GB1236864A - Improvements in or relating to load plate units for use in polishing machines - Google Patents

Improvements in or relating to load plate units for use in polishing machines

Info

Publication number
GB1236864A
GB1236864A GB54330/69A GB5433069A GB1236864A GB 1236864 A GB1236864 A GB 1236864A GB 54330/69 A GB54330/69 A GB 54330/69A GB 5433069 A GB5433069 A GB 5433069A GB 1236864 A GB1236864 A GB 1236864A
Authority
GB
United Kingdom
Prior art keywords
unit
polishing
spindle
circulation
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB54330/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam Corp
Original Assignee
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Corp filed Critical Speedfam Corp
Publication of GB1236864A publication Critical patent/GB1236864A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
GB54330/69A 1968-11-15 1969-11-05 Improvements in or relating to load plate units for use in polishing machines Expired GB1236864A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77602368A 1968-11-15 1968-11-15

Publications (1)

Publication Number Publication Date
GB1236864A true GB1236864A (en) 1971-06-23

Family

ID=25106245

Family Applications (1)

Application Number Title Priority Date Filing Date
GB54330/69A Expired GB1236864A (en) 1968-11-15 1969-11-05 Improvements in or relating to load plate units for use in polishing machines

Country Status (6)

Country Link
US (1) US3579917A (enrdf_load_stackoverflow)
JP (1) JPS4814234B1 (enrdf_load_stackoverflow)
DE (1) DE1957286A1 (enrdf_load_stackoverflow)
FR (1) FR2023433A1 (enrdf_load_stackoverflow)
GB (1) GB1236864A (enrdf_load_stackoverflow)
NL (1) NL6917238A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101780657A (zh) * 2010-03-25 2010-07-21 南京航空航天大学 能使加载载荷均匀布置在承载器表面的抛光加载装置

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3977130A (en) * 1975-05-12 1976-08-31 Semimetals, Inc. Removal-compensating polishing apparatus
FR2523892A1 (fr) * 1982-03-26 1983-09-30 Procedes Equip Sciences Ind Perfectionnements aux machines de polissage a plateau tournant
KR910009320B1 (ko) * 1986-08-19 1991-11-09 미쓰비시 마테리알 가부시기가이샤 연마장치
US5643053A (en) 1993-12-27 1997-07-01 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved polishing control
US5607341A (en) * 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5791978A (en) * 1996-11-14 1998-08-11 Speedfam Corporation Bearing assembly for wafer planarization carrier
US6095910A (en) * 1997-11-10 2000-08-01 3M Innovative Properties Company Surface treatment article having a quick release fastener
US6142858A (en) 1997-11-10 2000-11-07 3M Innovative Properties Company Backup pad for abrasive articles
US20060019585A1 (en) * 2004-07-26 2006-01-26 Zayat Charles D Device for circular grinding, sanding and stripping tools to attach to any power drive
CN104907896A (zh) * 2015-06-07 2015-09-16 安徽格楠机械有限公司 一种适用于深井采油钻头研磨抛光机
CN107363703A (zh) * 2017-08-25 2017-11-21 嘉兴洁尘环保科技有限公司温州分公司 打磨抛光除尘一体机
US11692421B2 (en) * 2018-10-15 2023-07-04 Eog Resources, Inc. Systems and methods for connecting and disconnecting pumping equipment
CN110962138B (zh) * 2019-11-13 2021-02-19 广东博智林机器人有限公司 浮动打磨执行装置及打磨机器人

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US698126A (en) * 1901-06-01 1902-04-22 Misko Cutlery Company Grinding or polishing metals.
US2998680A (en) * 1958-07-21 1961-09-05 Morton S Lipkins Lapping machines
US3110988A (en) * 1960-10-06 1963-11-19 Speedlap Corp Lapping machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101780657A (zh) * 2010-03-25 2010-07-21 南京航空航天大学 能使加载载荷均匀布置在承载器表面的抛光加载装置
CN101780657B (zh) * 2010-03-25 2011-05-11 南京航空航天大学 能使加载载荷均匀布置在承载器表面的抛光加载装置

Also Published As

Publication number Publication date
JPS4814234B1 (enrdf_load_stackoverflow) 1973-05-04
DE1957286A1 (de) 1970-07-30
FR2023433A1 (enrdf_load_stackoverflow) 1970-08-21
NL6917238A (enrdf_load_stackoverflow) 1970-05-20
US3579917A (en) 1971-05-25

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