GB1236864A - Improvements in or relating to load plate units for use in polishing machines - Google Patents

Improvements in or relating to load plate units for use in polishing machines

Info

Publication number
GB1236864A
GB1236864A GB54330/69A GB5433069A GB1236864A GB 1236864 A GB1236864 A GB 1236864A GB 54330/69 A GB54330/69 A GB 54330/69A GB 5433069 A GB5433069 A GB 5433069A GB 1236864 A GB1236864 A GB 1236864A
Authority
GB
United Kingdom
Prior art keywords
unit
polishing
spindle
circulation
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB54330/69A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam Corp
Original Assignee
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Corp filed Critical Speedfam Corp
Publication of GB1236864A publication Critical patent/GB1236864A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

1,236,864. Polishing. SPEEDFAM CORP. 5 Nov., 1969 [15 Nov., 1968], No. 54330/69. Heading B3D. A circular loading plate unit 82 for a polishing machine 10 has an internal chamber 96, 97, means being provided for circulation of fluid through the chamber 96, 97. On circulating hot water, steam, &c., the unit 82 is heated, so that a layer of molten paraffin wax &c., may be spread over a workpiece-engaging surface, and subsequent circulation of cold water solidifies the wax around positioned workpieces 112, adhering them to the unit 82 for transfer to the polishing machine 10. Polishing.-The machine 10 includes a rotary wheel assembly 38 having a polishing cloth 42 mounted on an annular backing wheel 40, an abrasive slurry e.g. of iron oxide, cerium oxide, &c., being supplied through spouts 48. Pneumatically movable piston rods 28 mount spindle assemblies 54, each supporting, through a universal ball bearing 74, a pressure cup 70 having an annular ridge 72 for engaging a corresponding unit 82 bearing adhered workpieces 112. The lower end of each spindle 54 engages through seal assemblies 102 in a central opening 90 of an upper plate 84 of the respective unit 82, and cooling fluid may be supplied through an inlet 62 and passage 58, entering the chamber 96, 97 through radial channels 92 to flow around a baffle plate 98, and discharging through ports 94 to an outlet 68. A collar 80 excludes abrasive slurry &c., from the bearing 74. A workpiece mounting device 120, Fig. 6, comprises a plate assembly 126 for supporting a unit 82 detached from engagement with the spindle 54, having a nose 128 for engaging the seal assemblies 102, fluid inlet and outlet passages 130, 134 being provided in the nose for pressurized fluid circulation.
GB54330/69A 1968-11-15 1969-11-05 Improvements in or relating to load plate units for use in polishing machines Expired GB1236864A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77602368A 1968-11-15 1968-11-15

Publications (1)

Publication Number Publication Date
GB1236864A true GB1236864A (en) 1971-06-23

Family

ID=25106245

Family Applications (1)

Application Number Title Priority Date Filing Date
GB54330/69A Expired GB1236864A (en) 1968-11-15 1969-11-05 Improvements in or relating to load plate units for use in polishing machines

Country Status (6)

Country Link
US (1) US3579917A (en)
JP (1) JPS4814234B1 (en)
DE (1) DE1957286A1 (en)
FR (1) FR2023433A1 (en)
GB (1) GB1236864A (en)
NL (1) NL6917238A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101780657A (en) * 2010-03-25 2010-07-21 南京航空航天大学 Polishing loading device capable of uniformly distributing load on surface of loader

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3977130A (en) * 1975-05-12 1976-08-31 Semimetals, Inc. Removal-compensating polishing apparatus
FR2523892A1 (en) * 1982-03-26 1983-09-30 Procedes Equip Sciences Ind IMPROVEMENTS ON TURNING POLISHING MACHINES
KR910009320B1 (en) * 1986-08-19 1991-11-09 미쓰비시 마테리알 가부시기가이샤 Polishing apparatus
US5643053A (en) * 1993-12-27 1997-07-01 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved polishing control
US5607341A (en) * 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5791978A (en) * 1996-11-14 1998-08-11 Speedfam Corporation Bearing assembly for wafer planarization carrier
US6142858A (en) 1997-11-10 2000-11-07 3M Innovative Properties Company Backup pad for abrasive articles
US6095910A (en) * 1997-11-10 2000-08-01 3M Innovative Properties Company Surface treatment article having a quick release fastener
US20060019585A1 (en) * 2004-07-26 2006-01-26 Zayat Charles D Device for circular grinding, sanding and stripping tools to attach to any power drive
CN104907896A (en) * 2015-06-07 2015-09-16 安徽格楠机械有限公司 Grinding and polishing machine applicable to deep-well oil-production drilling bit
CN107363703A (en) * 2017-08-25 2017-11-21 嘉兴洁尘环保科技有限公司温州分公司 Sanding and polishing dust removing integrated machine
US11692421B2 (en) * 2018-10-15 2023-07-04 Eog Resources, Inc. Systems and methods for connecting and disconnecting pumping equipment
CN110962138B (en) * 2019-11-13 2021-02-19 广东博智林机器人有限公司 Floating polishing execution device and polishing robot

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US698126A (en) * 1901-06-01 1902-04-22 Misko Cutlery Company Grinding or polishing metals.
US2998680A (en) * 1958-07-21 1961-09-05 Morton S Lipkins Lapping machines
US3110988A (en) * 1960-10-06 1963-11-19 Speedlap Corp Lapping machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101780657A (en) * 2010-03-25 2010-07-21 南京航空航天大学 Polishing loading device capable of uniformly distributing load on surface of loader
CN101780657B (en) * 2010-03-25 2011-05-11 南京航空航天大学 Polishing loading device capable of uniformly distributing load on surface of loader

Also Published As

Publication number Publication date
JPS4814234B1 (en) 1973-05-04
DE1957286A1 (en) 1970-07-30
US3579917A (en) 1971-05-25
NL6917238A (en) 1970-05-20
FR2023433A1 (en) 1970-08-21

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