |
| ES (1) | ES384378A1 (de) |
| FR (1) | FR2064318B1 (de) |
| GB (1) | GB1260070A (de) |
| ZA (1) | ZA706739B (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3742904A (en) * | 1971-06-03 | 1973-07-03 | Motorola Inc | Steam generator and gas insertion device |
| DE2206493C3 (de) * | 1972-02-11 | 1975-01-30 | Heraeus-Schott Quarzschmelze Gmbh, 6450 Hanau | Mehrschichtiger Quarzglaskörper für die Verwendung in der Festkörpertechnologie |
| JPS5277590A (en) * | 1975-12-24 | 1977-06-30 | Toshiba Corp | Semiconductor producing device |
| US4154192A (en) * | 1976-12-10 | 1979-05-15 | Mitsubishi Denki Kabushiki Kaisha | Manufacturing apparatus for semiconductor devices |
| US4592307A (en) * | 1985-02-28 | 1986-06-03 | Rca Corporation | Vapor phase deposition apparatus |
| JPS63105255U (de) * | 1986-12-26 | 1988-07-07 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2746888A (en) * | 1952-07-05 | 1956-05-22 | Du Pont | Method of forming titanium coating on refractory body |
| US3010092A (en) * | 1958-08-05 | 1961-11-21 | Bourns Inc | Variable resistor |
| US3112215A (en) * | 1959-10-09 | 1963-11-26 | Lonza Ag | Preparation of catalytically active coatings |
| US3507627A (en) * | 1964-05-22 | 1970-04-21 | Prototech Inc | Heating and catalytic chemical reaction apparatus |
| US3516850A (en) * | 1966-09-16 | 1970-06-23 | Texas Instruments Inc | Process for metal coating a hydrogen permeable material |
| US3446659A (en) * | 1966-09-16 | 1969-05-27 | Texas Instruments Inc | Apparatus and process for growing noncontaminated thermal oxide on silicon |
-
0
- BE BE757500D patent/BE757500A/xx unknown
-
1969
- 1969-10-14 US US866185A patent/US3645695A/en not_active Expired - Lifetime
-
1970
- 1970-09-17 CA CA093,426A patent/CA961385A/en not_active Expired
- 1970-10-01 GB GB46783/70A patent/GB1260070A/en not_active Expired
- 1970-10-05 ZA ZA706739A patent/ZA706739B/xx unknown
- 1970-10-09 ES ES70384378A patent/ES384378A1/es not_active Expired
- 1970-10-09 JP JP45089277A patent/JPS4922781B1/ja active Pending
- 1970-10-10 DE DE19702049904 patent/DE2049904A1/de active Pending
- 1970-10-12 FR FR7036721A patent/FR2064318B1/fr not_active Expired
- 1970-10-14 CH CH1540770A patent/CH515613A/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| ZA706739B (en) | 1971-05-27 |
| GB1260070A (en) | 1972-01-12 |
| CA961385A (en) | 1975-01-21 |
| BE757500A (fr) | 1971-03-16 |
| FR2064318B1 (de) | 1976-09-03 |
| DE2049904A1 (de) | 1971-05-13 |
| CH515613A (de) | 1971-11-15 |
| JPS4922781B1 (de) | 1974-06-11 |
| US3645695A (en) | 1972-02-29 |
| FR2064318A1 (de) | 1971-07-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| NO741917L (no) | Fremgangsmåte og anordning for kontinuerlig gassbehandling av smeltet metall. | |
| SE7502450L (sv) | Forfarande for selektiv paleggning av glas pa halvledaranordning. | |
| ES384378A1 (es) | Un tubo-horno para tratar semiconductores. | |
| GB1068189A (en) | The production of semiconductor components | |
| US3823685A (en) | Processing apparatus | |
| ES310069A1 (es) | Mejoras en un articulo de vidrio reforzado. | |
| JPS5546535A (en) | Method of manufacturing semiconductor device | |
| GB1402998A (en) | Apparatus and process for forming p-n junction semiconductor units | |
| JPS53109487A (en) | Manufacture for semiconductor device | |
| IT1069596B (it) | Procedimento per l isolamento di selenio e mercurio da prodotti metallurgici | |
| US3787233A (en) | METHOD OF GROWING MOBILE POSITIVE ION FREE SiO{11 {11 FILMS | |
| JPS57199227A (en) | Manufacture of semiconductor device | |
| JPS51113476A (en) | Semiconductor device manufacturing system | |
| GB1014288A (en) | A process for the production of a doped zone in a body of semi-conductor material | |
| JPS525276A (en) | Silicon gate mos semi-conductor production | |
| FR2178761A1 (en) | Gold conductors - for silicon transistors using oxidised titanium mask | |
| JPS5272162A (en) | Production of semiconductor device | |
| JPS5572080A (en) | Production of silicone gate type semiconductor device | |
| JPS5693315A (en) | Manufacture of semiconductor device | |
| JPS51138167A (en) | Production method of semiconductor device | |
| ES310840A1 (es) | Procedimiento de proteccion de peliculas metalicas, delgadas, depositadas sobre el vidrio y la ceramica vitrificada. | |
| JPS5376770A (en) | Production of insulated gate field effect transistor | |
| JPS5243375A (en) | Process for production of p channel silicon gate mis type semiconducto r device | |
| JPS5247370A (en) | Diffusion method | |
| AU263520B2 (en) | Process. and device for improving the thermal uniformity of molten glass |