DE19983646T1 - Statischer Kondensator-Drucksensor - Google Patents

Statischer Kondensator-Drucksensor

Info

Publication number
DE19983646T1
DE19983646T1 DE19983646T DE19983646T DE19983646T1 DE 19983646 T1 DE19983646 T1 DE 19983646T1 DE 19983646 T DE19983646 T DE 19983646T DE 19983646 T DE19983646 T DE 19983646T DE 19983646 T1 DE19983646 T1 DE 19983646T1
Authority
DE
Germany
Prior art keywords
pressure sensor
condenser pressure
static condenser
static
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19983646T
Other languages
English (en)
Other versions
DE19983646B3 (de
Inventor
Junichi Horie
Atsushi Miyazaki
Satoshi Shimada
Akihiko Saitou
Yasuo Onose
Norio Ichikawa
Keiji Hanzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Automotive Systems Engineering Co Ltd
Original Assignee
Hitachi Ltd
Hitachi Car Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Car Engineering Co Ltd filed Critical Hitachi Ltd
Publication of DE19983646T1 publication Critical patent/DE19983646T1/de
Application granted granted Critical
Publication of DE19983646B3 publication Critical patent/DE19983646B3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE19983646T 1998-10-12 1999-09-20 Statischer Kondensator-Drucksensor Expired - Fee Related DE19983646B3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP28906198A JP3567089B2 (ja) 1998-10-12 1998-10-12 静電容量式圧力センサ
JP10/289061 1998-10-12
PCT/JP1999/005116 WO2000022397A1 (fr) 1998-10-12 1999-09-20 Capteur de pression capacitif

Publications (2)

Publication Number Publication Date
DE19983646T1 true DE19983646T1 (de) 2002-03-07
DE19983646B3 DE19983646B3 (de) 2013-06-06

Family

ID=17738325

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19983646T Expired - Fee Related DE19983646B3 (de) 1998-10-12 1999-09-20 Statischer Kondensator-Drucksensor

Country Status (4)

Country Link
US (1) US6564643B1 (de)
JP (1) JP3567089B2 (de)
DE (1) DE19983646B3 (de)
WO (1) WO2000022397A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4671534B2 (ja) * 2001-05-14 2011-04-20 株式会社豊田中央研究所 ダイアフラム型半導体装置とその製造方法
WO2004016168A1 (en) * 2002-08-19 2004-02-26 Czarnek & Orkin Laboratories, Inc. Capacitive uterine contraction sensor
CN1864054B (zh) * 2003-08-11 2012-08-22 美国亚德诺半导体公司 电容传感器
EP1522521B1 (de) * 2003-10-10 2015-12-09 Infineon Technologies AG Kapazitiver Sensor
JP2005201818A (ja) * 2004-01-16 2005-07-28 Alps Electric Co Ltd 圧力センサ
US7379792B2 (en) 2005-09-29 2008-05-27 Rosemount Inc. Pressure transmitter with acoustic pressure sensor
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
US7765875B2 (en) * 2007-12-31 2010-08-03 Rosemount Aerospace Inc. High temperature capacitive static/dynamic pressure sensors
US8939029B2 (en) 2008-09-05 2015-01-27 Analog Devices, Inc. MEMS sensor with movable Z-axis sensing element
US8146425B2 (en) * 2008-09-05 2012-04-03 Analog Devices, Inc. MEMS sensor with movable z-axis sensing element
US8327713B2 (en) 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property
US7954383B2 (en) * 2008-12-03 2011-06-07 Rosemount Inc. Method and apparatus for pressure measurement using fill tube
US7870791B2 (en) 2008-12-03 2011-01-18 Rosemount Inc. Method and apparatus for pressure measurement using quartz crystal
CA2759790A1 (en) * 2009-05-01 2010-11-04 The University Of Western Ontario Photonic crystal pressure sensor
US8132464B2 (en) 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US8141429B2 (en) 2010-07-30 2012-03-27 Rosemount Aerospace Inc. High temperature capacitive static/dynamic pressure sensors and methods of making the same
JP2013156066A (ja) * 2012-01-27 2013-08-15 Wacom Co Ltd 静電容量方式圧力センシング半導体デバイス
JP5892595B2 (ja) 2012-02-06 2016-03-23 株式会社ワコム 位置指示器
US8752433B2 (en) 2012-06-19 2014-06-17 Rosemount Inc. Differential pressure transmitter with pressure sensor
US9249008B2 (en) * 2012-12-20 2016-02-02 Industrial Technology Research Institute MEMS device with multiple electrodes and fabricating method thereof
CN103879949B (zh) * 2012-12-20 2016-05-04 财团法人工业技术研究院 具多重电极的微机电装置及其制作方法
FI125447B (en) * 2013-06-04 2015-10-15 Murata Manufacturing Co Improved pressure sensor
US9285404B2 (en) * 2013-08-15 2016-03-15 Freescale Semiconductor, Inc. Test structure and methodology for estimating sensitivity of pressure sensors
EP3868295A1 (de) * 2014-04-09 2021-08-25 Bando Chemical Industries, Ltd. Verfahren zur verfolgung der verformung einer oberfläche eines lebenden körpers
CN105222931B (zh) * 2014-06-25 2019-02-19 香港科技大学 Mems电容式压力传感器及其制造方法
JP6306705B2 (ja) 2014-07-16 2018-04-04 株式会社日立製作所 超音波探触子、その性能評価方法及び超音波診断装置
KR101739791B1 (ko) * 2015-05-11 2017-05-26 주식회사 하이딥 압력 센싱 장치, 압력 검출기 및 이들을 포함하는 장치
JP2019512084A (ja) * 2016-02-03 2019-05-09 ハッチンソン テクノロジー インコーポレイテッドＨｕｔｃｈｉｎｓｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｉｎｃｏｒｐｏｒａｔｅｄ 一体型リードを備えた小型圧力・力センサ
JP6696552B2 (ja) * 2017-11-13 2020-05-20 株式会社村田製作所 配線容量キャンセル方法および配線容量キャンセル装置
DE102018222712A1 (de) * 2018-12-21 2020-06-25 Robert Bosch Gmbh Mikromechanisches Bauteil für eine kapazitive Drucksensorvorrichtung
JP7248559B2 (ja) * 2019-10-30 2023-03-29 ラピスセミコンダクタ株式会社 半導体装置及び容量センサ装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3787764A (en) 1971-12-03 1974-01-22 Atomic Energy Commission Solid dielectric capacitance gauge for measuring fluid pressure having temperature compensation and guard electrode
US4625560A (en) * 1985-05-13 1986-12-02 The Scott & Fetzer Company Capacitive digital integrated circuit pressure transducer
US4998179A (en) 1989-02-28 1991-03-05 United Technologies Corporation Capacitive semiconductive sensor with hinged diaphragm for planar movement
DE4004179A1 (de) * 1990-02-12 1991-08-14 Fraunhofer Ges Forschung Integrierbarer, kapazitiver drucksensor und verfahren zum herstellen desselben
JP2871381B2 (ja) 1993-03-30 1999-03-17 本田技研工業株式会社 圧力センサー
US5561247A (en) * 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor
US5369544A (en) 1993-04-05 1994-11-29 Ford Motor Company Silicon-on-insulator capacitive surface micromachined absolute pressure sensor
US5992240A (en) * 1995-11-21 1999-11-30 Fuji Electric Co., Ltd. Pressure detecting apparatus for measuring pressure based on detected capacitance
DE19743749A1 (de) * 1996-10-03 1998-04-09 Hitachi Ltd Halbleiterdrucksensor

Also Published As

Publication number Publication date
JP3567089B2 (ja) 2004-09-15
WO2000022397A1 (fr) 2000-04-20
DE19983646B3 (de) 2013-06-06
JP2000121472A (ja) 2000-04-28
US6564643B1 (en) 2003-05-20

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final

Effective date: 20130907

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee