DE1957286A1 - Poliermaschine - Google Patents
PoliermaschineInfo
- Publication number
- DE1957286A1 DE1957286A1 DE19691957286 DE1957286A DE1957286A1 DE 1957286 A1 DE1957286 A1 DE 1957286A1 DE 19691957286 DE19691957286 DE 19691957286 DE 1957286 A DE1957286 A DE 1957286A DE 1957286 A1 DE1957286 A1 DE 1957286A1
- Authority
- DE
- Germany
- Prior art keywords
- arrangement
- opening
- radial
- loading plate
- spindle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims description 37
- 239000012530 fluid Substances 0.000 claims description 17
- 230000020347 spindle assembly Effects 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- 230000000712 assembly Effects 0.000 description 11
- 238000000429 assembly Methods 0.000 description 11
- 239000002826 coolant Substances 0.000 description 7
- 239000004744 fabric Substances 0.000 description 7
- 239000012188 paraffin wax Substances 0.000 description 6
- 238000007517 polishing process Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 235000001674 Agaricus brunnescens Nutrition 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 235000019687 Lamb Nutrition 0.000 description 1
- 241000283973 Oryctolagus cuniculus Species 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Jigs For Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US77602368A | 1968-11-15 | 1968-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1957286A1 true DE1957286A1 (de) | 1970-07-30 |
Family
ID=25106245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19691957286 Pending DE1957286A1 (de) | 1968-11-15 | 1969-11-14 | Poliermaschine |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3579917A (enrdf_load_stackoverflow) |
| JP (1) | JPS4814234B1 (enrdf_load_stackoverflow) |
| DE (1) | DE1957286A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2023433A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1236864A (enrdf_load_stackoverflow) |
| NL (1) | NL6917238A (enrdf_load_stackoverflow) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3977130A (en) * | 1975-05-12 | 1976-08-31 | Semimetals, Inc. | Removal-compensating polishing apparatus |
| FR2523892A1 (fr) * | 1982-03-26 | 1983-09-30 | Procedes Equip Sciences Ind | Perfectionnements aux machines de polissage a plateau tournant |
| KR910009320B1 (ko) * | 1986-08-19 | 1991-11-09 | 미쓰비시 마테리알 가부시기가이샤 | 연마장치 |
| US5643053A (en) | 1993-12-27 | 1997-07-01 | Applied Materials, Inc. | Chemical mechanical polishing apparatus with improved polishing control |
| US5607341A (en) * | 1994-08-08 | 1997-03-04 | Leach; Michael A. | Method and structure for polishing a wafer during manufacture of integrated circuits |
| US5791978A (en) * | 1996-11-14 | 1998-08-11 | Speedfam Corporation | Bearing assembly for wafer planarization carrier |
| US6095910A (en) * | 1997-11-10 | 2000-08-01 | 3M Innovative Properties Company | Surface treatment article having a quick release fastener |
| US6142858A (en) | 1997-11-10 | 2000-11-07 | 3M Innovative Properties Company | Backup pad for abrasive articles |
| US20060019585A1 (en) * | 2004-07-26 | 2006-01-26 | Zayat Charles D | Device for circular grinding, sanding and stripping tools to attach to any power drive |
| CN101780657B (zh) * | 2010-03-25 | 2011-05-11 | 南京航空航天大学 | 能使加载载荷均匀布置在承载器表面的抛光加载装置 |
| CN104907896A (zh) * | 2015-06-07 | 2015-09-16 | 安徽格楠机械有限公司 | 一种适用于深井采油钻头研磨抛光机 |
| CN107363703A (zh) * | 2017-08-25 | 2017-11-21 | 嘉兴洁尘环保科技有限公司温州分公司 | 打磨抛光除尘一体机 |
| US11692421B2 (en) * | 2018-10-15 | 2023-07-04 | Eog Resources, Inc. | Systems and methods for connecting and disconnecting pumping equipment |
| CN110962138B (zh) * | 2019-11-13 | 2021-02-19 | 广东博智林机器人有限公司 | 浮动打磨执行装置及打磨机器人 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US698126A (en) * | 1901-06-01 | 1902-04-22 | Misko Cutlery Company | Grinding or polishing metals. |
| US2998680A (en) * | 1958-07-21 | 1961-09-05 | Morton S Lipkins | Lapping machines |
| US3110988A (en) * | 1960-10-06 | 1963-11-19 | Speedlap Corp | Lapping machine |
-
1968
- 1968-11-15 US US776023A patent/US3579917A/en not_active Expired - Lifetime
-
1969
- 1969-11-05 GB GB54330/69A patent/GB1236864A/en not_active Expired
- 1969-11-14 FR FR6939290A patent/FR2023433A1/fr not_active Withdrawn
- 1969-11-14 DE DE19691957286 patent/DE1957286A1/de active Pending
- 1969-11-15 JP JP44091152A patent/JPS4814234B1/ja active Pending
- 1969-11-17 NL NL6917238A patent/NL6917238A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4814234B1 (enrdf_load_stackoverflow) | 1973-05-04 |
| GB1236864A (en) | 1971-06-23 |
| FR2023433A1 (enrdf_load_stackoverflow) | 1970-08-21 |
| NL6917238A (enrdf_load_stackoverflow) | 1970-05-20 |
| US3579917A (en) | 1971-05-25 |
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